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研究生:吳世楨
研究生(外文):Shin-Jen Wu
論文名稱:以微模轉印複製製程在D型光纖上製作高解析度週期結構
論文名稱(外文):Fabrication of high resolution periodical structure on D-shaped optical fiber by using a replication method
指導教授:何智廷何智廷引用關係
指導教授(外文):Chi-Ting Ho
學位類別:碩士
校院名稱:國立虎尾科技大學
系所名稱:機械與機電工程研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2009
畢業學年度:97
語文別:中文
論文頁數:59
中文關鍵詞:D型光纖全像術干涉微模轉印技術
外文關鍵詞:D-shaped fiberholographic interference lithographymicro-molding process
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本研究提出D 型光纖的研磨技術,並結合黃光微影製程(Photolithography)、光學全像術干涉微影(Holographic Interference Lithography)技術、微模轉印技術,製作出D 型光纖布拉格表面光柵濾波元件。

首先以多模光纖製作成研磨試片後,進行試片單邊研磨(Side-Polished),其精確的研磨拋光直到光纖纖芯為止。下一步進行黃光微影製程與光學全像干涉微影技術,來製作繞射光柵濾波元件;利用旋轉塗佈正光阻,將短週期布拉格表面光柵曝光於玻璃基板上,並且以此繞射光柵元件利用PDMS做為轉印的特徵。

最後我們將以微模轉印技術,將光柵特徵精確複製於光纖研磨面上 。研究中我們將可完成製作出以微模轉印複製之D型光纖光柵濾波元件,其光柵週期與深度可由原子力顯微鏡(AFM)觀察,及光學傳輸特性可由ASE寬頻光源與光纖極化器利用光頻譜分析儀(OSA)等測量與紀錄實驗之結果。
In this project, we proposed a method to fabricate a D-shaped optical fiber of Bragg surface grating filter component by D-shaped fiber polishing along with photolithography、holographic interference lithography technologies and micro-molding process.

First , we will do side-polished on multi-mode fiber. It will precisely stop polishing until it reaches the core of fiber. Next, we will fabricate the diffraction grating filter component through photolithography process and holography interference lithography. It utilizes spinner to spin coating photoresister , and then the positive photoresist on D-Shaped fibers short periodic Bragg surface grating will be fabricated on glass substrate and as a diffraction grating element the use of PDMS as the transfer characteristics.

Finally, we accurately reproduce the characteristics of the grating on the surface of optical fiber by using micro-molding process. By this method, we can fabricate a low loss transmission whole fibered D-shaped optical fiber grating filter. Its period and depth of grating is observed by atomic force microscope (AFM), and the results of optical transmission characteristics are measured and shown by ASE broadband light source and in-line optical fiber polarizer though optical spectrum analyzer(OSA).
摘要 I
Abstract II
誌謝 III
目錄 IV
圖目錄 VI
表目錄 VI
第一章 緒論 1
1.1 研究背景 1
1.2 研究目的與方法 2
1.3 論文架構 3
第二章 研究背景與理論探討 4
2.1 光纖基本介紹 4
2.1.1 光纖之結構 4
2.1.2 光纖之全反射原理 5
2.1.3 光纖之數值孔徑原理介紹 7
2.1.4 光纖之分類 9
2.1.5 光纖之相關運用 11
2.2 光柵基本介紹 13
2.2.1 光柵之繞射原理 13
2.2.2 光柵之分類 14
2.2.3 光纖光柵之製作方法 15
2.2.4 光纖光柵之種類與濾波原理 16
2.3高分子加工技術之軟式微影技術 19
2.3.1微接觸印刷(microcontact printing, μCP) 19
2.3.2毛細管微成形(MIMIC) 20
2.3.3 微轉印成形(μTM) 20
2.3.4 複製成形(replica molding, REM) 20
2.4 PDMS特性探討與製程條件 21
2.4.1 PDMS製程條件 21
第三章 D型光纖元件之製程 22
3.1 實驗流程 22
3.1.1 光纖特性以及規格 23
3.1.2 UV高分子特性 23
3.2 D型光纖元件製程 25
3.2.1 研磨平台製程 25
3.2.2 UV高分子固定光纖製程 29
3.3 D型光纖之單邊研磨流程 33
3.3.1 D型光纖研磨設備 33
3.3.2 D型光纖研磨流程 34
3.3.3 D型光纖研磨表面狀況之探討 36
3.3.4 D型光纖研磨之深度計算與光點測試 37
第四章 D型布拉格光纖光柵製程 41
4.1 布拉格光柵微影製程 42
4.1.1 布拉格光柵元件流程 43
4.1.2 布拉格光柵微影製程表面量測結果 45
4.2 布拉格光柵母模製作 46
4.3 利用微模轉印製作D型布拉格光纖光柵元件 47
4.4 D型布拉格光纖光柵元件結果探討 48
4.5 D型布拉格光纖光柵元件量測 51
第五章 結論 53
參考文獻 54
Extended Abstract 56
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