臺灣博碩士論文加值系統

本研究開發一壓阻式低壓感測器(Low Pressure Sensor, 簡稱LPS) ，並設定其低壓感測範圍在1psi以下，此物理量大約在一般常人呼吸壓力之範圍，其應用在於高附加價值之醫療感測與監視儀器用途，用以監控患者或是老年人之呼吸狀況以作為病情分析與急難救助之需求。本研究經由建立完整元件之設計、製程與測試方法，探討影響元件特性以及製程良率之顯著結構因子，以提升低壓感測器的靈敏度、線性度以及生產良率，將元件性能進一步提升至高規格產品。

This study develops a piezoresistive low pressure sensor which sensing range is defined below to 1psi. The sensing range of this target is in the range of human breath. Thus, the application lies in the medical instrument and monitoring systems. The low pressure sensor can detect the amplitude and frequency of the breath to monitor and record the breathing conditions of patients or elders for analyzing or emergency requests. In order to find out the significant structure factors for device performance and fabrication yield, this study builds complete platform from design, fabrication to testing. In summary, this study tries to promote the device performance, such as sensitivity and linearity, to a high specification of product.

目錄
中文摘要 i
Abstract ii
致謝 iii
目錄 v
圖目錄 vii
表目錄 x
第一章 緒論 1
1-1 前言 1
1-2 研究動機 2
1-3 文獻回顧 2
1-3.1 壓力感測器感測型式 3
1-3.2 影響感測器性能之因素 7
1-4 研究目標 8
第二章 設計與模擬分析 20
2-1 壓阻效應 20
2-2 惠斯同電橋 22
2-3 元件設計與模擬 23
第三章 製程與實驗 40
3-1 製程步驟 40
3-2 製程結果與問題改善 43
3-2.1 壓力感測器 43
3-2.2 背向濕蝕刻凸塊 44
第四章 量測結果與討論 51
4-1 壓力感測器性能量測 51
4-2 量測結果討論 56
第五章 結論與未來工作 65
5-1 結論 65
5-2 未來工作 66
參考文獻 68

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