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研究生:羅睿腾
研究生(外文):LO,JUI-TENG
論文名稱:MPCVD製作鑽石薄膜的μ-PL之特性
論文名稱(外文):Fabrication of Diamond film by MPCVD and its μ-PL properties
指導教授:林坤成林坤成引用關係
指導教授(外文):Lin,Kuen-Cherng
口試委員:莊為群林坤成張火成張勤煜
口試委員(外文):Chuang,Wei-ChingLin,Kuen-CherngJang, Huo ChengJang, Chin Yu
口試日期:2011-07-09
學位類別:碩士
校院名稱:中華科技大學
系所名稱:機電光工程研究所碩士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2011
畢業學年度:99
語文別:中文
論文頁數:84
中文關鍵詞:微波電漿化學氣相沉積法鑽石薄膜光激發光氮氣二氧化碳
外文關鍵詞:Microwave plasma CVDDiamond filmMicro-Photoluminescence(μ-PL)Nitrogencarbon dioxide
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鑽石具備有許多優異的性質,如高硬度、高熱傳導率、耐腐蝕、抗輻射、化學惰性等性質,可以應用在光電元件、生物科技、機械、航空等領域;本論文是以H2、CH4、N2 及CO2為氣體源,使用微波電漿化學氣相沉積系統,在P-type(111)面和(100)矽基板上成長滲硼鑽石薄膜。實驗所得樣品經由電子掃描顯微鏡(SEM)、拉曼光譜儀(Raman)和微光激發光(μ-PL)量測系統分析。結果顯示,在成長鑽石薄膜時,若通入適量的氫氣、甲烷和氮氣,亦可成長出品質好的鑽石薄膜,通入適量的氫氣、甲烷和二氧化碳,則可成長出品質好的鑽石薄膜,在μ-PL量測系統的雷射445nm光源照射下,發現分子與光波共振將產生400~648nm的光波長。


Diamond has many unique properties such as the hardest natural material, high thermal conductivity, anti-corrosion, resistant against radiation and chemical inactive reaction. It has wide applications in photoelectric device, bio-technology, mechanics, and aviation engineering. In this work, hydrogen, methane , nitrogen and carbon dioxide are used as gas sources is used as the doping source, microwave plasma chemical vapor deposition will be applied to the growth of boron-doped diamond on p-type(111) and p-type(100) silicon substrate. The obtained samples are examined by SEM system, Raman system, μ-PL system. The results show that excellent quality diamond films were grown by feeding an adequate hydrogen flow , methane flow and nitrogen flow into the gas mixture for plasma generation. On the other hand, excellent quality diamond films were grown by feeding an adequate hydrogen flow , methane flow and carbon dioxide flow into the gas mixture for plasma generation.
Molecular and light wave resonating will have the 400~648nm light wave length by the μ-PL measurement system of laser 445nm photo source irradiation.


誌謝......................................................................................................................i
中文摘要.............................................................................................................ii
英文摘要............................................................................................................iii
目次....................................................................................................................iv
表目錄................................................................................................................vi
圖目錄..............................................................................................................viii
第一章 緒論...................................................................................................1
1-1前言...............................................................................................................1
1-2鑽石的組成...................................................................................................3
1-3 鑽石的結構............................................................................................4
1-4 研究目的與動機....................................................................................6
1-5 研究方法................................................................................................6
第二章 文獻回顧...........................................................................................8
2-1 人工鑽石合成的歷史................................................................8
2-2 鑽石薄膜的特性......................................................................11
2-2-1 特性簡介.........................................................................11
2-2-2 機械性質.........................................................................11
2-2-3 熱的性質.........................................................................11
2-2-4 電學性質...........................................................................................12
2-2-5 化學性質...........................................................................................12
2-2-6 光學性質...........................................................................................12
2-3 鑽石薄膜的應用......................................................................17
2-4 鑽石薄膜CVD製程方法........................................................18
2-4-1 化學氣相沉積法.............................................................18
2-5 鑽石薄膜參考文獻的彙整..................................................................26
2-5-1 以矽為基材的參考文獻...................................................................26
2-5-2 其他基材的參考文獻......................................................................27
2-5-3 鑽石薄膜μ-PL量測光波長的參考文獻.......................................28
第三章 實驗方法與步驟.............................................................................30
3-1 實驗設備..................................................................................30
3-2 分析儀器..................................................................................35
3-3 鑽石薄膜的成長..........................................................................37
3-3-1 基材選擇.........................................................................37
3-3-2 基材預先處理.................................................................38
3-3-3 MPCVD鑽石薄膜沉積之實驗.....................................38
3-4 實驗流程..................................................................................42
第四章 結果與討論.....................................................................................43
4-1 不同氮氣流量沉積鑽石薄膜於矽基材..................................43
4-1-1 SEM量測結果...............................................................43
4-2 拉曼光譜...............................................................................52
4-2-1 拉曼光譜原理................................................................52
4-2-2 拉曼光譜分析.................................................................54
4-3 微光激發光(μ-PL)量測系統分析.........................................58
4-3-1 微光激發光(μ-PL)量測系統之分析原理......................................58
4-3-2 微光激發光(μ-PL)量測系統之測量............................59
4-3-3 微光激發光(μ-PL)量測系統之結果............................60
第五章 結論.................................................................................................68
參考文獻...........................................................................................................69
作者簡介


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