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[1] R.E. Devor, T.H. Chang, and J.W. Sutherland, Statistical Quality Design and Control.2th Ed. New Jersey, Pearson Prentic Hall, 2007. [2] http://ares.ee.ncu.edu.tw/wiki3/index.php/ [3] S. S. Rao, Reliability-Based Design, 1th Ed., New York, NY: McGraw-Hill, 2002. [4] 李輝煌, "田口方法-品質設計的原理與實務", 第三版, 台北, 高立出版, 民國98年 [5] 林振邦, "微機械麥克風之最佳化設計及其陣列於 3D 聲場重建之實現", 國立交通大學碩士論文, 2004. [6] 周鵬程, "遺傳演算法原理與應用-活用Matlab", 第二版, 台北, 全華, 2005 [7] J.K. Coultate, C.H.J. Fox, S. McWilliam, and A. R. Malvern, ”Application of optimal and robust design methods to a MEMS accelerometer,” Sensors and Actuators A, 142, pp 88-96, 2008. [8] S.P. Vudathu, D. Boning, R. Laur, “A design method for the yield enhancement of MEMS design with respect to process induced variation,” Electronic Components and Technology Conference, Reno, NV, May, 2007, pp 1947-1952. [9] S.P. Vudathu, D. Boning, and R. Laur, “A critical enhancement in the yield analysis of Microsystems,” Reliability Physics Symposium, Phoenix, AZ, April, 2007, pp 422-428. [10] F.M. Battiston, J.-P. Ramseyera, H.P. Langa, M.K. Ballera, C. Gerberb, J.K. Gimzewskib, E. Meyera and H.-J. G?刡therodt, “ A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout,” Sensors and Actuators B, 77, pp 122-131, 2001. [11] M. Villarroyaa, J. Verda, J. Tevaa, G. Abadala, E. Forsenc, F.P. Muranob, A. Urangaa, E. Figuerasb, J. Montserratb, J. Esteveb, A. Boisenc and N. Barniol, “System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection,” Sensors and Actuators A, 132, pp 154-164, 2006. [12] M. Narducci, E. Figueras, M.J. Lopez, I. Gr?趓ia, L. Fonseca, J. Santander, and C. Can?? “A high sensitivity silicon microcantilever based mass sensor,” IEEE Sensors, Lecce, Italy, October, 2008, pp 1127 - 1130. [13] M. Calleja, M. Nordstr?卌, M. ?柝varez, J. Tamayo, L.M. Lechuga, and A. Boisen, “Highly sensitive polymer based cantilever sensors for DNA detection, “ Ultramicroscopy, 105, pp 215-222, 2005. [14] F.M. Battiston, J.-P. Ramseyer, H.P. Lang, M.K. Baller, C. Gerber, J. K. Gimzewski, E. Meyer and H.-J. G?刡therodt, “A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout,” Sensors and Actuators B, 77, pp 122-131, 2001 [15] S.M. Yang, T.I. Yin and C. Chang, “A biosensor chip by CMOS process for surface stress measurement in bioanalyte,” Sensors and Actuators B, 123, pp 707-714, 2007. [16] W.-C. Wang, M. Fauver, J. Ho, E.J. Seibel, P.G. Reinhall, “Micromachined optical waveguide cantilever as a resonant optical scanner,” Sensors and Actuators A, 102, pp 165-175, 2002. [17] D. Shen, J.-H. Park, J.H. Noh, S.-Y, Choe, S.-H. Kimc, H. C. Wikle III, and D. –J. Kim, “Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting,” Sensors and Actuators A, 154, pp 103-108, 2009. [18] J. Teva, G. Abadala, Z.J. Davisb, J. Verda, X. Borris?繁, A. Boisenb, F. P?臆ez-Muranoc and N. Barniol, “On the electromechanical modelling of a resonating nano-cantilever-based transducer,” Ultramicroscopy, 100, pp 225-232, 2004. [19] L. Jianga, R. Cheunga, J. Hedleyb, M. Hassanc, A.J. Harrisc, J.S. Burdessb, M. Mehreganyd and C.A. Zorman, “SiC cantilever resonators with electrothermal actuation,” Sensors and Actuators A, 128, pp. 376-386, 2006. [20] K.E. Petersen, “Silicon torsional scanning mirror,” IBM J. Res., 24, pp 631-637, 1980. [21] P. B. Chu, S.-S. Lee, S. Park, M. J. Tsai, I. Brener, D. Peale, R. A. Doran, and C. Pu, “MOEMS-enabling technologies for large optical cross-connects,” Proceedings of the SPIE, 4561, pp 55-65, 2001. [22] V.A. Aksyuk, F.Pardo, C.A. Bolle, C.R. Giles, and D.J. Bishop,“Lucent MicrostarTM micromirror array technology for large optical crossconnects,” Proceedings of SPIE, 4178, pp 320-324, 2000. [23] V.A. Aksyuk, F. Pardo, and D.J. Bishop, “Stress-induced curvature engineering in surface-micromachined devices,” Proceedings of the SPIE, 3680, pp 984-993, 1999. [24] V.A. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. B. Chan, M. E. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, Ronald Ryf, David T. Neilson, J. Kim, C. Randy Giles, D. Bishop, “Beam-Steering micromirrors for large optical cross-connects,” Journal of Lightwave Technology, 21, pp 634-642, 2003. [25] N. Asada, H. Matsuki, K. Minami and M. Essashi, “Silicon micromachined two-dimensional alvano optical scanner, ” IEEE Transactions on Magnetics, 30, pp 4647–4649, 1994. [26] L.O.S. Ferreira and S. Moehlecke, “A silicon micromechanical galvanometric scanner,” Sensors and Actuators A, 73, pp 252–260, 1999. [27] H.A. Yang and W. Fang, “A Novel Coil-less Lorentz Force 2D Scanning Mirror Using Eddy Current,” IEEE MEMS International Conference, Istanbul, Turkey, Jan, 2006, pp 774-777. [28] J.W. Judy, “Magnetic microactuators with polysilicon flexures,” Masters Thesis, Department of EECS, University of California, Berkeley, 1994. [29] J.W. Judy, and R.S. Muller, “Magnetic microactuation of torsional polysilicon structures,” International Conference on Solid-State Sensors and Actuators, Stockholm, Sweden, June, 1995, pp 332-335. [30] J.W. Judy, R.S. Muller, and H.H. Zappe, “Magnetic microactuation of polysilicon flexure structures,” Journal of Microelectromechanical Systems, 4, pp 162-169, 1995. [31] J. W. Judy, Member, and R. S. Muller, “Magnetically actuated, addressable microstructures”, Journal of Microelectromechanical Systems, 6, pp 249-256 , 1997. [32] H.-J. Cho, J.-Y. Stephen, T. Kowel, F.R. Beyette, Jr. and C. H. Aim , “Scanning silicon micromirror using a bi-directionally movable magnetic microactuator”, MOEMS and Miniaturized Systems, 4178, pp 106-115, 2000. [33] A.D. Yalcinkaya, H. Urey, and S.Holmstrom, “NiFe plated biaxial MEMS scanner for 2-D imaging,” IEEE Photonics Technology Leters, 19, pp 330-332, 2007. [34] L, Meirovith, Element of Vibration Analysis, 2th Ed., New York, NY: McGraw-Hill, pp 220–227, 1986. [35] 湯宗霖, "利用靜磁力與勞侖茲力驅動雙軸循序掃描面鏡", 國立清華大學碩士論文, 2007. [36] R.J. Roark, Formulas for Stress and Strain, 4th Ed., New York, NY: McGraw-Hill, 1965. [37] D.G. Ullma, The Mechanical Design Process, 3th Ed., New York, NY: McGraw-Hill, 2003. [38] http://en.wikipedia.org/wiki/Normal_distribution [39] http://episte.math.ntu.edu.tw/entries/en_lagrange_mul/index.html [40] J. Shigley and C. Mischke, Mechanical Engineering Design, 6th Ed., New York, NY: McGraw-Hill , 2001.
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