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研究生:陳怡靜
研究生(外文):I-Ching Chen
論文名稱:建構雙光束雷射干涉儀校正精密機具之檢測系統
論文名稱(外文):Development of a Measurement System Using Dual-Beam Laser Interferometer for Precision Machine Tools
指導教授:覺文郁覺文郁引用關係
學位類別:碩士
校院名稱:國立虎尾科技大學
系所名稱:光電與材料科技研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2009
畢業學年度:97
語文別:中文
論文頁數:98
中文關鍵詞:雙光束雷射干涉儀角度誤差垂直度誤差光學非接觸式檢測精密機具校正
外文關鍵詞:dual-beam laser interferometerangular errorsquareness errornon–contact optical measurementcalibration of precision machine tools
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本論文使用雙光束雷射干涉儀建構校正精密機具之量測系統,由於採用了非接觸式的光學檢測模式,可達成高精確度之目標,量測系統包括角度誤差量測系統與垂直度誤差量測系統。其利用具有高解析度之光學式儀器,不會受到磁場的干擾造成系統的誤差,也能適用於各種工作場合上。本系統具有低成本、高精確度、體積小、攜帶方便、架設簡易及檢測迅速等特性。
角度誤差量測系統通過使用一個雙光束雷射干涉儀、角隅稜鏡與反射鏡為設計雙光束之光路架構,使得系統產生角度誤差時,兩光束之光程改變即可檢測工具機之俯仰度誤差(Pitch error)、偏搖度誤差(Yaw error)。本實驗之驗証系統使用HP雷射干涉儀作為參照,經檢測單一機台三次實驗証實,使用本系統檢測機台重覆性之標準差可達到0.9 arcsec,而HP檢測之標準差為1.2 arcsec。
垂直度誤差量測系統由一個雙光束雷射干涉儀、反射鏡及直度反射鏡為設計雙光束之光路架構,量測兩軸之直度,比較其直度之斜率,可得垂直度誤差。本實驗之驗証系統使用了市面上公認為準確之Grid Encoder與HP雷射干涉儀,經實驗檢測單一機台三次,測得本系統檢測之機台垂直度誤差為6.0 arcsec,HP量測之垂直度誤差為10.7 arcsec,而Grid Encoder所量測之垂直度誤差為197.1 arcsec,其誤差可能來自於掃描頭本身誤差。
A measurement system using a dual-beam laser interferometer for the calibration of precision machine tools is presented in this paper, which includes an angular error measurement module and a squareness error measurement module. It realizes a new structure of the non–contact optical measurement with the high accuracy. By using the optical instrument with high resolution, this measurement system can can resist the magnetic interference to be applied in various fields. Meanwhile, it is characterized by high accuracy, wide measurement range, low cost, ease to carry, simple installation and rapid measurement.
The angular measurement module is composed of a dual-beam laser interferometer, corner cubes and plane mirrors. When the angular error of a machine tools occurs, the pitch error and yaw error can be measured by the change of optical path. The standard deviation measured by this system can be less than 0.9 arcsec and which measured by HP system is 1.2 arcsec.
The squareness measurement module was composed of a dual-beam laser interferometer, plane mirrors and a straightness reflector. The squareness error can be obtained by comparing the slope of the straight errors. The squareness error measured by this system can achieve 6.0 arcsec, which is 10.7 arcsec by HP system and 197.1 arcsec by Grid Encoder.
摘要 ...........................................i
Abstract .......................................iii
誌謝 ...........................................iv
圖目錄 .........................................viii
表目錄 .........................................xi
第1章 緒論...................................1
1.1 前言...................................1
1.2 文獻回顧...............................2
1.3 研究目的...............................4
第2章 量測系統架構與元件介紹.................6
2.1 雷射干涉儀.............................8
2.2 系統量測鏡組...........................13
2.3 夾置具之研製...........................15
2.4 不確定度...............................18
2.4.1 誤差與不確定度.........................18
2.4.2 量測不確定評估程序.....................19
第3章 角度誤差量測系統設計與分析.............22
3.1 量測系統的架構.........................23
3.2 量測原理...............................24
3.3 量測的結果與驗証.......................25
3.4 量測系統之不確定度.....................33
3.4.1 量測系統不確定度的評估.................34
3.4.2 SIOS雙光束雷射的不確定度...............36
3.4.3 平面反射鏡的不確定度...................37
3.4.4 量測系統不確定度的分析.................38
3.5 小結...................................39
第4章 垂直度誤差量測系統設計與分析...........40
4.1 量測系統的架構.........................40
4.2 量測原理...............................42
4.3 90度平面鏡組調整.......................44
4.4 量測的結果與驗証.......................49
4.5 量測系統之不確定度.....................63
4.5.1 量測系統不確定度的評估.................64
4.5.2 雙光束雷射的不確定度...................66
4.5.3 平面反射鏡M1與M2的不確定度.............68
4.5.4 直度反射鏡的不確定度...................69
4.5.5 轉90度鏡組的不確定度...................70
4.5.6 平面反射鏡M3與M4的不確定度.............71
4.5.7 量測系統不確定度的分析.................72
4.6 小結...................................72
第5章 結論與未來展望.........................74
5.1 結論...................................74
5.2 未來展望...............................74
參考文獻........................................76
附錄A HP雷射干涉儀系統元件......................81
附錄B 柵格編碼器................................82
附錄C 自動視準儀與12面稜鏡......................85
附錄D 位置感測器................................88
附錄E 訊號處理器................................90
附錄F 資料擷取卡................................92
EXTENDED ABSTRACT...............................93
簡歷............................................98
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