本論文為定位控制，將採用線性音圈馬達來推動單軸撓性機構，以解決不必要非線性問題。然後，藉由量化電流調節器已達到高效率強健變頻控制並設計出具有低通濾波器之干擾估測以解決系統內部參數變動項的影響，再經由模擬測試分析證明，提出的混合式控制方法具有同時控制音圈馬達電流與撓性機構位置定位的優勢，並且利用傳統脈波寬度調變的PI電流控制器與積分型式的順滑模態位置控制分別對量化電流調節器和干擾估測器做模擬比較分析。最後利用類比電路實現出來。

The position control has played an important role in high-tech industries. For example, we hope the control performance fast and precisely in the biomedical industry or high-speed precision machinery. However, the high-precision positioning platform will encounter backlash, friction, hysteresis ... and so on. Therefore, this paper will use the linear voice coil motor to drive single-axis flexure mechanism, to solve the nonlinear problem unnecessarily. Then, the quantized current regulator has been reached by high efficiency robust frequency control and to design with a low-pass filter of the interference within the system parameter estimation to reduce the impact of changes in items, and then by the simulation test analysis showed that the proposed hybrid control method has simultaneous control of voice coil motor current and the flexure mechanism targeting the advantages of location, and the use of traditional pulse-width modulation of the PI current controller with integral type of smooth position control mode, respectively quantized current regulator and the disturbance estimator to do a comparative analysis of simulation . Finally the use analogies full the bridge electric circuit, several logic and the operational amplifier realizes the quantification current regulator.

目錄

摘要(中) i
摘要(英) ii
目錄 iii
表目錄 vi
圖目錄 vii
第一章 緒論 1
1.1 研究動機與目的 1
1.2 文獻回顧 3
1.2 章節內容 9
第二章 音圈馬達與撓性機構 10
2.1 音圈馬達簡介 10
2.2 撓性機構簡介 14
2.3音圈馬達與撓性機構數學模型 16
2.4系統模擬與性能測試 18
第三章 控制器的設計 24
3.1順滑模態量化電流控制 25
3.1.1動態系統之順滑模態控制. 25
3.1.2 W1與W2的選取. 29
3.1.3音圈馬達與撓性機構之量化電流調整器的設計31
3.2干擾估測之強健控制器設計 35
3.2.1參數不確定性之位置控制. 36
3.2.2利用RIC建構干擾估測器. 38
3.2.3低通濾波器Q(s)之設計. 42
3.3逆向步進控制器設計 44
3.4無感測狀態回授與順滑模態觀測器之位置控制47
3.4.1順滑模態觀測器的設計 48
3.4.2二自由度狀態回授控制器設計 52
第四章 控制器的模擬分析 54
4.1量化電流調節器的模擬分析 54
4.1.1測試內迴路W2低通濾波器 54
4.1.2測試內外迴路低通濾波器 56
4.2量化電流控制器結位置控制模擬擬分析 64
4.2.1量化調節器結合干擾估測模擬分析 64
4.2.2量化調節器結合逆向步進器位置控制之模擬分析70
4.2.3量化調節器結合干擾估測之PI位置控制模擬分析73
4.3無感測控制模擬擬分析 77
4.3.1順滑模態觀測器的模擬分析 77
4.32二自由度狀態回授控制器的模擬分析 83
第五章 實驗架構與結果 85
5.1系統開迴路的測試架構 85
5.2量化電流控制器硬體架構 89
5.2.1變流器的基本架構 90
5.2.2切換邏輯電路 92
5.2.3量化電流控制硬體實現 94
5.3量化電流控制器實驗測試 99
第六章 結論與未來方向 104
6.1結論 104
6.2未來改進與方向 105
參考文獻 107

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