臺灣博碩士論文加值系統

本論文主要研究以溶膠凝膠法製備摻鋁氧化鋅(AZO)透明導電膜。其鋁與鋅的成分比為1.0 at. %，以Eagle 2000玻璃為AZO薄膜的基板，基板的應力點為666 ℃。在退火溫度操作於400~800 ℃，結果發現退火溫度在700 ℃時的電阻率為最佳，其阻值比其它退火溫度低10倍以上，而在可見光區超過86 %的高穿透率，與其它退火溫度的穿透率相比約少了有3~4 %。
在不同氣體氛圍實驗中，結果發現真空退火下有著最高的穿透率，大氣退火中的氧含量有助於AZO薄膜較為平坦，而氮氣退火可得最佳的結晶性和最低的電阻率，此電阻率與其它退火氛圍可減少1~2倍。
在本實驗以三種降溫方式，發現退火製程結束時，將爐管抽真空後降溫至室溫，所得到的電阻率比其它降溫方式可低30~180倍。最佳的製程為在700 ℃氮氣退火一小時後，將爐管抽至真空降溫至室溫。
製作成AZO薄膜後，以不同的射頻功率進行30分鐘電漿處理實驗，結果發現射頻功率25~100 W氫電漿處理後的AZO薄膜，其電阻率與未電漿處理相比至少減少了65 %。
最後，將試片置於空氣中，在室溫下觀察30天AZO薄膜的穩定度，發現未電漿處理與電漿處理後的試片，老化30天後皆約增加1倍。此老化結果意謂氫電漿處理可以有效防止AZO薄膜的老化。

The main purpose of this thesis is to fabricate the transparent conductive AZO (ZnO：Al) film by sol-gel method, the atomic ratio of Al and Zn in AZO film is 1 to 100. The films were spin coated on Eagle 2000 glass with strain point 666 ℃. The annealing temperature is operated between 400 to 800 ℃ which is across the strain point. The result shows that 700 ℃ anneal has the best resistivity, but reveals the worst transmittance in the visible region. The resistivity is more than ten times lower than that of the samples receiving other annealing temperature. The transmittance of 700 ℃ annealed samples is more than 86 % which is about 3 to 4 % less than that of samples with different anneal temperatures.
Different annealing ambient is also carried out in this research , the samples under vacuum annealing reveals the highest transmittance; samples annealed in air reveals a better surface in smoothness , while the samples annealed in nitrogen has the best crystallinity and lowest resistivity.
In addition, the cooling down process is modified with three different schemes; the slow cooling in vacuum can lead to the lowest resistivity. The improvement can be as high as 30 to 180 folds.
AZO films were then treated in hydrogen plasma with different RF power from 25 W to 100 W. The resistivity can be reduced to at least 65 % with hydrogen plasma treatment.
Finally, the samples were aged in air at room temperature for 30 days to see the stability of the AZO films. For both plasma treated and un-treated samples, the resistivity all increased two folds after 30 days. This aging result implicates that hydrogen plasma treatment can also effectively prevent the aging of the AZO films treatment AZO thin films.

誌謝ⅰ
摘要ⅱ
Abstractⅲ
總目錄ⅳ
圖目錄ⅵ
表目錄ⅷ
第一章 緒論 1
1.1 前言與背景簡介 1
1.2 研究動機與研究目的 2
第二章 理論基礎與文獻回顧 4
2.1 透明導電膜的概論 4
2.1.1 透明導電膜的基本特性 4
2.1.2 透明導電膜的分類 4
2.1.3 透明導電膜的製備 5
2.1.4 透明導電膜的應用 6
2.2 氧化鋅薄膜的基本特性 6
2.2.1 透明導電膜的結構特性 8
2.2.2 透明導電膜的電性特性 8
2.2.3 透明導電膜的光學特性 11
2.3 溶膠凝膠法概論 12
2.3.1 溶膠凝膠法的定義 12
2.3.2 溶膠凝膠法的反應機制 12
2.4 文獻回顧 13
2.4.1 不同退火方式對AZO透明導電膜的影響 13
2.4.2 不同退火溫度對AZO透明導電膜的影響 13
2.4.3 不同退火持溫時間對AZO透明導電膜的影響 13
2.4.4 不同氣體氛圍對AZO透明導電膜的影響 15
2.4.5 不同射頻功率對AZO透明導電膜的影響 15
第三章 實驗 17
3.1 實驗方法 17
3.1.1 AZO薄膜製作方法 17
3.1.2 爐管使用方法 19
3.1.3 電漿處理 21
3.2 實驗規畫與流程 22
3.3 儀器設備之介紹 23
3.3.1 AZO溶液調配之使用儀器 23
3.3.2 AZO薄膜之製備儀器 23
3.3.3 AZO薄膜之特性量測儀器 24
第四章 結果與討論 28
4.1 不同退火方式對AZO透明導電膜的影響 28
4.1.1 電學特性分析 28
4.1.2 表面形態分析 29
4.1.3 晶體結構分析 31
4.1.4 光學特性分析 33
4.2 不同氣體氛圍對AZO透明導電膜的影響 35
4.2.1 電學特性分析 35
4.2.2 表面形態分析 36
4.2.3 晶體結構分析 39
4.2.4 光學特性分析 42
4.3 不同退火溫度對AZO透明導電膜的影響 46
4.3.1 電學特性分析 46
4.3.2 表面形態分析 48
4.3.3 晶體結構分析 50
4.3.4 光學特性分析 51
4.4 不同退火持溫時間對AZO透明導電膜的影響 55
4.4.1 電學特性分析 55
4.4.2 表面形態分析 56
4.4.3 晶體結構分析 57
4.4.4 光學特性分析 59
4.5 不同射頻功率對AZO透明導電膜的影響 62
4.5.1 電學特性分析 62
4.5.2 表面形態分析 64
4.5.3 晶體結構分析 65
4.5.4 光學特性分析 66
4.6 穩定度測試 69
第五章 結論 71
參考文獻 73

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