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研究生:洪偉智
研究生(外文):wei-zhi hong
論文名稱:以簡單製程製作彎曲波導
論文名稱(外文):Fabrication of bending waveguide using a simple process
指導教授:李安謙
學位類別:碩士
校院名稱:國立虎尾科技大學
系所名稱:機械與機電工程研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2009
畢業學年度:97
語文別:中文
論文頁數:49
中文關鍵詞:彎曲波導
外文關鍵詞:bending waveguide
相關次數:
  • 被引用被引用:0
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在此研究裡,將以微模轉印技術在高分子上製作波導通道。接著高分子彎曲波導將由微模技術來製作,主要的模仁將先在負光阻上形成,然後再將其模型轉移到PDMS模仁上;在這步驟之後,將以PDMS高分子彎曲波導的模型轉印至高分子上
The polymeric bend waveguide are produced by a molding process where the master mold is first formed on a negative tone photoresist and subsequently transferred to a PDMS mold. Initial results show good pattern transfer in physical shape.
致謝 I
摘 要 II
Abstract III
第一章 緒論 1
1.1 前言 1
1.2 波導元件發展與研究動機 2
1.3 論文架構 4
第二章 研究背景理論探討 5
2.1光波導理論 5
2.2 彎曲波導設計理論 8
2.3光波導元件介紹 12
2.4高分子加工技術之軟式微影技術 15
2.4.1 微接觸印刷(microcontact printing, μCP) 16
2.4.2 毛細管微成形 (micromolding in capillaries,MIMIC) 17
2.4.3 微轉印成形(microtransfer molding, μTM) 18
2.4.4 複製成形(replica molding, REM) 18
2.5 PDMS特性探討與製程條件 18
2.5.1 PDMS特性探討 18
2.5.2 PDMS製程條件 19
第三章 高分子彎曲波導元件研製 20
3.1實驗流程 20
3.1.1 高分子彎曲波導元件架構說明 20
3.2 SU-8厚膜光阻特性探討 21
3.3 高分子彎曲波導元件之黃光微影製程 23
3.4 高分子彎曲波導元件模仁製程 27
3.4.1 OG高分子彎曲波導元件模仁結果探討 30
3.5 高分子彎曲波導元件之導光層製作 32
第四章 高分子彎曲波導元件量測 35
4.1高分子彎曲波導元件量測流程架構說明 35
4.2 高分子彎曲波導元件之傳輸特性量測 35
4.3 高分子彎曲波導元件之FDTD軟體模擬量測 38
第五章 結論 43
參考文獻 44
[l] E. A. J. Marcatilli, “Bends in optical dielectric guides,” Bell Syst. Tech. J., vol. 48, pp. 2103-2132,1969.
[2]Allan W. Snyder, John D. Love ,”Optical Waveguide Theory,” Institute of advanced studies Australian National UniversityCanberra, Australia
[3]Mordehai Heiblum, Jay H. Harris, ”Analysis of Curved Optical Waveguides by Conformal Transformation, ”IEEE JOURNAL OF QUANTUM ELECTRONICS, VOL.QE-11,NO. 2 FEBRUARY 1975
[4]T. N. Benson, P. Sewell, S. Sujecki and P. C. Kendall, ”Structure related beam propagation,” Optical and Quantum Electronics 31:689-703, 1999.
[5]Ya Yan Lu and Pui Lin Ho, “Beam Propagation Modeling of Arbitrarily Bent waveguides,” IEEE PHOTONICS TECHNOLOGY LETTERS,VOL. 14, NO. 12,DECEMBER 2002
[6]A. E. Ash, M. W. Austin and J. D. Love, “The threaded BPM:A novel extension to the two-dimensional scalar beam propagation method,” Optical and Quantum Electronics 34:1079-1096,2002
[7]Hadley, R.G. Wide angle beam propagation using Paté approximantoperators. Opt. Lett.17 1426,1992
[8] D. Yevick, “The application of complex Paté approximants tovector field propagation,” IEEE Photon. Technol. Lett., vol. 12,pp. 1636-1638, Dec. 2000.
[9]CHUNG Y., and DAGLI N., ”An assessment of finite difference beam propagation method, ”IEEE J. Quantum Electron, 1990,26, pp.1335-1339
[l0] Mordehai Heiblum and Jay H. Harris, ”Analysis of curved optical waveguides by conformal transformation,” IEEE JOURNAL OF QUANTUM ELECTRONICS, VOL. QE-11, NO.2 FEBRUARY 1975
[ll] S.C.M. Lidgare, P.Sewell and T.M Benson, “Conformalmapping: limitations for waveguide bend analysis,”IEE Proc.-Sci. Meas. Techmol. ol. 149. No. 5. September 2002
[l2] I. C. Goyal, R. L. Gallawa, and A. k. Ghatak, ”Bent Planar waveguides and whispering gallery modes: A new method of analysis,” JOURNAL OF LIGHTWAVE TECHNOLOGY. VOL. 8. No. 5. MAY 1990
[l3] D. Rowland, “Nonperturbative calculation of bend loss for a pulse in a bent planar waveguide, ”IEE Proc.- Optoelectron., Vol. 144,No. 2, April 1997
[l4]Chang-Min Kim, Young-moon Kim, and Woo-Kyung Kim,”Leaky Modes of Circular Slab Waveguides: Modified Airy Functions,” IEEE JUORNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS,VOL.8,NO.6, NOVEMEMBER/DECEMBER 2002
[l5] Woo-Kyung Kim, Chang-Min Kim,”Radiation Loss of Bent Planar Waveguide,” Fiber and Integrated Optics,21:219-232,2002
[l6]JUN LU,SAILING HE and VLADIMIR G. ROMANOV, “A Simple and Effective Method for Calculating the Bending loss and Phase Enhancement of a Bent Planar Waveguide,” Fiber and Integrated Optics, 24:25-36,2005
[l7] K. R. Hiremath, M. Hammer , R. toofer, L. Prkna and J. Ctyroky,”Analytic approach to dielectric optical bent slab waveguides,” Optical and quantum electronics,2005,37:37-61
[l8] Andrea Melloni, Federico Carniel, Raffaella Costa and Mario Martinelli, ”Determination of Bend Mode Characteristics in Dielectric Waveguides,” JUORNAL OF LIGHTWAVE TECHNOLOGY, VOL . 19,NO.4,APRIL 2001
[l9] Andrea Melloni, ”Design of curved waveguides: the matched bend,”J. Opt.Soc. Am.A/Vol. 20, No. 1/January 2003
[20] K. O. Hill, Y. Fujii, D. C. Johnson, and B. S. Kawasaki “Photosensitivity in Optical Fiber Waveguides:Application to Reflection Filter Fabrication” Applied Physics Letter, Vol. 32, pp. 647-649, 1978.
[21] T. C. Sum, A. A. Bettiol, J. A. van Kan, F. Watt, E. Y. B. Pun, and K. K. Tung, “Proton beam writing of low-loss polymer optical waveguides”, Appl. Phys. Lett. 83, 1707 (2003).
[22] D. B. Ostrowsky and A. Jacques, “FORMATION OF OPTICAL WAVEGUIDES IN PHOTORESIST FILMS”, Appl. Phys. Lett. 18, 556 (1971).
[23] Chang-Yen, D.A.; Eich, R.K.; Gale, B.K.;”A Monolithic PDMS Waveguide System Fabricated Using Soft-Lithography Techniques”, Lightwave Technology, Journal of Volume 23, Issue 6, June 2005 Page(s):2088 – 2093.
[24] Anadi Mukherjee, Ben Joy Eapen, and Swapan K. Baral, “Very low loss channel waveguides in polymethylmethacrylate “, Appl. Phys. Lett. 65, 3179 (1994).
[25]黃建誠, ”感光高分子之積體光學波導之研製”, 國立虎尾科技大學光電與材料科技研究所, 2004/6.
[26]Younan Xia and George M.Whitesides;”Soft Lithography”,Angew. Chem. Int. Ed.,37,550(1998).
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