產品微小化是長年的趨勢，而眾多微小化元件製造的方法之中，以微切削加工(micro-machining)具有設備便宜、加工時間較短、容易加工出3D曲面等優點。在高精度要求下，如何讓使用微型刀具(micro tool)之微切削加工，具有生產性及良好的加工精度，微量潤滑(MQL)是個很好的選擇。
本研究是以微銑刀(micro mill)作為切削加工之刀具，並使用微量潤滑輔助切削。在不同進給(1 μm/rev、1.5 μ m/rev及2 μm/rev)與不同切削速度(37.7 m/min、56.55 m/min及75.4 m/min)，觀察乾切削與微量潤滑輔助切削下的刀具磨耗、工件表面精度與毛邊的情形。不像傳統銑削，在微銑削實驗下，進給愈大反而會有愈小的刀具磨耗。相對於乾切削，以刀具磨耗量而言，在進給2 μm/rev、切削速度56.55 m/min的條件下，MQL的使用能減少刀具磨耗約56%。就切削液量的使用量而言，1.88 ml/h的切削液量，已可使刀具磨耗量達到最少，再增加切削液並無明顯地改善。而根據實驗結果，工件表面精度變差及毛邊的產生，亦與刀具磨耗呈現正相關之關係。而MQL的使用，亦有減緩工件表面精度變差(Ra值至少下降0.6 μm)，抑制毛邊的產生的作用。

Product miniaturization is a long-term trend. Mechanical micro-machining is a suitable technique for manufacturing of microstructures characterized by cheap equipments, less working time, and possible complex geometry. For the requirements for high precision manufacture, the use of minimum/minimal quantity lubrication (MQL) is a good strategy for micro-machining due to long tool life and high product accuracy.
This study presents an experimental investigation of the MQL in micro milling. The tool wear, surface roughness, and burr formation are observed at different feeds (1 μm/rev, 1.5 μm/rev, and 2 μm/rev) and cutting speeds ( 37.7 m/min, 56.55 m/min, and 75.4 m/min) under dry and MQL cutting. Unlike conventional milling, greater tool wear is observed at lower feeds. Compared with the same cutting condition for dry cutting (feed 2 μm/rev, cutting speed 56.55 m/min), MQL can reduce the tool wear about 56%. In terms of the consumption of the cutting fluid, oil flow rate of 1.88 ml/h is sufficient for reducing the tool wear in micro milling. According to the experimental results, deterioration of surface finish and burr formation are closely related to the tool wear. The use of MQL, not only reduces the tool wear, but also diminishes the deterioration of surface finish (the improvement of Ra is at least 0.6 μm) and the burr formation.

謝誌 i
目錄 ii
圖目錄 iv
表目錄 vi
論文摘要 vii
Abstract viii
第一章 緒論 1
1.1 研究背景與動機 1
1.2 研究目的 5
1.3 論文架構 6
第二章 文獻回顧與探討 7
2.1 切削液之功能與MQL之發展緣起 7
2.2 MQL之相關研究 10
2.3 微切削之相關研究 16
第三章 實驗設備與方法 19
3.1 實驗配置 19
3.2 實驗方法 22
第四章 實驗結果與討論 27
4.1 乾切削與MQL對刀具磨耗之影響 27
4.2 乾切削與MQL對工件表面精度之影響 35
4.3乾切削與MQL對毛邊生成之影響 41
4.4 不同刀具之比較 47
4.5 MQL不同切削液量之比較 49
4.6 MQL不同空氣量之比較 51
第五章 結論與未來展望 54
5.1 結論 54
5.2 未來展望 56
參考文獻 59
附錄：實驗設備 63

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