臺灣博碩士論文加值系統

本論文結合外差干涉術測量的高精確度、快速量測以及相位式表面電漿共振的高靈敏度、高解析度的優點，提出一套新穎的量測技術「波長調制旋光外差干涉術應用於表面電漿共振偵測」。本研究除以電流調制雷射二極體之發光波長產生旋光外差光，降低成本外，並提出差動相位偵測概念，能有效的去除環境對系統的影響，達到高靈敏度及高解析度的系統效能，以滿足生醫檢測之需求。
根據實驗結果進行分析，本系統差動相位對折射率靈敏度為1.21×104(°/RIU)，長時間差動相位穩定度為0.048度(兩倍標準差)，因此本系統對折射率解析度可達4×10-6(RIU)。此解析度已足夠應用於偵測介面微量的生化反應。

A novel optical measurement technology“Wavelength-modulated circular heterodyne interferometry for SPR detection”is proposed. This study combined with heterodyne interferometry of high precision, real time measurement, and surface plasma resonance of high sensitivity and high resolution. This study uses direct modulation of a diode laser wavelength to produce heterodyne light source to reduce the costs, and proposes the concept of differential phase detection, which effectively remove the environmental impact on the system. Thus, this study can reach high-sensitivity and high resolution system effectiveness, to meet the needs of biomedical testing.
According to the results, the sensitivity of the system is 1.21 × 104 (°/RIU) and the long time stability of differential phase is 0.048 degree, so the resolution of refractive index is up to 4 × 10-6 (RIU). This resolution is sufficient to detect the interface of biochemical reactions.

摘要 i
Abstract ii
誌謝 iii
目錄 iv
圖目錄 vi
表目錄 ix
第一章 緒論 1
1-1研究背景 1
1-2文獻回顧 1
1-2-1表面電漿共振感測術 2
1-2-2波長調制外差干涉術 6
1-3研究動機、目的與方法 7
1-4論文架構 8
第二章 基礎理論 9
2-1表面電漿共振原理 9
2-1-1表面電漿共振之電磁理論推導 9
2-1-2激發表面電漿波的方式 13
2-1-3 反射光強度與相位推導 15
2-2干涉術 21
2-2-1一般干涉術 21
2-2-2外差干涉術 22
2-3波長調制旋光外差干涉術 24
2-3-1雷射二極體 24
2-3-2波長調制旋光外差干涉術 25
2-4相位解調 28
2-5小結 31
第三章 實驗架構 32
3-1 元件儀器介紹 32
3-2光學架構 35
3-2-1系統光學架構 35
3-2-2系統相位解調 39
3-3旋轉台控制及程式設計 40
3-3小結 43
第四章 結果與討論 44
4-1實驗準備 44
4-2近紅外光源實驗模擬 46
4-3近紅外光源實驗結果 50
4-3-1尋找最大靈敏度所對應入射角實驗 51
4-3-2交叉酒精水溶液實驗 53
4-3-3不同酒精水溶液實驗 54
4-3-4系統對折射率解析度計算 55
4-4紅光光源實驗模擬 56
4-5紅光光源實驗結果 60
4-5-1交叉酒精水溶液實驗 61
4-5-2不同酒精水溶液實驗 62
4-5-3系統對折射率解析度計算 63
4-6小結 64
第五章 實驗誤差分析 66
5-1系統誤差 66
5-1-1共振角誤差 66
5-1-2相位對折射率靈敏度誤差 70
5-2隨機誤差 72
5-2-1環境擾動 72
5-2-2溫度 73
5-3小結 74
第六章 結論與未來展望 75
6-1結論 75
6-2未來展望 76
參考文獻 77
附錄 81

[1]. K. Matsubara, et al., “Optical chemical sensor based on surface plasmon measurement ”, Applied Optics, Vol. 27, No. 6, pp.1160-1163, March 1988.
[2]. A.V. Kabashin and P.I. Nikitin, “Surface plasmon resonance interferometer for bio- and chemical-sensors”, Optics Communications, Vol. 150, No.1, pp.5-8, May 1988.
[3]. G. E. Sommargren, “Optical heterodyne profilometry”, Applied Optics, Vol. 20, No. 4, pp.610-618, February 1981.
[4]. D. Pantzer, et al., “Heterodyne profiling instrument for the angstrom region”, Applied Optics, Vol. 25, No. 22, pp.4168-4172, November 1986.
[5]. D. C. Su, et al., “A heterodyne interferometer using an electro-optic modulator for measuring small displacements”, Journal of Optics, Vol. 27, No. 1, pp.19-23, January 1996.
[6]. H. Kikuta, et al., “Distance measurement by the wavelength shift of laser diode light”, Applied Optics, Vol. 25, No. 17, pp.2976-2980, September 1986.
[7]. E. Gelmini, et al., “Tunable, double-wavelength heterodyne detection interferometer for absolute-distance measurements”, Optics Letters, Vol. 19, No.3, pp.213-215, February 1994.
[8]. C. C. Hsu, et al., “Normal incidence refractometer”, Optics Communications, Vol. 218, No.4, pp.205-211, April 2003.
[9]. R. W. Wood, “On a remarkable case of uneven distribution of light in a diffraction grating spectrum ”, Philosophical Magazine Series 6, Vol. 4, No. 21, pp. 396-402, September 1902 .
[10].L. Rayleigh, “On the Dynamical Theory of Gratings”, Proceedings of the Royal Society of London, Vol. 79, No. 532, pp. 399-416, August 1907.
[11].U. Fano, “The Theory of Anomalous Diffraction Gratings and of Quasi-Stationary Waves onMetallic Surfaces (Sommerfeld''s Waves) ”, Journal of the Optical Society of America, Vol. 31, No. 3, pp.213-222, March 1941.
[12].R. H. Ritchie, “Plasma Losses by fast electrons in thin films”, Physical Review, Vol.106, No. 5, pp.874-881, June 1957.
[13].A. Otto, “Excitation of Nonradiative Surface Plasma Waves in Silver by Method of Frustrated Total Reflection”, Zeitschrift fur physik, Vol.216, No.4, pp.398–410, August 1968.
[14].E. Kretschmann, et al., “Decay of non radiative surface plasmons into light on rough silver films. Comparison of experimental and theoretical results”, Optics Communications, Vol. 6, No. 2, pp.185-187,October 1972.
[15].B. Liedberg, et al., “Surface plasmon resonance for gas detection and biosensing”, Sensors and Actuators, Vol. 4, pp. 299-304, May 1983.
[16].B. Chadwick and M. Gal, “An optical temperature sensor using surface plasmons”, Japanese Journal of Applied Physics, Vol. 32, No. 6, pp. 2716-2717, February 1993.
[17].I. Stemmler, et al., “Compact surface plasmon resonance-transducers with spectral readout for biosensing applications”, Sensors and Autuators B, Vol.54, No.1 pp. 98-105, January 1999.
[18].J. S. Yuk and K. S. Ha, “Analysis of Immunoreactions on Protein Arrays by Using Wavelength –Interrogation-Based Surface Plasmon Resonance Sensors”, Journal of the Korean Physical Society, Vol. 45, No, 4, pp.1104-1108, October 2004.
[19].M. Nakkach, et al., “Absorption and related optical dispersion effects on the spectral response of a surface plasmon resonance sensor”, Applied Optics, Vol. 47, No. 33, pp.6177-6182, November 2008.

[20].J. B. Beusink, et al., “Angle-scanning SPR imaging for detection of biomolecular interactions on microarrays”, Biosensors and Bioelectronics, Vol. 23, No. 6, pp. 839-844, January 2008.
[21].李振華、張穎穎，「SPR相位檢測方法及應用」，中國光學期刊，第27卷，第4期，220~223頁，2007年12月。
[22].S. G. Nelson, et al., “High sensitivity surface plasmon resonance sensor based on phase detection”, Sensors and Autuators B, Vol. 35, No. 1, pp. 187-191,September 1996.
[23]. C. M. Wu and M.C. Pao, “Sensitivity-tunable optical sensors based on surface plasmon resonance and phase detection”, Optics Express, Vol. 12, No.15, pp.3509-3514, July 2004.
[24].M. H. Chiu, et al., “Small absolute distance measurement with nanometer resolution using geometricsl optics principles and a SPR angular sensor”, Sensors and Actuators A, Vol. 141, No. 1, pp.217-223, January 2008.
[25].S. F. Wang, et al., “High-sensitivity small-angle sensor based on surface plasmon resonance technology and heterodyne interferometry”, Applied Optics, Vol. 45, No. 26, pp. 6702-6707, September 2006.
[26].S. Y. Wu, et al., “Highly sensitive differential phase-sensitive surface plasmon resonance biosensor based on the Mach–Zehnder configuration”, Optics Letters, Vol. 29, No. 20, pp.2378-2380, October , 2004.
[27].H. P. Ho, et al., “Sensitivity enhancement based on application of multi-pass interferometry in phase-sensitive surface plasmon resonance biosensor”, Optics Communications, Vol. 275, No. 2, pp.491-496, July 2007.
[28].S. J. Chen, et al., “Surface plasmon resonance phase-shift interferometry: Real-time DNA microarray hybridization analysis”, Journal of Biomedical Optics, Vol. 10, No. 3, 034005-1, June 2005.

[29].S. J. Chen, et al., “Common-path phase-shift interferometry surface plasmon resonance imaging system”, Optics Letters, Vol. 30, No. 12, pp. 1488-1490, June 2005.
[30].K. Tatsuno and Y. Tsunoda, “Diode laser direct modulation heterodyne interferometer”, Applied Optics, Vol. 26, No. 1, pp. 37-40, January 1987.
[31].T. Suzuki, et al., “Phase locked laser diode interferometry for surface profile measurement”, Applied Optics, Vol. 28, No. 20, pp. 4407-4410, October 1989.
[32].J. Chen, et al., “Heterodyne interferometry with a frequency-modulated laser diode”, Applied Optics, Vol. 27, No. 1,pp.124-128, October 1988.
[33].R. Onodera and Y. Ishii, “Effect of beat frequency on the measured phase of laser-diode heterodyne interferometry”, Applied Optics, Vol. 35, No. 22, pp. 4355-4360, January 2003.
[34].李貴宇，「波長調制外差式光柵干涉儀之研究」，國立中央大學，碩士論文，民國96年。
[35].林坤億，「波長調制外差散斑干涉術之研究」，國立中央大學，碩士論文，民國97年。
[36].劉冠彣，「光強差動式表面電漿共振感測術之研究」，國立中央大學，碩士論文，民國97年。
[37].M. P. Kothiyal and C. Delisle, “Optical frequency shifter for heterodyne interferometry using counterrotating wave plates”, Optics Letters, Vol. 9, No. 8, pp. 319-321, August 1984.
[38].W. H. Stevenson, “Optical Frequency Shifting by Means of a Rotating Diffraction Grating”, Applied Optics, Vol. 9, No. 3, pp.649-652, March 1970.