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研究生:張志斌
研究生(外文):Chang,Chih-Pin
論文名稱:以DSMC法應用於微系統 衝擊噴流冷卻之研究
論文名稱(外文):A Study of Impinging Jet Cooling in Micro System by DSMC Method
指導教授:曾培元
指導教授(外文):Tzeng,Pei-Yuan
口試委員:謝政道宋齊有曾培元
口試委員(外文):Hsieh,Chen-DauSoong,Chyi-YeouTzeng,Pei-Yuan
口試日期:100.07.15
學位類別:碩士
校院名稱:國防大學理工學院
系所名稱:機械工程碩士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2011
畢業學年度:99
語文別:中文
論文頁數:70
中文關鍵詞:衝擊噴流直接模擬蒙地卡羅法紐森數熱通量
外文關鍵詞:Impinging jetDSMCKnHeat flux
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隨著微型加工技術之進步快速,微奈米機電系統(Micro Electro Mechanical System, MEMS)在二十一世紀中是最具發展潛力的技術之一,其範圍從民生用品到軍事國防工業都包含在內。由於所有的微型系統的共同特質是物質和能量間的變化都發生在一個極小空間中,然而物質的傳遞與相互作用下必然會造成流動和能量的轉換。所以,對於微機電系統的設計與應用方面,了解系統在微小尺度內的熱流及熱傳現象將是很重要的一項課題。
本研究重點旨在探討使用直接模擬蒙地卡羅法(Direct Simulation Monte Carlo, DSMC)進行衝擊噴流冷卻模擬。本研究主要以二維之微通道流場來模擬微型衝擊噴流冷卻研究,並採用二維平行板的構型來模擬衝擊噴流之流場特性。主要模擬參數為不同Kn數、壁溫、進出口壓力並改變噴嘴大小以及流場高度等來討論影響之因素。藉由此參數之變化,更能瞭解衝擊噴流冷卻在微通道上的影響。本研究成果有助於瞭解衝擊噴流冷卻在流場內部的特性,並建立分析能量以作為此類微機件設計及改進之參考。

MEMS is a one of the most promising technology in the 21 century with rapid progress of micro-machining technology, including consumer goods to military defense industry. As all micro system in common characteristics was changed between matter and energy in extremely small space, but matter transport and interaction lead to flow and energy conversion. To sum up, one of the importance topic is to understand the fluid flow and heat transfer well in micro system.
The study focused on using DSMC to do impinging jet cooling simulation. Main research is to use 2D microchannel to simulate micro impinging jet cooling, and adopt parallel 2D plate structure to simulate flow field characteristics of impinging jet. The main simulation parameters to discuss are Kn (Knudsen number), wall temperature, inlet-exit pressure, nozzle size and impinging jet height. The influence of impinging jet cooling in microchannel is studied by the parameters changed. The result can lead it to understand the characteristic of impinging jet cooling inside flow field that built analysis capability up as to this type device to design and improvement of micro machine.

誌謝 ii
摘要 iii
ABSTRACT iv
目錄 v
表目錄 vii
圖目錄 viii
符號說明 x
1. 研究背景 1
1.1 研究動機 1
1.2 研究目的 1
1.3 研究方法之分析 1
1.4 文獻回顧 4
1.5 研究內容及論文架構 6
2. 基礎分子氣體動力論 8
2.1 簡介 8
2.2 速度分布函數 8
2.3 Boltzmann方程 12
2.4 Maxwell分布 16
3. DSMC簡介 18
3.1 基本原理 18
3.2 數值模擬程序 20
3.3邊界條件的設定 23
3.4固體邊界的設定 23
3.5流動邊界的設定 26
4. 衝擊噴流模擬結果與討論 31
4.1 二維衝擊噴流的構型相關設定 31
4.3 DSMC法之相關條件設定 33
4.4模擬結果比較與分析 34
4.5不同衝擊噴嘴大小與流場高度的模擬 37
4.8模擬結果比較與分析 38
4.9不同衝擊噴嘴大小的模擬 61
4.10不同進出口壓差模擬 63
5. 結論與未來展望 65
5.1綜合結論 65
5.2未來展望 65
參考文獻 66
自傳 70

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