國軍近年來因為儲存彈藥自燃，爆炸等因素，造成財產損失及軍譽受損更是難以估計，分析其原因，主要是因為我國軍彈藥久儲，易造成彈藥中的火炸藥變質，增加屯儲不確定性。本研究應用奈米碳管的導電性、比表面積及吸附特性，作為氣體感測器的感測材料基材，以甲基乙基酮 (Methyl Ethyl Ketone, MEK)為分散劑，配合四種功能性高分子（分別為Poly(Vinyl/Pynolidone) (PVP)、Poly(Ethylene Adipate) (PEA)、Poly(Methyl/Trifluoropropyl Siloxanc) (OV-210)及Polystyrene(PS) ），使用半導體黃光製程，製作感測器吸附材料元件，比較奈米碳管與不同高分子製作的氣體感測元件，在不同二氧化氮氣體濃度條件下的氣體感測性質分析。本研究使用原子力顯微鏡(AFM)與掃描式電子顯微鏡(SEM)觀察元件表面形貌與微結構，以熱重分析儀(TGA)量測材料的熱安定性，並觀察量測各項性質對氣體感測的導電性影響。
由AFM可知元件材料吸附二氧化氮後有澎潤現象。以SEM觀察元件材料表面形貌發現皆具細微孔洞，有利於感測氣體吸附。實驗結果顯示奈米碳管/聚苯乙烯，吸脫附的變化穩定度較純奈米碳管製成的感測材料佳。操作靈敏度隨感測氣體NO2濃度增加而增加。奈米碳管/高分子複合吸附材料，脫附過程僅以氮氣吹除即可，可有效簡化感測器製程。

There are many bomb explosions assistant in Army. The feasibility of thin-film chemical sensors based on carbon nanotubes-functional polymer nanocomposite to reialy detect NO2 has been studied. The sensors were exposed to NO2 with air. Therefore, a serirs of nanocomposite sensors array on silicon wafer microelectrode substrate using micromachining technology. In this study, commercial Multi-wall carbon nanotubes(MWCNTs) were modified with polymer like Poly(Vinyl /Pynolidone) (PVP)、Poly(Ethylene Adipate) (PEA)、Poly(Methyl/Trifluoropropyl Siloxanc) (OV-210) and Polystyrene(PS) and applied to NO2 adsorption.
The atomic force microscope (AFM) and scanning electron microscope (SEM) were used to observe the surface morphology. The physicochemical properties were by Thermogravimetry (TGA). The absorption NO2 was analyed under MWCNTs/ polymers sensor condition by Digital Souremeter (Keithley Setup2410). The sensors are carbon nanotubes-polymer nanocomposite films, which swell reversibly and cause a resistance change upon exposure to a wide variety of NO2. The resistance of carbon nanotubes-polymer nanocomposite films increase with the increasing of NO2. The sensitivity for NO2 depends on the operation temperature, which is at room temperature. The MWCNTs/Polystyrene thin film shows higher sensitivity for NO2, more than the MWCNTs thin film.

目錄

誌謝 ii
摘要 iii
ABSTRACT iv
目錄 v
表目錄 vii
圖目錄 viii
1.緒論 1
1.1 研究緣起 1
1.2 研究目的 4
1.3 研究流程 5
2.文獻回顧 6
2.1 奈米碳管 6
2.1.1 基本特性 6
2.1.2 奈米碳管的應用 8
2.1.3 奈米碳管之合成與製備方法 10
2.2 吸附理論 15
2.2.1 物理吸附與化學吸附 15
2.2.2 液相吸附擴散機制 17
2.2.3 吸附曲線 18
2.2.4 等溫吸附曲線 20
2.2.5 影響吸附之因素 21
2.2.6 奈米碳管的吸附現象 22
2.3 感測器 23
3. 實驗方法 27
3.1 實驗藥品 28
3.2 實驗儀器設備 28
3.3 電阻式氣體感測器元件及複合材料製作 29
3.3.1 半導體製程矽晶基材 29
3.3.2 奈米碳管溶液製備 30
3.3.3 複合材料感測薄膜製備 30
3.3.4 奈米碳管/高分子感測薄膜製備 31
3.4 氣體感測實驗條件 32
3.5 氣體感測之數據分析 34
4. 結果與討論 35
4.1 奈米碳管/高分子複合材料氣體感測器元件特性分析 35
4.1.1 AFM表面膨潤分析 35
4.1.2 多壁式奈米碳管/高分子複合材料感測薄膜FE-SEM圖 42
4.1.3 TGA熱重分析 44
4.2 感測吸、脫附氣體流量探討 46
4.2.1 靈敏度 53
4.2.2 鑑別度討論 55
4.2.3 不同濃度之感測研究 58
5. 結論 61
參考文獻 62
自傳 69

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