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ABSTRACT (Chinese)……………………………………………………………I ABSTRACT (English)…………………………………………………………III TABLE CAPTIONS…………………………………………………………………VI FIGURE CAPTIONS………………………………………………………………VII CHAPTER 1 Introduction………………………………………………………1 CHAPTER 2 Background Theory………………………………………………5 2.1 Solar Cell Type and Efficiency……………………………………5 2.2 Preparation of Solar cells…………………………………………7 2.2.1 Crystal Structure and Characteristics of ZnO 2.2.2 Physical Vapor Deposition (PVD) by Sputtering 2.2.3 Plasma-Enhanced Chemical Vapor Deposition (PECVD) 2.3 Solar Cell Characterization………………………………………13 2.3.1 Current-Voltage Characteristics 2.3.2 Quantum Efficiency CHAPTER 3 Experiments………………………………………………………21 3.1 Sputter Tuning for GZO Contact Films…………………………21 3.2 Textured GZO Back Contact by Plasma Dry Etching Process……………………………………………………………………………22 3.3 Textured GZO Back Contact by Chemical Wet Etching Process……………………………………………………………………………23 CHAPTER 4 Characterization of GZO Transparent Contact Electrodes………………………………………………………………………26 4.1 Results and Discussion………………………………………………26 4.1.1 Optical, Electrical and Material Property for GZO Single Films 4.1.2 Application of GZO Films on uc-Si:H Thin Film Solar Cells 4.2 Summary……………………………………………………………………34 CHAPTER 5 Plasma-induced TCO Texture of GZO Back Contacts…………………………………………………………………………36 5.1 Results and Discussion………………………………………………36 5.1.1 The Structure of Back Contact GZO by Plasma Dry Etching 5.1.2 Light Scattering Effect for Textured GZO/Ag Films 5.1.3 Textured Back GZO Contact on a-Si Silicon Thin Film Solar Cells 5.2 Summary……………………………………………………………………42 CHAPTER 6 Wet-etch Texturing of GZO Back Contacts……………43 6.1 Results and Discussion………………………………………………43 6.1.1 Influence of Substrate Temperature for GZO Films 6.1.2 Surface Plasmon Effect for Etched ZnO/Ag Interface 6.1.3 Surface Morphology of Etched GZO on Single μc-Si:H Solar Cells 6.1.4 Enhancement of Light Trapping in Single μc-Si:H Solar Cells 6.1.5 Light Scattering Effect for Wet Etching GZO/Ag Films 6.1.6 Surface Morphology of Etched GZO on Silicon Tandem Solar Cells 6.1.7 Crystallinity of GZO Films on Different Substrates 6.1.8 Enhancement of Light Trapping in Tandem Silicon Solar Cells 6.2 Summary……………………………………………………………………61 CHAPTER 7 Conclusion and Future Works………………………………63 7.1 Conclusion…………………………………………………………………63 7.2 Future Works………………………………………………………………64 REFERENCES………………………………………………………………………65 PUBLICATIONS LIST……………………………………………………………77 VITA………………………………………………………………………………79
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