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研究生:張羽沛
研究生(外文):Yu-Pei Chang
論文名稱:自動化搬運系統之啟發式優先權派車法則應用在十二吋晶圓廠瓶頸區之研究
論文名稱(外文):The Bottleneck Heuristic Preemptive Dispatching Method of Automatic Material Handling System in 300 mm Semiconductor Factory
指導教授:王嘉男王嘉男引用關係
指導教授(外文):Chia-Nan Wang
學位類別:碩士
校院名稱:國立高雄應用科技大學
系所名稱:工業工程與管理系
學門:工程學門
學類:工業工程學類
論文種類:學術論文
論文出版年:2010
畢業學年度:98
語文別:中文
論文頁數:63
中文關鍵詞:自動物料搬運系統十二吋晶圓廠OHT瓶頸
外文關鍵詞:AMHS300 mm Semiconductor manufacturingOHTBottleneck
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IC產業是二十一世紀全球性產業之一,且為各國爭相發展的工業。在十二吋晶圓廠,產品種類眾多、等級不一,加上搬運系統OHT裝卸貨所需時間甚長,易造成嚴重塞車問題。所以高度自動化物料處理運輸系統已成為半導體業者最關心議題之一。本研究目標為提高自動化物料搬運系統之搬運績效,並減少產品運輸等帶和延遲時間。因此,本文提出一套有效OHT派車法則:Bottleneck Heuristic Preemptive Dispatching (BHPD),以半導體廠資料為模擬實驗基礎進行分析,並與目前最佳搬運方法Differentiated Preemptive Dispatching (DPD)比較。實驗數據結果顯示本文提出的BHPD法則在一般產品之平均變動時間縮短了13.15%;而高等級產品則縮短了17.67%。因此,本文所提出的BHPD法則在十二吋全自動化晶圓廠的生產環境之車輛調度和分配為較佳的搬運法則,能在投入的生產資源不變的情況下,縮短交期,增加產出,提高生產力。
關鍵字:自動物料搬運系統、十二吋晶圓廠、OHT、瓶頸
IC industry is the global industry in twenty first century. In 300 mm wafer fabs, it is easy to have traffic jam due to the wide variety of products and long loading/unloading time of OHT. Hence, the highly automated material handling has become one of the most concerned issues among semiconductor manufacturer. The purpose of this study is to enhance the delivery performance of automatic material handling and reduce the delay and waiting time of product transport. Therefore, this study proposed an effective OHT dispatching rule:Bottleneck Heuristic Preemptive Dispatching (BHPD). This research conducted the simulation experiments by using the data from a real wafer fab and compared BHPD with Differentiated Preemptive Dispatching (DPD). DPD is the best mode of transport nowadays. The results indicated that BHPD rule can reduce average variable delivery time of general product by 13.15%, decreasing average variable delivery time of advanced product by 17.67%. As a result, given the limited resource, BHPD rule is the better mode of transport in 300 mm wafer fabs to reduce the delivery time, increase output and enhance productivity.
Keywords:AMHS, 300 mm Semiconductor manufacturing, OHT, Bottleneck
CHINESE ABSTRACT i
ABSTRACT ii
TABLE OF CONTENTS iii
LIST OF TABLE v
LIST OF FIGURE vi
CHAPTER 1 INTRODUCTION 1
1.1 Research Background and Motive 1
1.2 Research Purpose 4
1.3 Scope of Research 5
1.4 Thesis Organization 6
CHAPTER 2 LITERATURE REVIEW 7
2.1 AMHS Literature Survey 7
2.1.1 System selection 9
2.1.2 Intrabay Control 9
2.1.3 Interbay Control 9
2.1.4 Controls combined with Interbay and Intrabay 10
2.1.5 Hot Lots Related 11
2.2 Dispatching Rules 12
2.2.1 Vehicle Delivery Time 13
2.3 Bottleneck Related 14
CHAPTER 3 RESEARCH METHODOLOGY 15
RESEARCH METHODOLOGY 15
3.1 Bottleneck Heuristic Preemptive OHT Dispatching Method 16
3.2 Simulation Environment 22
3.3 Index of Performance 24
3.4 Model Experiment 26
3.5 System Simulation Platform about Flexsim 28
CHAPTER 4 EXPERIMENT RESULTS 31
4.1 Simulation Results 31
4.2 Statistical Test 36
4.3 Results Discussion 38
CHAPTER 5 CONCLUSIONS AND FUTURE DIRECTIONS 40
REFERENCE 43
APPENDIX A Index of Lot Variable Delivery Time 47
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