臺灣博碩士論文加值系統

本研究旨在探討鑄形鎳鐵磁性薄膜在不同長寬比與厚度下的磁電阻行為。實驗中利用電子束微影製作長度7~8微米、寬從0.28~5微米、厚度30、40、50奈米的元件。本研究中也使用微磁模擬軟體來與實驗中的磁電阻曲線搭配探討，為了瞭解不同長寬比帶來的磁阻曲線行為變化，我們利用微磁模擬探討不同條件下的磁化翻轉差異。
在研究中的磁阻曲線得到在長寬比6、7的磁化翻轉屬於較單純的兩種穩定態的變化，但是長寬比10下的磁阻曲線表現較複雜的翻轉過程，但是當厚度到50奈米後此現象即不再。

This study is mainly to investigate the magnetoresistance(MR) behavior of different aspect ratio and thickness patterned permalloy thin films. E-beam lithography processes were used to fabricate patterned device with long axis range from 7 micrometer to 8 micrometer, width range from 0.28 to 5 micrometer and thickness from 30 micrometer to 50 micrometer. This study is also used micro-magnetic simulation to discuss with MR characteristic curve. In order to utilize the MR characteristic change with different aspect ratio magnetic elements, we discussed the different magnetization switching behavior by micro-magnetic simulation. The MR curves in this study shows that aspect ratio 6 and 7 of element lead to single domain configuration and sharp transition of MR curves. The MR curve perform a complicate situation in aspect ratio 10, this situation was disappeared when the thickness reveal 50 nanometer.

誌謝…………………………………………………………………Ⅰ
中文摘要……………………………………………………………Ⅱ
英文摘要……………………………………………………………Ⅲ
目錄…………………………………………………………………Ⅳ
圖目錄………………………………………………………………Ⅵ
第一章 緒論…………………………………………………………1
1.1 研究背景………………………………………………………1
1.1.1 前言…………………………………………………………1
1.1.2磁性薄膜的應用……………………………………………2
1.2 磁性理論………………………………………………………4
1.2.1 磁區…………………………………………………………4
1.2.2 磁壁…………………………………………………………6
1.2.3 磁電阻概述…………………………………………………8
第二章 文獻回顧…………………………………………………11
2.1 研究動機………………………………………………………11
2.2 文獻回顧………………………………………………………16
2.2.1 Resistivity due to Domain Walls in Co Zigzag Wires………16
2.2.2 The angular dependence of Neel wall resistance by magnetotransport in the centipedelike Permalloy structures………19
2.2.3 Mechanisms of magnetization reversals in elliptical thin films…23
第三章 實驗製程與量測儀器…………………………………28
3.1 前言…………………………………………………………28
3.2電子束微影…………………………………………………29
3.3 鍍膜系統……………………………………………………37
3.4 製程結構……………………………………………………39
3.5 量測架構……………………………………………………43
3.5.1 磁阻量測…………………………………………………43
第四章 實驗結果與分析………………………………………45
4.1 前言…………………………………………………………45
4.2 長寬比對磁阻的影響………………………………………47
4.3 膜厚對磁阻的影響…………………………………………67
第五章 結果討論………………………………………………75
參考文獻…………………………………………………………76

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