臺灣博碩士論文加值系統

本研究為利用超高真空的背景下，進行反應性磁控濺鍍，採用具有優良抗菌效果銀的氧化物及相對有良好光觸媒效果的TiO2，控制其比例生成具備抗菌、自潔雙重弁鄋態gO-TiO2氧化物複合薄膜。
第一部分進行了薄膜基本特性的澄清，在此生成之TiO2皆是銳鈦礦相的條件；而銀方面則鎖定Ag2O、AgO兩種相成分，結果顯示在使用Ti靶生成銳鈦礦相TiO2的氣氛下，該氧氣氛（PO2 = 2 mTorr）會使銀產物皆生成AgO之形式，而TiO2靶材則可適用在Ag2O、AgO之氧氣氣氛下配合。
第二部分為進行抗菌效果之測試，主要以銳鈦礦相TiO2及Ag2O、AgO為主，製備單層膜預先測試其抗菌效果。結果顯示銳鈦礦相TiO2必須在兩小時以上之照光才能發揮抗菌效果。Ag2O本身在照光及暗室環境下皆未有抗菌能力。AgO則能在30分鐘內表現出強烈抗菌能力。
第三部分為利用亞甲基藍分解及水接觸角實驗觀察光觸媒特性。在照光條件下TiO2及AgO皆呈現隨照光時間而具有分解效果，但AgO在一定時間後卻呈現效果減弱之現象，而在暗室中AgO同樣呈現分解之效果，但遠不如照光時之分解量。TiO2本身具有親水性，AgO則是呈現疏水性。
總結以上之實驗，因而採用低氧分壓AgO與TiO2氧化物靶材做搭配，取用兩者之優點，依AgO:TiO2（20:80、45:55、80:20）配製，發現在AgO:TiO2 = 80:20下30分鐘就具有顯著抗菌效果，而光觸媒效果則完全失效。表面形貌在45:55比例下出現大幅變化，並在XPS分析下發現複合薄膜在製程中會有部分Ag2＋轉為Ag＋之形式。

In this research, AgO-TiO2 composite oxide thin-films were fabricated through a rotator-sputter deposition in a reactive magnetron sputtering system. Take the advantage of good biocides effect of silver oxide and self-clean effect of titanium oxide, to form a synergic effect coating oxide membrane.
First, we clarified the basic characteristics of membrane and all titanium oxides were in the anatase phase. In the respect of silver oxides(Ag2O、AgO),we fabricated AgO in the parameter of forming Anatase-TiO2（PO2 = 2 mTorr）with the Ti target and formed Ag2O and AgO with the TiO2 target.
Second, we performed the anti-bacterial experiment under the single composite membrane of TiO2, Ag2O and AgO. It revealed that anatase single membrane TiO2 will show the anti-bacterial effect after ultra-violet wave irritation more than 2 hours. The Ag2O single membrane has no anti-bacterial effect either under ultra-violet wave irritation or dark situation. But the AgO single membrane has anti-bacterial effect in both ultra-violet wave irritation and dark situation within 30minutes.
Third, we utilized the methylene blue decomposition and contact angle experiment to show the photocatalyst characteristics. In the lighting irritation condition, AgO show the catalyst effect while illuminated, but Ag2O has the descending effect after a period of time. In the dark situation, AgO show some catalyst effect, but the decomposition ability was much more in the lighting irritation. In the contact angle experiment, TiO2 had the hydrophilic characteristics and AgO had the hydrophobic characteristics.
Concluding the above experiments, we utilized the advantage to use AgO under lower oxidation pressure and TiO2 gum to form the differential ratio synergy composite membranes (20:80, 45:55, 80:20). In the result, we found in the ratio of AgO:TiO2 = 80:20 with 30 minutes irritation has excellent anti-bacterial effect, but photocatalyst effect failed totally. In the ratio of AgO:TiO2 = 45:55,we found that the microstructure of surface had been changed and the Ag2＋shifted to Ag＋ partially under the fabricated.

目錄 vi
圖目錄 viii
表目錄 xii
第一章、緒論 1
1.1前言 1
1.2研究動機與目的 4
1.3研究限制 5
第二章、文獻回顧 6
2.1金屬氧化物半導體之TiO2光觸媒 6
2.1.1二氧化鈦基本結構與特性 6
2.1.2TiO2光觸媒理論基礎 7
2.1.3 光觸媒材料簡介 9
2.2抗菌運作機制 11
2.2.1大腸桿菌之相關性探討 12
2.2.2TiO2造成的抗菌機理探討 13
2.2.3銀殺菌 15
第三章、實驗 21
3.1實驗流程概述 21
3.2磁控濺鍍製程系統 22
3.3大腸桿菌抗菌實驗 22
3.4光觸媒效果測試實驗 25
光觸媒分解亞甲基藍溶液實驗 25
3.5薄膜特性分析與設備 27
第四章、結果與討論 29
4.1反應性濺擊銀靶材之視窗控制?o高氧化銀（AgO）薄膜之生長 33
4.2反應性濺擊Ti及TiO2兩種靶材之視窗控制?oA-TiO2薄膜之生長 38
4.3 TiO2及氧化銀抗菌性先導實驗 41
4.4 TiO2及AgO抗菌能力指標定量實驗 43
4.5光觸媒效果測試實驗 46
亞甲基藍分解實驗 46
水接觸角測試實驗 47
4.6表面鍵結分析 48
4.7AgO-TiO2複合薄膜之綜合性探討 50
第五章、結論 88

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