臺灣博碩士論文加值系統

光纖微透鏡之加工方式雖有化學蝕刻、雷射加工、機械研磨以及聚焦離子束切割法等方法，但目前仍以機械研磨法最為普遍。尤其是加工錐式楔型光纖端面、多角錐型光纖端面以及雙變曲率光纖端面時，機械研磨更有其獨特性。
本研究主要是使用中山大學機械與機電工程學系機構設計實驗室，自行設計與製造一雙變曲率光纖端面研磨機，來進行加工參數分析探討。首先推導施加於光纖端面之正向力，將實驗參數及量測所得之數據代入研磨材料移除率公式，求取材料移除率及其常數K，直接分析進給量與研磨時間對研磨成形的影響。接著，提出光纖透鏡研磨準確度的主要關鍵，加以校調機構與加裝裝置；針對弱點部分的偏心與圓弧形端面做參數調整，並設計重現性實驗加以證明。最後同時控制光纖自轉角度、傾斜角、以及光纖與研磨片之距離等三個參數，以一次研磨製程，成功地加工出雙變曲率橢圓錐光纖端面。
本研究所研發的光纖研磨製程，除可利於製作各式光纖透鏡，以供光纖通訊使用，亦可製作如光纖探針、微分光鏡等需要極為精密加工之微小零件。

Mechanical grinding process is the most popular way to fabricate the fiber micro lenses, although there are some other methods, such as chemical etching, laser machining and focused ion beam micro-cutting. Mechanical grinding has its uniqueness in grinding Conical-Wedge-Shaped Fiber Endface, fiber endface with polygon-cone-shape, and fiber endface with double-variable curvatures.
The double-variable curvatures fiber endface polisher, designed and manufactured by Mechanism Design Lab of NSYSU, is employed in this study. The normal force of the fiber endface is derived firstly and then the experimental parameters and data are substituted into the material removal rate (M.R.R.) formula to obtain M.R.R. and the Preston’s constant K. The process parameters of the feed rate and polishing time on the fabrication of the fiber endface are analyzed.
The polisher is calibrated and adjusted to improve the precision of the optical-fiber endface. A fiber endface with double-variable curvature is successfully fabricated in a single grinding process by properly controlling the fiber rotation angle, inclining angle, and the distant between the endface and the grinding film simultaneously.
The grinding process developed in this study can be applied for fabricating optical fiber lenses in fiber optics communication as well as different types of micro probes, and micro spectroscopefors in other applications.

謝 誌 I
目 錄 II
圖目錄 V
表目錄 VII
摘 要 VIII
Abstract IX
第一章 緒論 1
1.1 研究背景 1
1.2 研究動機 2
1.3 研究目的 4
1.4 論文架構 6
第二章 文獻回顧 7
2.1 光纖 7
2.2 光纖微透鏡製作簡介 9
2.2.1 化學蝕刻法 9
2.2.2 熔燒抽絲法 11
2.2.3 研磨法 12
2.3 光纖端面成型原理 19
2.3.1 光纖研磨機簡介 19
2.3.2 材料移除率之參數 21
第三章 光纖研磨材料移除率之常數實驗 24
3.1 光纖研磨 24
3.2 光纖加工磨削理論 25
3.2.1 光纖研磨受力分析 25
3.2.2 研磨移除體積推導 30
3.2.3 材料移除率常數K之推導 33
3.3 角度、進給與加工時間之設定 37
3.4 光纖研磨材料移除率之結果 39
3.4.1 研磨量對加工時間關係圖 41
3.4.2 材料移除率(M.R.R.) 46
3.4.3 材料移除率之常數K值 49
第四章 雙變曲率光纖端面成型 52
4.1 橢圓端面研磨參數設定 52
4.2 光纖研磨機細部校調 53
4.3 不同傾斜角圓錐狀光纖末端之研磨 57
4.4 圓弧狀端面研磨參數 67
4.5 連續變化研磨雙變曲率橢圓端面 69
第五章 結論與建議 72
5.1 結論 72
5.2 未來建議 73
參考文獻 75
附 錄 78
自 述 79

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