臺灣博碩士論文加值系統

本論文利用原子力顯微鏡氧化，示範一種描繪二維光子晶體微共振腔之共振模態的方法。我們使用AFM 在L3 共振腔表面氧化，發現氧化會使共振模態藍移，同時仍可保持高品質因子，而且共振波長變化量與氧化位置的電場強度成正比，所以此方法可用以描繪共振模態。接著我們以氧化線條進行X 方向氧化掃描，可解析出2 個共振模態。最後則以氧化點進行XY 氧化掃描使解析能力增加，可解析出3 個共振模態及其精細結構。在這個實驗中空間解析度優於230nm。

In this paper, we demonstrate a method to map the resonance mode pattern of 2-dimensional photonic crystal micro-cavity by AFM oxidation.First, we oxide the surface of L3 cavity, found that the resonance modes blue shift after oxidation while high quality factor is preserved,and the mode shift is proportional to the electric field intensity at the oxide position, so the mode pattern can be mapped by AFM oxidation . Then we do X-direction scan with oxide line to resolve 2 resonance modes.Finally we do XY- direction scan with oxide point to improve spatial
resolution, we resolve 3 modes and also found the fine structure. In this experiment, the spatial resolution is better than 230 nm.

第一章 簡介 .................................. 1
第二章 基本原理
2-1 二維光子晶體微共振腔 ..................... 3
2-1.1 光子晶體 ............................... 3
2-1.2 二維光子晶體微共振腔特性 ............... 5
2-1.3 共振模態 ............................... 8
2-2 區域性氧化共振腔以描繪共振模態之原理 .... 10
第三章 試片結構與實驗方法
3-1 試片介紹 ................................ 13
3-1.1 量子點與試片結構 ...................... 13
3-1.2 二維光子晶體微共振腔製程 .............. 14
3-2 原子力顯微鏡氧化方法 .................... 17
v
3-3 顯微光致螢光量測方法 .................... 20
第四章 實驗結果與討論
4-1 銦化鎵量子點在L3 共振腔的螢光光譜 ....... 23
4-2 氧化共振腔後的共振模態 .................. 27
4-3 L3 共振腔的模態掃描 ..................... 34
4-3.1 X 方向氧化掃描 ........................ 34
4-3.2 XY 掃描 ............................... 40
4-4 品質因子 ................................ 50
第五章 結論 ................................. 54
參考文獻 .................................... 55

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