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研究生:連炯堃
研究生(外文):Jyong-Kuen Lian
論文名稱:奈米壓電材料之研究與應用:氧化鋅奈米柱與氮化銦鎵/氮化鎵多重量子井
論文名稱(外文):Study and application of nano-piezoelectric materials:ZnO nanorods and InGaN/GaN multiple quantum wells
指導教授:陳永芳陳永芳引用關係
口試委員:林泰源梁啟德
口試日期:2011-06-27
學位類別:碩士
校院名稱:國立臺灣大學
系所名稱:應用物理所
學門:社會服務學門
學類:社會工作學類
論文種類:學術論文
論文出版年:2011
畢業學年度:99
語文別:英文
論文頁數:49
中文關鍵詞:壓電效應氧化鋅奈米柱多層量子井氮化銦鎵氮化鎵
外文關鍵詞:piezoelectricpiezotronicZnOnanorodsmultiple quantum wellInGaNGaN
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在本論文中,我們討論兩種半導體複合材料的光學及壓電性質:氮化銦鎵/氮化鎵多重量子井、氧化鋅奈米柱。我們利用氧化鋅的壓電特性,當氧化鋅奈米柱在感測器表面產生形變時,其電偶極會影響氮化銦鎵/氮化鎵多層量子井的內電場,而因為量子侷限史塔克效應的關係,量子井的光致螢光光譜、拉曼散射光譜會有所改變。這些現象代表著氧化鋅與氮化銦鎵/氮化鎵多層量子井複合材料可開發成壓力感知器的可能性。

In this thesis, we will study a novel semiconductor composite consisting of InGaN/GaN multiple quantum well (MQW) and zinc oxide nanorods, we have found some interesting phenomena. Relying on the piezoelectric-potential created in zinc oxide under strain, which will alter the electric field in MQWs. It will induce the change of photoluminescence spectra and Raman spectra could be changed due to the quantum confined Stark effect. As a result, the composite consisting of InGaN/GaN MQWs and ZnO nanorods has a great opportunity in the development of pressure detectors or strain sensors.

致謝…………….………………………………………………………………… I
摘要…………….………………………………………………………………… II
Abstract…………………………………………………………………………. . III
Contents………………………………………………………………………….. IV
Figure captions…………………………………………………………………... VI
1. Introduction…………………………………………………………………. 1
References……………………………………………………………………. 3
2. Theoretical background…………………………………………………….. 4
2.1 Growth methods ………….……….……………………………………... 4
2.1.1 Metal-organic vapor phase epitaxy……………………………..... 4
2.1.2 Vapor-liquid-solid growth……………………………………....... 8
2.1.3 DC sputtering deposition…………………………………………. 10
2.2 Photoluminescence……………………………………………………….. 11
2.3 Scanning electron microscopy…………………………………………..... 17
2.4 Raman scattering…………………………………………………………. 22
References………………………………………………………………… 29
3. Optical detection of strain induced effects in ZnO-nanorods-decorated
InGaN/GaN multiple quantum wells……………………………………… 30
3.1 Introduction……………………………………………………………… 30
3.2 Experiment……………………………………………………………..... 31
3.3 Results and discussion……………………………………………..…..... 34
3.4 Summary………………………………………………………………… 38
References………………………………………………………………. 47
4. Conclusion………………………………………………………………….. 49


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