臺灣博碩士論文加值系統

本研究發展一種以磁流體為驅動源所製造的微型幫浦，在實驗加工中，以CO2雷射加工取代黃光製程，減少實驗成本也加快製造時間。在CO2雷射加工中，是由不同的雷射功率與雷射加工速度進行聚焦加工，再以較低的雷射功率和較快的加工速度進行離焦加工，改善管道粗糙度。將加工完畢後的晶片進行熱處理，可使管道品質更佳，減少幫浦內的阻力使幫浦流量更大。利用離焦法和熱處理可使管道的Ra值達到5~6 nm。
本實驗所使用的磁性流體為油基磁流體，不會與水混合，利用與水不混合的特性，使管道內的磁流體移動時可達到推擠流體的功用。而幫浦的作動方式，是以步進馬達接上一永久磁鐵驅動一股可動的磁流體，而晶片上則固定一永久磁鐵將一股磁鐵體固定，利用可動的磁流體來推動流體形成一個幫浦機制，並測量幫浦作動後每分鐘的流量和幫浦可推送的高度。在管道品質好的幫浦中，當馬達轉速為8 rpm時，最大流量與最大水頭壓力為47 μl/min和95 (mm H2O)。以切線設計的微型幫浦，當馬達轉速為2 rpm和8 rpm時，流量可達到14 μl/min和56 μl/min。

This study presents develops one kind by the ferrofluidic the micropump which makes for the actuation source. In the experiment processes, replace for photolithography by the CO2 laser process, reduces the experiment cost also to speed up the manufacturing time. In the CO2 laser processing, improve channel roughness by different laser power and laser processing speed focus processing, then a lower laser power and faster processing speed of defocus processing. The chips processed after the proceed heat treatment, better channel quality can reduces the pump's resistance cause the pump flow rate to be bigger. Using defocus and heat treatment can channel middle line average roughness reach 5 ~ 6 nm.
This experiment uses the ferrofluidic is the oil base ferrofluidic, not and the water mix, the use and the water does not mix the characteristic, will cause when channel ferrofluidic migration may achieve pushes the fluid the function. The pump work the way, is mainly permanent magnet by the stepper motor to actuate movable ferrofluidic, on the chip stationary permanent magnet,acts as a closed valve between the inlet and outlet chambers, uses the movable ferrofluidic to pushing the fluid to form a pump mechanism. Surveying the pump each minute flow rate and the pump can push the altitude. The pump channel quality is good, motor speeds 8 rpm the maximum flow rate achieved was 47 μl/min. The maximum head pressure achieved was 95 (mm H2O). Tangent design micropump, motor speed of 4 and 8 rpm, the volumetric flow rate is 14 μl/min and 56 μl/min.

目錄
摘要………………………………………………………………………………I
Abstract………………………………………………………………………II
謝誌………………………………………………………………………………IV
目錄……………………………………………………………………………… V
圖目錄…………………………………………………………………………VIII
表目錄……………………………………………………………………………XII
符號說明…………………………………………………………………………XIII
簡寫說明…………………………………………………………………………XIV
第1章 緒論…………………………………………………………………………1
1.1 前言…………………………………………………………………………1
1.2 微機電系統之概述與發展…………………………………………………2
1.3 微幫浦介紹…………………………………………………………………4
1.4 研究動機與目的……………………………………………………………5
第2章 文獻回顧……………………………………………………………………6
2.1 磁性流體………………………………………………………………………6
2.2 雷射加工…………………………………………………………………14
第3章 微幫浦製作…………………………………………………………………23
3.1 晶片的基材………………………………………………………………23
3.2 實驗器材與實驗流程……………………………………………………23
3.2.1 實驗用的器材……………………………………………………………23
3.2.2 實驗架構與設計…………………………………………………………24
3.3 晶片製作…………………………………………………………………25
3.3.1 晶片設計…………………………………………………………………25
3.3.2 雷射加工…………………………………………………………………27
3.3.3 晶片熱處理………………………………………………………………29
3.3.4 熱壓封裝………………………………………………………………29
3.4 磁性流體的選用…………………………………………………………32
3.5 步進馬達…………………………………………………………………33
3.6 永久磁鐵…………………………………………………………………35
3.7 SEM和AFM觀察管道品質…………………………………………………37
第4章 結果與討論………………………………………………………………39
4.1 不同雷射速度和功率，管道在SEM下的圖型……………………………39
4.2 熱處理管道平坦化………………………………………………………41
4.3 管道熱壓封裝後狀況……………………………………………………46
4.4 馬達轉速對幫浦流量與水頭壓力的影響………………………………47
4.5 幫浦管徑變化對流量與水頭壓力的影響………………………………50
4.6 管道品質對幫浦流量與水頭壓力的影響………………………………56
4.7 幫浦無水頭壓力影響狀況下馬達轉速與流量的關係…………………56
4.8 將圓環管道增大，觀察流量的變化……………………………………58
4.9 以切線設計微型幫浦，觀察馬達轉速與流量的關係……………………59
第5章 結論與未來展望…………………………………………………………61
5.1 雷射加工部分………………………………………………………………61
5.2 磁流體微幫浦部分…………………………………………………………61
5.3 未來展望……………………………………………………………………62
參考文獻…………………………………………………………………………63
作者簡介…………………………………………………………………………66

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