潔淨室已經被廣泛的使用在很多高科技的工業，在過去的二十年間，已經有許多論文研究不同型式的潔淨室之流場。由於生產技術不斷的進步與發展，對於產品良率與精密度之要求亦日益提升，因此控制產品生產過程中的潔淨度是極為重要的課題，為使得產品能在一個良好的環境中生產、製造，便發展出對環境條件嚴格控管的潔淨室。
本研究的目的在於探討潔淨室中自動吸塵器的熱傳效應，討論不同的熱傳狀況與溫度場分佈。本研究係利用CFDesign進行模擬，條件為假設在一恆溫的環境中，並在不同FFU轉速及吸塵器位置下，模擬分析自動吸塵器熱傳現象。結果顯示，FFU轉速越高，其排熱效果較佳，並不會影響自動吸塵器週遭溫度。此外不同吸塵器位置對於系統內部會有不同的溫度場分佈，對於環境影響效果亦有限。

關鍵字：熱傳、潔淨室、CFDesign、FFU

Clean room had been widely used in various high tech industries. In the past two decades. So many researches had been carried out to study the flow field of different types of clean room. Because the production technology is developing continuously, the quality of production and precision is demanded rigor and rigor. Therefore, controlling the cleanliness is very important during the process of production. In order to make a better production environment, the clean room must be developed and set all kinds of standards .

This research's goal is the discussion automatic vacuum cleaner the heat transfer effect and the temperature field distribution under the different heat transfer condition in Clean Room. This research carries on the simulation using CFDesign, the condition for the supposition in a constant temperature environment, simulation analysis automatic vacuum cleaner heat transfer phenomenon under the different FFU rotational speed and vacuum cleaner position. The result showed that the FFU rotational speed is higher, its heat-removal effect is better, will not affect the temperature all around the automatic vacuum cleaner. In addition the different vacuum cleaner position will have the different temperature field distribution regarding the system interior, will be also limited regarding the environmental effect.
Keywords: heat transfer、Clean Room、CFDesign、FFU

摘要…………………………………………………………………………
Abstract………………………………………………………………………
致謝…………………………………………………………………………
總目錄………………………………………………………………………
表目錄………………………………………………………………………
圖目錄………………………………………………………………………
符號說明……………………………………………………………………
希臘字母……………………………………………………………………
第一章 緒論…………………………………………………………………
1-1 研究目的與動機…………………………………………………
1-2 潔淨室的定義與等級………………………………………………
1-3 相關文獻回顧……………………………………………………
1-4 本文架構…………………………………………………………
第二章 理論分析……………………………………………………………
2-1 熱傳理論…………………………………………………………
2-1-1 熱傳導………………………………………………………
2-1-2 熱對流………………………………………………………
2-2 熱流理論…………………………………………………………
2-2-1 統御方程式…………………………………………………
2-2-2 紊流模式……………………………………………………
第三章 軟體熱傳模擬………………………………………………………
3-1 數值模擬軟體簡介………………………………………………
3-2 CFD分析步驟………………………………………………………
3-3 CFDesign的操作與設定……………………………………………
第四章 結果與討論…………………………………………………………
4-1 模型建立…………………………………………………………
4-2 模擬邊界設定…………………………………………………
4-3 研究各項條件之影響…………………………………………
4-4 改變各項參數之模擬分析………………………………………
4-4-1 FFU對面不加設通風口且吸塵器在系統正中央…………
4-4-2 FFU對面不加設通風口且吸塵器在靠FFU那面牆的中央…
4-4-3 FFU對面加設通風口且吸塵器在系統正中央…………
4-4-4 FFU對面加設通風口且吸塵器在靠FFU那面牆的中央…
第五章 結論與未來展望…………………………………………………
5-1 結論………………………………………………………………
5-2 未來展望與建議…………………………………………………
參考文獻……………………………………………………………………

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