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研究生:謝東憲
研究生(外文):Tung-Hsien Hsieh
論文名稱:RE-TM垂直式磁穿隧接面之磁特性研究
論文名稱(外文):The study of the magnetic characteristics of RE-TM perpendicular magnetic tunnel junction
指導教授:吳德和
指導教授(外文):Te-Ho Wu
學位類別:碩士
校院名稱:國立雲林科技大學
系所名稱:材料科技研究所
學門:工程學門
學類:綜合工程學類
論文種類:學術論文
論文出版年:2009
畢業學年度:97
語文別:中文
論文頁數:117
中文關鍵詞:垂直式磁穿隧接面鋱鐵鈷合金
外文關鍵詞:RE-TMpMTJ
相關次數:
  • 被引用被引用:1
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本論文藉由變化鋱鐵鈷合金(TbFeCo)的組成比,利用其磁性質可調變之特性來應用於垂直式磁穿隧接面(perpendicular Magnetic Tunnel Junction;pMTJ)結構。
而研究中採用Ti作為保護層。並使用交替式梯度測磁儀(AGM)、退火爐、多功能磁滯曲線測磁儀及電流平行膜面量測(CIP)等探討其磁性質及磁電性變化。
在實驗中成功鍍製超薄TbFeCo 3nm且具有低矯頑場與低飽和磁化量之TbFeCo薄膜組成,並將其結果應用於pMTJ結構,其自由層矯頑場控制大約在900 Oe以內。另一方面嘗試進行高溫退火處理,比較退火前後對其磁特性之影響,在高溫150°~250°退火處理後發現pMTJ結構其矯頑場會隨著退火溫度增加呈現下降的趨勢,而方正性亦會隨退火溫度增加而變差。另外,當Tb組成比越高,其高溫退火處理後其磁特性會比其它組成比好 (方正性可達0.9以上)。在垂直異向性能量(Ku)方面,其Ku值最大約2.38×106 erg/c.c.,並隨Tb組成比的增加而減小。最後也藉由電流平行膜面量測(CIP)作MR之測試,其MR大約0.06~0.1%左右。
In the thesis, the magnetic characteristics of perpendicular magnetic tunnel junction (pMTJ) structures are controlled by varying the relative composition of TbFeCo amorphous alloys. Additionally, the titanium (Ti) is utilized as the protection layer. The magnetic properties, film structures, and magnetoresistance variations are measured by Alternating Gradient Magnetometer (AGM), Transmission Electron Microscope (TEM), Multi-Functional Magnetic Hysteresis Curve Magnetometer, and Current In-Plane (CIP), respectively.
In our experiments, the TbFeCo thin films with low coercivity and low saturation magnetization were successfully fabricated by sputtering. The coercivity of the film, served as free layer of the full pMTJ structure, can be reduced down to 900 Oe. To study the influence of annealing, the films were then annealed at the temperature ranging from 150℃ to 250℃. The results shows that the coercivities of pMTJ structures decreased as increasing the annealing temperature and the squarenesses of hysteresis loops were worse as well. Moreover, the films with higher Tb ratio can retain better magnetic properties after high temperature annealing treatment— the squareness was still over 0.9. However, the perpendicularly anisotropy energy constant (Ku) was reduced from its maximum value 2.38×106 erg/c.c. as the composing ration of Tb increased. Finally, the MR ratio determined by CIP method was approximately 0.06~0.1%.
目 錄

中文摘要 ---------------------------------------------------------------------------- i
目錄 ---------------------------------------------------------------------------- ii
誌謝 ---------------------------------------------------------------------------- iii
目錄 ---------------------------------------------------------------------------- iv
表目錄 ---------------------------------------------------------------------------- vi
圖目錄 ---------------------------------------------------------------------------- vii
一、 緒論---------------------------------------------------------------------- 1
1.1 研究動機---------------------------------------------------------------- 1
1.2 論文架構---------------------------------------------------------------- 3
二、 理論背景---------------------------------------------------------------- 4
2.1 磁學基礎理論---------------------------------------------------------- 4
2.1.1 磁阻效應---------------------------------------------------------------- 6
2.1.2 磁性的種類------------------------------------------------------------- 6
2.2 稀土-過渡金屬合金的特性------------------------------------------ 10
2.3 異常霍爾效應---------------------------------------------------------- 14
2.3.1 垂直異向性常數量測------------------------------------------------- 15
三、 實驗儀器與方法------------------------------------------------------- 17
3.1 實驗流程---------------------------------------------------------------- 18
3.2 薄膜濺鍍系統---------------------------------------------------------- 19
3.3 ICP-MS成分定量------------------------------------------------------ 20
3.4 交替式梯度測磁儀(AGM)-------------------------------------------- 22
3.5 穿透式電子顯微鏡(TEM)-------------------------------------------- 23
3.6 多功能磁滯曲線偵測儀----------------------------------------------- 24
3.7 退火爐-------------------------------------------------------------------- 25
3.8 van der Pauw 法-------------------------------------------------------- 26
四、 結果與討論------------------------------------------------------------- 27
4.1 不同組成比對超薄TbFeCo薄膜之影響-------------------------- 28
4.2 加入磁極化層(CoFeB)對TbFeCo薄膜之影響------------------ 34
4.3 退火效應對超薄TbFeCo薄膜之影響----------------------------- 47
4.4 pMTJ結構之製備與特性分析--------------------------------------- 71
4.4.1 不同自由層組成比之pMTJ結構製備與分析-------------------- 71
4.4.2 退火效應對pMTJ結構之影響 ------------------------------------- 77
4.4.3 pMTJ結構之TEM剖面分析---------------------------------------- 92
4.4.4 pMTJ結構之垂直異向性能量分析--------------------------------- 93
4.4.5 pMTJ結構之CIP量測------------------------------------------------ 97
4.5 稀土-過渡金屬(RE-TM)合金薄膜之電阻率量測---------------- 99
五、 結論----------------------------------------------------------------------- 100
六、 未來展望----------------------------------------------------------------- 101
參考文獻 ----------------------------------------------------------------------------- 102
自傳 ----------------------------------------------------------------------------- 104
參考文獻
[1]Naoki Nishimuta, Tadahiko Hirai, Akio Koganei, Takashi Ikeda, Kazuhisa Okano, Yoshinobu Sekiguchi, and Yoshiyuki Osada, “Magnetic tunnel junction device with perpendicular magnetization films for high-density magnetic random access memory”, J. Appl. Phys., Vol. 91 , p5246. (2002)
[2]許志維,2008,鋱鐵鈷合金薄膜組成與厚度對其磁性質影響之研究,雲林科技大學,碩士論文。
[3]陳秋雄,2008,磁控濺鍍釓鐵鈷磁性薄膜及其磁特性分析,雲林科技大學,碩士論文。
[4]鄭聖諺,2008,鏑鐵鈷之磁姓薄膜製備與磁特性量測分析之研究,雲林科技大學,碩士論文。
[5]金重勳, 民國九十一年七月, 磁性技術手冊, 台灣磁性技術協會。
[6]Soshin Chikazumi, 張煦、李學養 譯,1981 ,“磁性物理學”。
[7]鄭振東,1999,實用磁性材料,全華科技圖書股份有限公司,台北。
[8]P. Grunberg, R. Schreiber, Y, Pang, U. Walz, M. B. Brodsky and H. Sower, 15 April, “Layered magnetic structures: Evidence for antiferromagnetic coupling of Fe layers across Cr interlayers”, 1987, J. Appl. Phys., vol.61, no.3, p.3750-3756 (1987)
[9]G. Binash, P. Gurngerg, F. Saurenbanch and W. Zinn, “Magnetic analysis of an overlapped cantilever beam magnetic microactuator using finite elements”, Phys. Rev. B, vol.39, no.4, p.4828-4831 (1989)
[10]M. N. Baibich, J. M. Broto, A. Fert, F. Nguyen Van Dau, F. Petroff, P. Eitenne, G. Creuzet, A. Friederich, and J. Chazelas, “Giant Magnetoresistance of (001)Fe/(001)Cr Magnetic Superlattices”, Phys. Rev. Lett. 61, 2472, (1988)
[11]陳咨融,2006,穿隧式磁阻結構製備與磁特性之研究,雲林科技大學,碩士論文。
[12]P. M. Tedrow and R. Meservey, “Spin-Dependent Tunneling into Ferromagnetic Nickel”, Phys. Rev. Lett, vol.26, no.5, p.192-195. (1971)
[13]P. M. Tedrow and R. Meservey, “Spin Polarization of Electrons Tunneling from Films of Fe, Co, Ni, and Gd”, Phys. Rev. B, vol.7, no.5, p.318-320 (1973)
[14]P. Fulde, ” High field superconductivity in thin films”, Adv. Phys., vol.22, no.6, p.667-719 (1973)
[15]M. Julliere, ” Tunneling between ferromagnetic films”, Physics Letters A, 54 (3), pp. 225-226 (1975)
[16]R. J. Gambino, and T. Suzuki, Magneto-optical recording materials, IEEE Press, New York, ISBN 0-780-31009-8 (2000)
[17]C. J. Robinson, T. Suzuki, C. M. Falco, Materials for Magneto-Optic Data Stroage, Materials Research Society. (1992)
[18]Te-ho Wu, 1993, ,magnetic, magneto-optic, and magneto-transport studies of thin film media of magneto-optical recording (1993)
[19]Stoner, E. C., and E. P. Wohlfarth, “A mechanism of magnetic hysteresis in heterogeneous Alloy”, Phil. Trans. R. Soc. A240,599 (1948)
[20]李珠,2002,材料分析技術專題,第一百一十八期,p87-88
[21]Masahiko Nakayama, Tadashi Kai, Naoharu Shimomura, Minoru Amano, Eiji Kitagawa, Toshihiko Nagase, Masatoshi Yoshikawa, Tastsuya Kishi, Sumio Ikegawa, Hiroaki Yoda, “Spin transfer switching in TbCoFe/CoFeB/MgO/CoFeB
/TbFeCo magnetic tunnel junctions with perpendicular magnetic anisoteopy” , J. Appl. Phys 103, 07A710 (2008)
[22]Yiming Huai, Mahendra Pakala, Zhitao Diao, Dmytro Apalkov, Yunfei Ding, Alex Panchula, “Spin-transfer switching in MgO magnetic tunnel junction nanostructures” Journal of Magnetism and Magnetic Materials 304 88–92 (2006)
[23]David D. Djayaprawira, Koji Tsunekaea, Motonobu Nagai, Hiroki Maehara, Shinji Yamagata, Naoki Watanabe, “230﹪room-temperature magnetoresistance in CoFeB/MgO/CoFeB magnetic tunnel junctions ” , APPLIED PHYSICS LETTERS 86, 092502 (2005)
[24]S. Mangin, D. Ravelosona, J. A. Katine, M. J. Carey, B. D. Terris, and Eric E. Fullerton: Nat. Mater., p.210 (2006)
[25]J. A. Katine, F. J. Albert, R. A. Buhrman, E. B. Myers, and D. C.Ralph, “Current-
Driven Magnetization Reversal and Spin-Wave Excitations in Co_Cu_Co Pillars” Phys. Rev. Lett. 84, 3149 (2000)
[26]F. J. Albert, N. C. Emley, E. B. Myers, D. C. Ralph, and R. A.Buhrman, “Quantitative Study of Magnetization Reversal by Spin-Polarized Current in
Magnetic Multilayer Nanopillars” Phys. Rev. Lett. 89, 226802 (2002)
[27]L. J. van der Pauw, “ A Method of Measuring Specfic Resistivity and Hall Effect of Discs of Arbitrary Shaps “, Philips Res. Repts. 13, 1-9 (1958)
[28]L. J. van der Pauw, “ A Method of Measuring Specfic Resistivity and Hall Effect of Discs of Arbitrary Shaps “, Philips Res. Repts. 20, 220-224 (1958)
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