本研究利用Nd:YAG雷射加工系統對固溶處理後之Ti50Ni50、Ti50Ni49.5Cr0.5和Ti35.5Ni49.5Zr15形狀記憶合金(SMAs)進行加工，探討其加工參數與加工性質之關係、加工後合金之表面及截面顯微組織、熱影響層之性質分析、相變態行為與機械性質等特性。由實驗結果發現雷射加工之輸出功率與切削速度可控制切割品質，於雷射光束可以完全穿透基材的狀況下，切割寬度隨著輸出功率提升或切削速率降低而提升；而表面粗糙度隨切削速度提升或輸出功率降低而獲得改善。Ti50Ni50、Ti50Ni49.5Cr0.5與Ti35.5Ni49.5Zr15合金在雷射加工過程中，其熱影響層皆有約1μm的氧化層形成，而Ti50Ni50、Ti50Ni49.5Cr0.5皆有鈦氧化物生成；而在Ti35.5Ni49.5Zr15合金中，鋯元素取代了鈦元素與氧的反應，於熱影響層中形成ZrO2之氧化物。而此三合金於雷射加工後的熱影響區型成會對其變態溫度有所改變，但整體而言加工過程並不會影響相變態行為。且合金在雷射加工時以氬氣做為輔助氣體，可有效減少氧化現象，因此合金之形狀記憶效應，於本研究中僅略有降低之趨勢，其回復率約降低1~3%。所有研究結果顯示出，雖然Ti50Ni50、Ti35.5Ni49.5Zr15與Ti50Ni49.5Cr0.5三類形狀記憶合金在常溫下雖然有不同的結晶構造與機械性質，但在雷射加工中皆有相似的加工性質。

關鍵字：雷射加工、熱影響區、形狀記憶合金

In this study, the machining characteristics of the solution-treated TiNi-based shape memory alloys (SMAs), e.g. Ti50Ni50, Ti50Ni49.5Cr0.5, Ti35.5Ni49.5Zr15 were investigated by using Nd:YAG laser beam and argon as assistant gas. The materal’s intrinsic properties and laser cutting parameters, including the laser power, cutting speed and focus position can significantly influence the laser cutting quality. The surface quality of laser-machined TiNi-based shape memory alloys degrades with increasing laser power, but decreasing with cutting speed. More energy is absorbed at a higher laser power, and hence more TiNi alloys volume is ablated and a wider kerf forms. The kerf entry width (degree of taper) and the roughness of the cutting surface of the Ti35.5Ni49.5Zr15 alloy were higher than the Ti50Ni50 and Ti50Ni49.5Cr0.5 alloys due to having the larger electrical resistivity. After Nd:YAG laser machining, a heat-affected zone forms on the outer surface of TiNi-based SMAs. The TiO2 outer surface oxide layer of the heat-affected zone in Ti50Ni50 and Ti50Ni49.5Cr0.5 alloys can be found, but ZrO2 oxide layer in Ti35.5Ni49.5Zr15 alloy. Several oxygen atoms can be solid-soluted in the heat-affected zone. The specimen’s hardness near the outer surface can reach 583, 479 and 357 Hv for Ti35.5Ni49.5Zr15 , and Ti50Ni49.5Cr0.5 and Ti50Ni50 alloys, respectively. This hardening effect arises from the formation of the oxides ZrO2, TiO2 and interstitial oxygen atoms solid-soluted in the heat-affected zone. The laser machining TiNi-based alloys still exhibit a nearly perfect shape recovery at a normal bending strain, but a slightly reduced shape recovery, about 3~5 %, at a higher bending strain due to their constrained effect on the matrix by the heat-affected zone. The transformation sequence of the laser machining TiNi-based alloys has no obvious change, but depress the transformation temperatures slightly due to the similar phenomenon.

Key word：Laser Machining, HAZ, shape memory alloys

第一章 緒論 1
第二章 文獻回顧 3
2.1形狀記憶合金簡介 3
2.2熱彈性型麻田散體變態 3
2.3形狀記憶效應介紹 6
2.4擬彈性效應介紹 11
2.5 TiNi合金的結構與相變態 18
2.6高溫形狀記憶合金之研究現況 22
2.7TiNiZr形狀記憶合金 26
2.8 TiNiCr形狀記憶合金 28
2.9雷射加工 29
2.9.1雷射的由來 29
2.9.2雷射產生之過程 30
2.9.3雷射的特性 36
2.9.4雷射的優點 36
2.9.5金屬材料對雷射吸收率關係 36
2.9.6雷射的應用 42
第三章 實驗方法 44
3.1合金之配製 45
3.2合金之熔煉 45
3.3固溶處理 47
3.4雷射加工 47
3.5 DSC 量測實驗 50
3.6顯微組織的觀察 51
3.7 XRD 繞射分析 51
3.8硬度與楊氏系數量測 51
3.9 EPMA量測成分分析 52
3.10狀記憶效應試驗 52
3.11表面粗糙度量測 54
第四章 結果與討論 56
4.1合金之相變態行為 56
4.2 SEM表面與截面顯微組織觀察 66
4.2.1合金切割面之顯微組織觀察 67
4.2.2合金橫截面之顯微組織觀察 68
4.2.3合金橫截面之熱影響層顯微組織觀察 69
4.3雷射切削表面粗糙度分析 84
4.4 XRD晶體結構檢測 87
4.5 EPMA分析 92
4.5.1垂直加工面之熱影響層 92
4.5.2橫截面上之熱影響層 92
4.6形狀記憶效應量測 101
4.7硬度與楊氏系數試驗 102
第五章 結論 107
參考文獻 108
個人簡歷 113

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