臺灣博碩士論文加值系統

Single exponentially weighted moving average (single EWMA) 控制器是半導體科技產業中最常被使用的製程批次控制手法。現存文獻大多只在單一機台生產單一產品的生產型態下，探討此控制器之績效表現及分析；然而目前國內IC 產業製造廠商大多屬於單一機台生產多樣產品，或多機台生產多樣產品的混合生產型態 (mixed run)，此時由於每個產品的預測模型之截距項及其產出理想目標值皆不盡相同，因此我們無法直接採用single EWMA 控制器來監控生產製程。針
對此困難，文獻上已有學者提出product-based 及tool-based 控制器來處理混合生產之製程監控問題，這兩種控制方法雖可監控多產品的生產模式，但在產品交替生產的過程中，無法有效地降低轉換產品後製程產出值與目標值的偏差量，以致重製率上升。因此，本文建構出改良式的single EWMA 控制器 (簡稱轉換產品的single EWMA控制器)，來處理此類混合生產製程的批次控制問題。文中在特定製程的模型假設下，首先推導出此控制器之製程產出公式的解析解，並探討其穩定條件。此外，當前述模型假設不成立時，由於此控制器的製程產出公式將十分複雜，故本文採用模擬方法來說明此控制器之績效表現，利用total mean square error (TMSE) 及重製率 (rework rate，RR) 兩個準則，與現有的控制器做優劣比較分析，其模擬結果指出本文提出的控制器可大幅地降低重製率，對製程的改善更加顯著。

Exponentially weighted moving average (EWMA) controller has been widely used in semiconductor manufacturing processes. In the literatures, several papers addressed the efforts of long-term stability and short-term performance of EWMA control scheme. However, all the existing models are only valid when focusing on single-product and single-tool production style. In practical applications, multiple-product and multiple-tool production style is common for the practical implementation of run to run (R2R) control scheme. Recently, product-based approach and tool-based approach have been proposed to handle this mixed-run production problem. Although these control schemes will eventually bring the process output to the desired targets; they may suffer from a larger rework rate (RR) due to larger process variations. To overcome this difficulty, we propose a modified single EWMA controller to tackle this problem. We first address the stability conditions of the proposed controller. The result demonstrates that the stability conditions of the proposed controller will be held under some specific assumptions. Furthermore, we also use simulation study to investigate the performance of the proposed controller via total mean square error (TMSE) and RR criterion. The results demonstrate proposed controller outperforms existing models.

第一章 簡介..............................................................................1
1.1 前言.........................................................................................................1
1.2 批次控制簡介.........................................................................................2
1.3 研究動機.................................................................................................3
1.4 研究架構.................................................................................................4
第二章 文獻回顧與問題描述.................................................5
2.1 Single EWMA控制器簡介....................................................................5
2.2 Product-based 控制器簡介.....................................................................6
2.3 Tool-based 控制器簡介...........................................................................9
2.4 問題描述.................................................................................................12
第三章 轉換產品控制器之分析...........................................14
3.1 雙產品轉換產品控制器之建構............................................................14
3.2 雙產品轉換產品控制器的製程產出及其穩定表現............................16
3.3 三產品轉換產品控制器之建構............................................................22
第四章 轉換產品控制器之績效表現...................................26
4.1 轉換產品控制器與product-based 控制器之績效表現…..................26
4.2 轉換產品控制器與tool-based 控制器之績效表現............................29
第五章 結論與後續研究.......................................................33
參考文獻.................................................................................34
附錄.........................................................................................35

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