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研究生:朱耘漢
研究生(外文):Chu, Yun-Han
論文名稱:黃光波段之磷化鋁鎵銦之漸變折射率分開侷限應力型多重量子井雷射二極體之研製
論文名稱(外文):Yellow Light AlGaInP Graded Index Separate Confinement Strained Multiple Quantum Well Laser Diodes
指導教授:吳孟奇
指導教授(外文):Wu, Meng-Chyi
學位類別:碩士
校院名稱:國立清華大學
系所名稱:電子工程研究所
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2010
畢業學年度:98
語文別:英文
論文頁數:68
中文關鍵詞:磷化鋁鎵銦
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雷射元件一直在工業界有著舉足輕重的角色,不論是在切割、蝕刻等製程方面,更是在通訊以及醫療美容這類的應用方面有著一定的發展。在黃光雷射波段的使用上,在醫療美容的領域有著皮膚除皺的功效,為時下皮膚醫學界不可或缺的技術。另外,在心血管疾病治療部份,黃光雷射波段主要的治療標的是血管內紅血球裡的血紅素,由於血紅素可以強烈的吸收其雷射的波長,使得血管內的溫度劇烈升高,造成血管壁燒傷破壞,破壞的血管壁細胞經身體吸收消失,即可達到治療的目的。
然而,相較於現今黃光雷射常用以染料為介質之雷射(染料雷射,Dye-laser),半導體雷射二極體有著更大的發光功率,這對於除了應用於醫療之外,在光纖通訊系統上顯得更為重要。因此,本論文中特地採用磷化鋁鎵銦(AlGaInP)作為主動層,並且使用應力多重量子井(strained multiple quantum wells)以及電流阻隔式結構的組成方式,以提昇其發光功率,達到我們的目標。
論文中我們將會針對黃光雷射二極體的特性作分析,從製程前模擬作業,到後續的製程參數,最後進行不同的溫度,共振腔體長度的量測與比較。

Contents

摘 要
ABSTRACT
誌 謝
CONTENTS
FIGURE CAPTIONS
TABLE CAPTIONS
Chapter 1: Introduction 1
1-1 General overview of semiconductor laser 1
1-2 Characteristic of AlGaInP 4
1-3 Applications and advantages of yellow-green light emitting devices 8
Chapter 2: Theory 11
2-1 Basic theory of semi-conductor laser 11
2-2 Separate confinement heterostructure 13
2-2-1 Heterostructure 13
2-2-2 Separate confinement heterostructure 15
2-3 Strained multiple quantum wells 17
Chapter 3: Structure design and epitaxial wafer performance 21
3-1 Substrate 21
3-2 Active region 24
3-3 Simulation and result 28
3-4 Epitaxial wafer performance 30
3-4-1 Cross-section the epitaxial wafer 30
3-4-2 X-Ray diffractometer measurement 32
3-4-3 Photoluminescence measurement 34
Chapter 4: Fabrication of ridge waveguide laser 39
4-1 Ridge waveguide definition 39
4-2 Process of self-align 43
4-3 Process of metallization 46
Chapter 5: Performances and discussions 49
5-1 Light-current measurement 50
5-2 Voltage-current measurement 53
5-3 Spectrum 55 Chapter 6: Conclusions and future work 58
6-1 Conclusions 58
6-2 Future work 59
References 60
References 60

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