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研究生:楊三和
研究生(外文):San-Ho Yang
論文名稱:壓電致動元件與機電網路系統於光學減震桌之振動控制與設計
論文名稱(外文):Vibration Control of an Optical Table by Mechatronic Network and Piezoelectric Transducers
指導教授:王富正
口試委員:顏家鈺呂志誠蔡宗惠
口試日期:2011-07-28
學位類別:碩士
校院名稱:國立臺灣大學
系所名稱:機械工程學研究所
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2011
畢業學年度:99
語文別:中文
論文頁數:115
中文關鍵詞:擾動響應分解被動式結構主動式結構壓電材料機電懸吊系統光學桌
外文關鍵詞:Disturbance Response Decouplingmechatronic suspension systempiezoelectric transducersvibration controloptical table
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本論文旨在探討光學減震桌之設計與控制。應用擾動響應分解技巧,結合被動式與主動式的雙層減震結構,將來自地面的震動與桌面儀器的擾動分開處理。
因壓電材料具有出力大、精度高等特性,故吾人以其作為致動器,結合控制架構的設計,形成主動式減震架構以抑制桌面儀器的擾動,並搭配氣浮式減震桌腳I-2000等被動元件進行地面震動的隔離。
由於I-2000不易調整其結構以增進減震性能,故吾人應用一個新的元件-機電網路系統,結合彈簧-阻尼系統作為減震桌腳被動架構,利用機械/電子網路的概念設計電路阻抗以增進系統隔離地面震動的性能,並搭配壓電致動器進行主動控制,以抑制桌面擾動。
因上述減震桌被動架構較軟,為避免安裝儀器時因過度晃動而造成儀器的損壞,本論文亦討論另一反向控制架構,以較硬的被動式元件抵抗桌面儀器振動,而使用主動控制來消除地面擾動的影響。


This paper proposes the design and control of an optical table, Which needs to isolate two main vibration sources, namely load disturbances from the machine and ground disturbance from the environment. However, the suspension settings to suppress these two disturbances are conflicting: they need to be soft for the ground disturbances but stiff for the load disturbances. Therefore, we apply disturbance response decoupling techniques to independently treat these two vibration sources.
First, we apply passive I-2000 pneumatic LabLegsTM and the spring-damper sets to insulate the ground disturbance in a passive way and use piezoelectric transducers as active actuators to improve load responses, because of their properties, such as high accuracy and large driving force.
Second, we apply a new mechatronic network to replace I-2000, because the suspension settings of I-2000 cannot be easily adjusted for performance improvement. The mechatronic network can be connected to suitable electric circuits for performance optimization.
Lastly, we apply inverse control structures to the optical table: suppressing the load disturbances by the hard passive elements, and isolating the ground disturbances by active control.
From the simulation and experimental results, the designs are deemed effective.


口試委員會審定書 i
誌謝 ii
中文摘要 iii
Abstract iv
圖目錄 vii
表目錄 xi
符號與縮寫解釋表 xiii
第一章 序論 1
1.1 前言 1
1.2 文獻回顧 3
1.3 研究目的 4
1.4 文章架構 5
第二章 減震平台運動分析及控制 7
2.1 擾動響應分解理論 7
2.2 強韌控制理論 7
2.2.1 範數(norm) 7
2.2.2 系統範數 8
2.2.3 線性分式轉換(Liner Fractional Transformation) 8
2.2.4 互質因式分解(Coprime Factorizations) 9
2.2.5 系統不確定模型 10
2.2.6 間隙度量 13
2.2.7 強韌性概念與分析 14
2.2.8 迴路成型(loop shaping)設計[20] 15
2.3 控制器參數化 20
2.4 單減震桌腳控制模型 23
2.5 半桌減震模型 26
2.6 全桌減震模型 30
2.7 單減震桌腳反向控制模型 40
第三章 實驗架構與硬體安裝 43
3.1 減震系統設計 43
3.1.1 壓電致動器(Piezoelectric Transducers) 43
3.1.2 I-2000 44
3.1.3 機電懸吊系統(Mechatronic Suspension Systems) 45
3.1.4 彈簧與軸承 46
3.2 實驗設備 47
3.2.1 震動測試平台 47
3.2.2 音圈馬達 48
3.2.3 LVDT 49
3.2.4 加速規 52
3.2.5 訊號擷取卡 54
3.3 系統鑑別 55
3.3.1 壓電致動器系統鑑別 55
3.3.2 I-2000與 系統鑑別 57
3.3.3 機電懸吊系統鑑別 59
第四章 模擬與實驗 65
4.1 壓電致動器之振動控制 65
4.1.1 全桌減震模擬 65
4.1.2 全桌減震實驗 71
4.2 機電懸吊系統於減震桌腳之應用 73
4.2.1 機電懸吊系統之外接電路阻抗Ze設計與驗證 73
4.2.2 壓電致動器搭配機電懸吊系統之減震控制 77
4.3 反向控制架構 86
4.3.1 濾波器設計 86
4.3.2 控制器設計 91
4.3.3 音圈馬達之反向控制策略 96
4.4 本章結論 105
第五章 結論與未來展望 107
5.1 結論 107
5.2 未來展望 108
第六章 參考文獻 109
附錄:口試委員問題與建議 113


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