Mechanical energy is converted into electricity by deforming multi-walled carbon nanotube arrays coated with ZnO nanocrystals by atomic layer deposition. The presented generator prototypes displayed exceptional output up to 1.62 V and 1.03 μA, illuminating a new path toward piezoelectric micro generator, or even self-powering micro system.

表面以原子層沈積法鍍上氧化鋅奈米晶粒的多壁奈米碳管陣列可將外加力學能轉換成電能。據此設計的兩種發電器原型輸出達1.62伏特與1.03毫安培，具有發展為微型發電元件，甚或微型自驅動系統的潛力。

DEDICATION AND ACKNOWLEDGMENT.....i

ABSTRACT.....ii


INTRODUCTION.....1

LITERATURE REVIEW.....3
I. Carbon nanotube.....3
II. Piezoelectricity and ZnO.....7
III. Nanogenerators based on ZnO nanowires.....9

EXPERIMENTAL.....18

RESULTS AND DISCUSSION.....22

CONCLUSION.....38

REFERENCES.....39

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