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研究生:賴進發
研究生(外文):Chin-Fa Lai
論文名稱:數值孔徑為0.65之角度偏向顯微鏡之研發
論文名稱(外文):Study on Angle deviation microscopy for NA=0.65
指導教授:邱銘宏邱銘宏引用關係
指導教授(外文):Ming-Hung Chiu
學位類別:碩士
校院名稱:國立虎尾科技大學
系所名稱:光電與材料科技研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2009
畢業學年度:97
語文別:中文
論文頁數:78
中文關鍵詞:外差干涉共光程顯微鏡
外文關鍵詞:SPR
相關次數:
  • 被引用被引用:2
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本研究主要提出利用共光程外差干涉術結合了表面電漿共振(Surface plasmon resonance;SPR)角度量測架構且利用NA值為0.65,可以增加其量測解析度。當穿透光束入射待測物後,因折射率及表面高度變化,使得光束會產生收斂或是發散的極微小角度變化。當光束經由SPR微小角度感測器時,會使入射角偏離了共振角,造成SPR感測器有明顯的相位變化,另有外差干涉術得到相位的變化值。因待測物的折射率及表面形貌變化,皆與相位變化成正比關係,所以量測個別相位變化時,即可描繪出待測物的表面形貌或是折射率的分佈。縱向解析度方面可高逹奈米等級,優點上具有非接觸性、非破壞性、樣品不需有導電性,也不用任何額外的處理、高解析能力,以及可即時量測透明物體。
A new microscopy technique that we transmission angle deviation microscopy (TADM) is presented. It is based on common-path heterodyne interference and the surface plasmon resonance (SPR) sensor with using the microscope which NA value is 0.65. The method can increase the longitudinal resolution and the measurement range is opposite proportional to the NA value. Based on the geometrical optics principle, when transmitted light is incident upon a specimen, the beam converges or diverges because of the refractive index and surface height variations. And then the beam passing a SPR angular sensor, the phase difference between two edges of the test beam is changed. So, we can use two detectors and hetero interferometry to measure this phase value, and transfer it to a surface height. The method has some merits, such as, non-contact, non-destructive, and real-time measurement. The technique can be without conductivity and pretreatment.
摘要.................................................. ...i
Abstract ................................................ii
誌謝....................................................iii
目錄.....................................................iv
表目錄..................................................vii
圖目錄.................................................viii
符號說明.................................................xi
第一章 序論...............................................1
1.1 前言..................................................1
1.2 文獻回顧..............................................2
1.2.1 表面二維量測........................................2
1.2.2三維結構量測.........................................5
1.3 論文架構..............................................7
第二章 共光程外差干涉儀...................................9
2.1 簡介..................................................9
2.2共光程外差干涉儀原理[35] ..............................13
2.3 共光程外差干涉儀基本架構.............................15
第三章 表面電漿共振基本原理..............................17
3.1簡介..................................................17
3.2色散關係式............................................18
3.3激發表面電漿波方法....................................20
3.4 SPR系統的反射率及相位推導............................21
3.5 SPR系統模擬與實驗....................................25
3.5.1表面電漿共振角度感測器光強度量測法..................26
3.5.2表面電漿共振角度感測器相位量測法....................27
3.6小結..................................................29
第四章 系統架構之幾何光學...............................31
4.1 簡介.................................................31
4.2 待測物表面產生變化時角度偏向與相位所產生的變化.......31
4.3待測物表面變化與相位差的關係..........................35
4.4小結..................................................36
第五章 角度偏向顯微術....................................39
5.1前言..................................................39
5.2角度偏向顯微鏡架構....................................40
5.2.1實驗儀器與器材......................................40
5.2.2光學系統............................................42
5.2.3電路設計............................................43
5.2.4 控制程式...........................................44
5.3 系統分析.............................................46
5.3.1待測物(Δz)與相位差(ΔΦ)變化之關係....................46
5.3.2系統穩定度..........................................47
5.3.3系統靈敏度..........................................49
5.3.4系統量測範圍及解析度................................50
5.4 結果與討論...........................................51
5.4.1 穿透式物體表面形貌量測.............................51
5.4.2誤差分析............................................61
5.5結論..................................................67
參考文獻.................................................69
英文大綱.................................................74
簡歷.....................................................78
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