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研究生:高易中
研究生(外文):Kao, Yi-Jhong
論文名稱:植基於主記憶體型資料庫技術之新式全自動化虛擬量測架構
論文名稱(外文):Novel Automatic Virtual Metrology Framework based on Main Memory Database Technology
指導教授:鄭芳田鄭芳田引用關係洪敏雄洪敏雄引用關係
指導教授(外文):Cheng, Fan-TienHung, Min-Hsiung
口試委員:楊浩青
口試委員(外文):Hao-Ching Yang
口試日期:2010-07-09
學位類別:碩士
校院名稱:國立成功大學
系所名稱:製造資訊與系統研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2010
畢業學年度:98
語文別:中文
論文頁數:69
中文關鍵詞:自動化虛擬量測系統架構主記憶體型資料庫資料儲存效率資料查詢性能資料庫成本
外文關鍵詞:Automatic Virtual Metrology System FrameworkMain Memory DatabaseData Storage EfficiencyData Query PerformanceDatabase Cost
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目前普遍受半導體與TFT-LCD產業重視的全自動化虛擬量測系統 (Automatic Virtual Metrology System, AVMS),由於需持續處理龐大數量的量測資料,導致其內部資料庫效能不佳,同時為追求更好的性能,須使用具較佳效能但昂貴的商用資料庫管理系統 (DBMS),亦大幅加高AVMS的實際應用成本,因此為其設計一個低成本且更具效能的新型架構將有其必要性。本論文提出一個以主記憶體型資料庫 (Main Memory Database, MMDB)技術為基礎的新式AVMS架構。具體地,我們利用MMDB來改善現有資料庫的性能瓶頸,同時也設計資料自動備份與查詢源自動整合機制以有效紓解原架構過於集中且膨脹的資料量;此外,系統也採用免費之商用MMDB來大幅降低整體系統的成本。整合測試結果顯示,本論文所提出的AVMS架構及研發技術,確實能使AVMS得到更佳的資料儲存效率、更優異的資料查詢性能,以及更低的資料庫成本,提供了改進現行AVMS資料庫性能及降低資料庫成本之有效解決方案。
Currently, Automatic Virtual Metrology System (AVMS) is widely valued by semiconductor industry and TFT-LCD industry. AVMS needs to persistently deal with a large number of metrology data, which may cause its internal database in poor performance. Usually, efficient but expensive commercial database management systems (DBMSs) are adopted in AVMS for obtaining good performance. In turn, the practical application cost of AVMS is high. Therefore, the design of a novel AVMS framework with lower cost and greater efficiency in database is worthy and necessary for the industry. A novel AVMS framework based on Main Memory Database (MMDB) technology is proposed in this thesis. Specifically, the MMDB is used to improve the performance bottleneck of current disk resident database. Also, the mechanism with capabilities of automatic data backup and automatic data source integration is designed to effectively relieve the volume of over-centralized and expanded data in the original AVMS framework. In addition, a type of free commercial MMDB is adopted to reduce the total system cost significantly. Integrated testing results show that the proposed AVMS framework and developed technologies can enable the AVMS to have better data storage efficiency, superior data query performance, and lower Database cost, which provide an effective solution for improving performance and reducing cost of database in AVMS.
目錄 i
表目錄 iii
圖目錄 iv

第一章 緒論 1
1.1 研究背景 1
1.2 研究動機 2
1.3 研究目的 5
1.4 論文架構 6
第二章 文獻探討與理論基礎 8
2.1 主記憶體型資料庫(Main Memory DataBase, MMDB) 8
2.1.1 MMDB簡介 8
2.1.2 MMDB與傳統DRDB之差異 9
2.1.3 MMDB性能優勢處 10
2.1.4 MMDB性能劣勢處 10
2.2 MMDB應用實例 12
2.2.1 MonetDB 12
2.2.2 應用實例一: 支援DRDB 13
2.2.3 應用實例二: 結合固態硬碟(SSD) 14
2.3 資料庫性能數據參考 16
2.4 資料庫性能實驗與分析 18
第三章 系統需求與分析 25
3.1 AVMS資料庫性能需求分析 25
3.2 AVMS資料庫成本需求分析 27
3.3 MMDB特性需求分析 28
第四章 系統架構與功能機制設計 31
4.1 現行AVMS 架構 31
4.2 本研究所提出的AVMS新型架構與其設計概念 33
4.2.1 新型架構介紹 33
4.2.2 整體設計概念 34
4.2.3 新架構之優勢與劣勢 35
4.3 核心機制設計 37
4.3.1 資料自動備份機制 37
4.3.2 查詢源自動整合機制 40
第五章 系統實作與成果測試 42
5.1 系統開發環境 42
5.2 系統實作 44
5.2.1 Area DB 44
5.2.2 Central DB 45
5.2.3 VM Backup Controller 46
5.2.4 VM Data Provider 52
5.3 成果測試與評估 59
5.3.1 AVMS 資料庫儲存性能測試與比較 60
5.3.2 AVMS 資料庫查詢性能測試與比較 62
5.3.3 AVMS 資料庫成本評估與比較 64
第六章 結論 65
6.1 論文總結與研究成果 65
6.2 未來研究方向 66
參考文獻 67
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