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研究生:徐沛良
研究生(外文):Pei-Liang Hsu
論文名稱:利用電子束微影製程製造奈米等級之光子晶體結構
論文名稱(外文):The Investigation of Photonic Crystal with Nanometer Scale Fabricated by E-beam Lithography
指導教授:胡宇光胡宇光引用關係
指導教授(外文):Yeu-Kuang Hwu
學位類別:碩士
校院名稱:國立臺灣海洋大學
系所名稱:光電科學研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2009
畢業學年度:97
語文別:英文
論文頁數:70
中文關鍵詞:光子晶體電子束微影奈米
外文關鍵詞:Photonic CrystalE-beam LithographyNanometer
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  • 被引用被引用:0
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  • 下載下載:78
  • 收藏至我的研究室書目清單書目收藏:0
本論文以開始探討週期性結構特性的理論基礎,藉由模擬計算不同材料介質與不同結構排列,探討在特定波長範圍應用下之最佳光子晶體結構,以尋找能代替傳統光波導的光子晶體元件架構。
由於結構尺寸太小,傳統乾蝕刻的方式難以製作應用在紫外光波段之光子晶體結構,而本實驗室在製做奈米結構上,擁有非常成熟的技術,我們便以製作目前較少人研究之紫外光波段光子晶體為出發點,以平面波展開法分別探討適合做為光子晶體的材料及其不同結構設計, 並藉由TE與TM不同模態之能隙圖以計算其相對之能隙寬度。
同時利用此結果設計出所需的光子晶體結構,接著利用電子術微影製程所具備之高解析度優勢來定義奈米等級之光子晶體結構。最後再利用微電鍍技術,在以圖型化之矽基板上成長出之金為介質材料之光子晶體,實驗結果顯示我們以可成功製作出奈米等級且具有高密度及高深寬比之二維光子晶體波導結構。
In this study, the theory and characterizations of periodical structure for photonic crystal application was discussed. The object is to find out an optimal photonic crystal in a specific wavelength (UV) by simulation of different used material and designed periodical structural array to prepare the needed photonic crystal.
Since it is difficult to fabricate the photonic crystal used in the UV range, only a few studies tried to make it. In addition, according to our state-in-art fabrication ability, we tried to target on it. In this study, the investigated material as the medium of photonic crystal was discussed based on the plane wave expansion algorithm. In addition, the designed band structure of specific photonic crystal was calculated by TE and TM modes.
By using the simulated result to find out the optimal designed pattern, the nano-scale structure was patterned on the PMMA A6 photo resistor by using high resolution e-beam lithography. An electroplating process was subsequently used to deposit the Au on the patterned Si base photonic crystal substrate. The high density and high aspect ratio of two dimension photonic crystal structure has been successfully fabricated.
摘要 1
Abstract 2
目錄 3
圖目錄 5
Chapter 1 Introduction 7
1-1 Nano-Optics 7
1-2 Research Motivation and Objective 9
Chapter 2 Theory of Photonic Crystal and Analysis 11
2-1 Introduction of Photonic Crystal 11
2-2 Development of Photonic Crystal 13
2-3 Photonic Crystal Physic 19
2-3-1 The Geometry Properties of Periodic Structures 19
2-3-2 Brillouin Zones and Band Structures (Bloch Theorem) 22
2-3-3 Photonic Band Gap 26
2-4 Numerical Calculation of Photonic Crystal 27
2-4-1 Plane Wave Expansion Method PWE [24] 28
2-4-2 Finite-Difference-Time-Domains 29
2-4 Conclusions 34
Chapter 3 Design and Fabrication of Photonic Crystal Structures 35
3-1 Material Selection 35
3-2 Pattern Definition of Photonic Crystal 37
3-3 Manufacture of Photonic Crystal 39
Chapter 4 Results and Discussion 46
4-1 Comparison of Band Width 46
4-2 Estimation Band Structure 49
4-3 Results of Fabrication 52
4-3-1 Determination of E-beam Parameters 52
4-3-2 Evaluation of Resist Development 55
4-3-3 Gold Structure Built-up by Electrodeposition 59
Chapter 5 Conclusion 65
References 66
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