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研究生:王之妤
研究生(外文):Wang, Jhih-Yu
論文名稱:三維奈米碳管與高分子整合製程之開發及其於撓性電容式感測元件之應用
論文名稱(外文):Development of 3D CNTs-Polymer Composite for Flexible Capacitive Sensors
指導教授:方維倫
指導教授(外文):Fang, Weileun
口試委員:鄭裕庭徐文光
口試日期:2011-7-20
學位類別:碩士
校院名稱:國立清華大學
系所名稱:動力機械工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2011
畢業學年度:99
語文別:中文
論文頁數:94
中文關鍵詞:奈米碳管高分子複合材料可撓性電容感測器
外文關鍵詞:carbon nanotubepolymercompositeflexiblecapacitive sensor
相關次數:
  • 被引用被引用:2
  • 點閱點閱:304
  • 評分評分:
  • 下載下載:13
  • 收藏至我的研究室書目清單書目收藏:0
本研究開發三維奈米碳管與高分子整合製程,及利用此製程及設計製作撓性電容式感測元件,分別為應變感測,彎曲曲率感測,觸覺感測及近接感測。此研究利用奈米碳管結合高分子的複合材料當作電容式的指叉電極,因奈米碳管成長高度約為50 ~100?慆,故會有較大的感測面積及感測電容值。另外透過在矽基材上成長不同的三維奈米碳管的圖形分佈,再藉由簡單的高分子翻膜技術,便可以製作出三維奈米碳管結合高分子材料的感測電極和電路,並以高分子材料當做電容感測器的基材增加其可撓性。相較於金屬電極沉積在高分子基材上,利用奈米碳管結合高分子的複合材料,可以避免感測電極和高分子基材黏著性不佳的問題。本研究成功利用本文開發之製程平台,實現多種撓性電容式感測元件,並且對於應變感測,彎曲曲率感測,觸覺感測及近接感測進行性能的分析及探討,最後整合觸覺感測和近接感測。未來可朝向陣列式的發展,並將感測電路和控制系統做整合,應用於機械手臂及穿戴式智慧裝置系統。
This study reports a novel approach to implement 3D carbon nanotubes (CNTs) interdigitated finger electrodes on flexible polymer, and the detection of strain, bending curvature, tactile force, and proximity distance are demonstrated. The merits of presented design are as follows, (1) employing the aligned CNTs (~70?慆 in height) as interdigitated finger electrodes to increase sensing area and initial capacitance; (2) 3D interdigitated finger electrodes and anchor structures are naturally formed by the use of anisotropically-etched silicon mold; (3) the 3D CNTs electrodes and electrical routings are batch-fabricated on the silicon substrate, and are transferred to the flexible polymer substrate by polymer molding; (4) the CNTs-polymer composites as sensing electrodes and electrical routing are more robust and can avoid the problem of delamination; (5) the integration of 3D polymer structure can be further adopted as flexible sensors with multi-functional sensing. Preliminary fabrication results demonstrate a flexible capacitive sensor with 50?n?慆 high CNTs interdigitated electrodes on poly-dimethylsiloxane (PDMS) substrate. The tests show that its typical capacitance change is several dozens of fF and the gauge factor ranges 4.6~6.5 for strain and bending curvature measurement; the sensitivity of tactile force is 1.11%/N; the proximity distance can be detected up to 1500?慆 away from the sensor.


摘要 I
Abstract II
致謝 III
目錄 V
圖目錄 VIII
表目錄 XIV
第1章 序論 1
1-1 前言 1
1-2 研究動機 2
1-3 文獻回顧 3
1-3.1 應變感測器 3
1-3.2 觸覺感測器 6
1-3.3 近接感測器 7
1-3.4 撓性感測器之黏著性的問題 7
1-3.5 奈米碳管整合微機電製程之介紹 9
1-4 研究目標 9
第2章 三維複合材料及電容式感測器之設計 29
2-1 製程設計-三維奈米碳管/高分子材料之複合材料 29
2-2 指叉狀結構之電容感測機制 30
2-2.1 應變感測之能力 32
2-2.2 彎曲曲率感測之能力 35
2-2.3 觸覺感測之能力 36
2-2.4 近接感測之能力 37
2-3 整合觸覺感測及近接感測器之設計 37
第3章 製程與實驗 51
3-1 製程步驟 51
3-2 光罩佈局 52
3-3 製程結果 53
3-4 問題改善 54
3-4.1 電子束蒸鍍鐵膜之問題 54
3-4.2 高分子材料從矽模具脫模之情況 56
3-4.3 不穩定的感測訊號 57
第4章 量測結果 66
4-1 電訊號之量測及溫度變化和溫度對電容值之影響 66
4-2 應變感測能力之量測 67
4-3 彎曲曲率感測能力之量測 68
4-4 觸覺感測能力之量測 69
4-5 近接感測能力之量測 70
4-6 整合觸覺/近接感測器之量測 71
第5章 結論與未來工作 83
5-1 結論 83
5-2 未來工作 84
參考文獻 86


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