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研究生:黃偉銓
研究生(外文):Wei-Chuan Huang
論文名稱:應用像散法與斯涅爾定律量測透明基板厚度與折射率
論文名稱(外文):Application of Astigmatic Method and Snell''s Law on the Thickness and Refractive Index Measurement of Transparent Plate
指導教授:劉建宏劉建宏引用關係
指導教授(外文):Chien-hung Liu
學位類別:碩士
校院名稱:國立虎尾科技大學
系所名稱:光電與材料科技研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2009
畢業學年度:97
語文別:中文
論文頁數:86
中文關鍵詞:厚度折射率像散法DVD讀取頭半導體雷射
外文關鍵詞:ThicknessRefractive IndexAstigmatic MethodDVD Pickup HeadsSemiconductor Laser
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本文主要利用像散法原理與雷射光點位置量測模式,設計出透明基板厚度與折射率的量測系統。像散法量測架構中利用市售DVD讀取頭作為光源和感測端,並將原聚焦透鏡拆除改置為其他的等效焦距聚焦透鏡,來改變量測距離和量測透明基板厚度、折射率的範圍。且利用半圓柱透鏡像散特性,得到位移與PDIC感測器所產生電壓變化之校正關係曲線(S-Curve)。而雷射光點位置量測模式量測架構中利用半導體雷射作為光源,四象限感測器作為感測端,利用四象限感測器位移造成的感測器上光點之位移,得到位移與四象限感測器所產生電壓變化之校正曲線。
本研究之量測系統中雷射光點位置量測模式量測架構與像散法量測架構夾角50°,當兩個架構根據校正曲線校正完畢後,須使系統處於歸零狀態。根據斯涅爾定律,透明基板置入量測區後,將PDIC感測器與四象限感測器所產生的變異量通過各自校正曲線轉換為位移量,再代入此量測系統的聯立幾何光學公式,即可得到待測透明基板之厚度與折射率。此量測系統之量測結果與二次元高度規測得之厚度和α-Step(TF-166)測得之折射率相互驗證,準確度在99%。
In this paper, based on the Astigmatic method and the spot mode of laser position measurement, a measuring system for the thickness and the refractive index of a glasses plate is presented. The Commercial DVD pickup head is used as the light source and sensor in the measuring unit using the Astigmatic method. The focusing lens removed is replaced by the others of the equivalent focal length in order to change the measuring distance and the measuring range of the glasses plate. The displacement- voltage calibration curve (S-Curve) of the PDIC is obtained by the astigmatism of semi-cylindrical lens. In the measuring unit using the spot mode of laser position measurement, the semiconductor laser is used as the light source and the Quadrant Detector as the sensor. The displacement- voltage calibration curve of the Quadrant Detector is obtained by the displacement of the laser spot on the Quadrant Detector.
With the angle 50 ° between the two measuring units of this study, the system returns to zero after correcting by the calibration curves. According to Snell''s law, the error signals on the PDIC and the Quadrant Detector are found and converted into the displacements by the respective calibration curves when the glasses plate is placed in the measuring area. The thickness and the refractive index of a glasses plate can be obtained by the substitution of the displacement in the geometrical optics formula. The accuracy of the proposed system is 99 % after the results are verified with the thickness measured by the Height Gauge Sets and the refractive index by theα-Step(TF-166).
摘要...........................................................i
Abstract......................................................ii
誌謝.........................................................iii
目錄..........................................................iv
表目錄.......................................................vii
圖目錄........................................................ix
符號說明.....................................................xii
一、 緒論......................................................1
1.1 前言...................................................1
1.2 研究目的...............................................2
1.3 相關文獻回顧...........................................3
二、 量測原理和系統相關元件介紹................................7
2.1 幾何光學原理...........................................7
2.2 像散法量測架構原理.....................................9
2.2.1 DVD讀取頭元件介紹....................................9
2.2.2 DVD讀取頭作動原理...................................10
2.2.3 DVD讀取頭聚焦誤差訊號...............................12
2.2.4 像散法基本原理......................................12
2.2.5 S曲線分析...........................................13
2.3 雷射光點位置量測模式量測架構原理......................14
2.3.1 雷射光點位置量測模式量測架構元件介紹................14
2.3.2 雷射光點位置量測模式計算方式........................15
2.4 其他設備相關原件和原理介紹............................16
2.4.1 NI PCI-6014資料擷取卡...............................16
2.4.2 On-Trak OT-301 位置感測放大器.......................16
2.4.3 雷射干涉儀原理介紹..................................18
2.4.4 光點模式程式........................................19
三、 透明基板厚度與折射率量測系統.............................20
3.1 量測系統設計..........................................20
3.1.1 量測系統配置設計....................................20
3.1.2 量測系統作動原理....................................22
3.2 量測系統之測量分析....................................23
3.2.1 數值孔徑=0.1量測透明基板厚度與折射率系統架構........24
3.2.1.1 S曲線校正.........................................24
3.2.1.2 四象限感測器校正..................................32
3.2.2 數值孔徑=0.05量測透明基板厚度與折射率系統架構.......39
3.2.2.1 S曲線線性區校正...................................39
3.2.2.2 四象限感測器校正..................................45
四、 量測系統之幾何光學分析...................................51
4.1 像散法量測架構之光路公式推導..........................51
4.2 雷射光點位置量測模式架構之光路公式推導................55
4.3 量測厚度與折射率之公式推導............................57
4.4 系統誤差分析..........................................59
五、 實驗結果與分析...........................................61
5.1 量測透明基板厚度與折射率實驗..........................61
5.1.1 系統量測步驟........................................61
5.1.2 數值孔徑=0.1系統架構量測透明基板厚度與折射率結果....63
5.1.3 數值孔徑=0.05系統架構量測透明基板厚度與折射率結果...65
5.2 透明基板的厚度與折射率驗證............................70
5.2.1 厚度驗證............................................70
5.2.2 折射率驗證..........................................73
5.2.3 總結透明基板的厚度與折射率驗證......................76
六、 結論與未來展望...........................................77
6.1 結論..................................................77
6.2 未來展望..............................................77
參考文獻......................................................78
Extended Abstract.............................................82
簡歷..........................................................86
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