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研究生:謝景揮
研究生(外文):Ching-Hui Hsieh
論文名稱:非平衡磁控濺射TiBN/DLC之製程與特性研究
論文名稱(外文):Study on the Processing and Characterizations of TiBN/DLC coatings by Unbalanced Magnetron Sputtering
指導教授:何偉友何偉友引用關係
指導教授(外文):Wei-Yo Ho
學位類別:碩士
校院名稱:明道大學
系所名稱:材料科學與工程學系碩士班
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2011
畢業學年度:99
語文別:中文
論文頁數:85
中文關鍵詞:氮化鈦硼/類鑽炭氮化鈦硼濺射鍍膜
外文關鍵詞:TiBN/DLCsputteringTiBNcoatings
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本研究主要是利用非平衡磁控濺射鍍製TiBN/DLC奈米多層膜,進行製程與特性研究,探討微結構、機械性質與其應用端。
製程採多層膜設計鍍製TiBN/DLC,同時與TiB2、TiBN、TiBN+N2 Plasma等對照組進行分析與比較。實驗選用靶材為Ti33B67與Ti圓形靶,反應性體為N2與C2H2,實驗組與對照組皆採用漸進層方式藉以增加附著性,鍍製鈦硼系列多層膜。
微結構選用儀器XRD、SEM、ESCA、AFM,包含低掠角判定其結晶優選方位;表面與斷面形貌;元素鍵結組態與表面粗度分析,機械性質方面採用:洛氏壓痕判定附著性;奈米壓痕儀檢測硬度;磨耗試驗利用玻璃球對磨以模擬玻璃壓鑄之實際運用端;腐蝕試驗藉由3.5 wt.% NaCl水溶液,經恆定電位儀量測其耐蝕性。
其結果顯示,經各XRD檢測之所有的試片皆為非晶結構,隨著N2通入與流量的增加會導致薄膜硬度有下降的趨勢,而加入C2H2合成TiBN/DLC之薄膜,在磨潤性質方面則會展現出較低的摩擦係數。
This study focus on the processing and characterizations of TiBN/DLC multilayer coatings by unbalanced magnetron sputtering, including the microstructure, mechanical property and practical application. Three different types of processing are studied such as TiB2、TiBN、TiBN+N2 Plasma films in order to analyze their differences. The films were prepared by Ti33B67 and Ti targets with gas of Ar, N2, C2H2. All films were designed with interlayer to increased adhesion by progressive deposition of graded layers. The detail structures of these coating are consisted of the same Ti interface, and final TiB2, TiBN, TiBN+N2 plasma, TiBN/DLC films. The microstructure and phase composition of coatings were studied by means of X-ray diffraction, scanning electron microscope and energy dispersive spectroscopy. The chemical bonding and surface roughness were evaluated by electron spectroscopy for chemical analysis, atomic force microscope. In field of mechanical property, the adhesion and hardness are tested by rockwell hardness tester, Nano-indenter tester. Wear test against glass balls is conducted to simulate practical application. The corrosion behaviors were studied in aerated 3.5wt.% NaCl aqueous solutions by interpretation of electrochemical anodic polarization curves. The XRD results show all samples were amorphous. The hardness was decreased with the increase of nitrogen. The wear test of TiBN/DLC films against both the pin-on-disk glass balls and WC balls as the counter-face shows very low friction coefficient.
摘要 I
總目錄 III
圖目錄 V
表目錄 X
第一章 前言 1
第二章 文獻回顧 3
2.1 非平衡磁控濺射 3
2.2 氮化物 5
2.3 BN 5
2.4 TiB2文獻回顧 6
2.5 TiBN…………………………………………………………6
2.6 TiBCN………………………………………………………8
2.7 多層膜設計…………………………………………………9
2.8 Glass & Pt-Ir……………………………………………10
2.9 類鑽碳……………………………………………………11
2.10 拉曼光譜分析………………………………………………13
第三章 實驗方法 ………………………………………………14
3.1 非平衡磁控濺射鍍膜系統………………………………14
3.2 基材選用及前處理………………………………………15
3.3 實驗設計與流程………………………………………………16
3.4 薄膜分析與檢測………………………………………………20
3.4.1 X光繞射儀……………………………………………20
3.4.2 場發射掃描式電子顯微鏡……………………………22
3.4.3 拉曼光譜分析…………………………………………23
3.4.4 X射線光電子能譜儀……………………………………24
3.4.5 附著力測試………………………………………………26
3.4.6 奈米硬度測量…………………………………………27
3.4.7 磨耗試驗分析…………………………………………28
3.4.8 原子力顯微鏡…………………………………………29
3.4.9 腐蝕試驗………………………………………………30


第四章 結果與討論……………………………………………………31
4.1 TiB2薄膜添加氮元素之影響……………………………………31
4.1.1 X-ray繞射分析……………………………………32
4.1.2 XPS全能譜分析…………………………………………32
4.1.3 SEM表面形貌觀察………………………………………33
4.1.4 AFM與表面粗度量測……………………………………33
4.1.5 SEM斷面分析……………………………………………36
4.1.6 洛氏壓痕試驗……………………………………37
4.1.7 奈米壓痕………………………………………………38
4.1.8 磨耗實驗………………………………………………39
4.1.9 腐蝕試驗………………………………………………42

4.2改變氮氣流量鍍製TiBN/DLC薄膜…………………………………44
4.2.1 X-ray繞射分析…………………………………………44
4.2.2 XPS分析…………………………………………………45
4.2.3 拉曼分析………………………………………………49
4.2.4 SEM表面形貌觀察 ………………………………………51
4.2.5 AFM與表面粗度量測……………………………………52
4.2.6 SEM斷面分析……………………………………………55
4.2.7 附著性測試………………………………………………57
4.2.8 奈米壓痕………………………………………………59
4.2.9 磨耗實驗………………………………………………61
4.3 TiBN/DLC增加碳層厚度…………………………………………65
4.3.1 X-ray繞射分析…………………………………………65
4.3.2 XPS全能譜分析…………………………………………65
4.3.3 拉曼分析…………………………………………………69
4.3.4 SEM表面形貌………………………………………………70
4.3.5 AFM與表面粗度量測………………………………………71
4.3.6 SEM斷面分析………………………………………………74
4.3.7 附著性測試…………………………………………………74
4.3.8 奈米壓痕……………………………………………………76
4.3.9 磨耗實驗……………………………………………………77
4.3.10 腐蝕試驗……………………………………………………79

第五章 結論…………………………………………………………………81
參考文獻………………………………………………………………………82
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