臺灣博碩士論文加值系統

中文摘要
傳統外差式干涉術是一項非常重要的量測工具，從角度、位移、折射率、表面輪廓、溫度量測、速度到生化光學活性，都廣泛利用外差式干涉術。它具有了快速的反應，容易與其它技術結合，以及量測精準性的優點。在本文中，我們將以傳統外差式干涉儀配合二分之一波板的架構以提高其靈敏度。經實驗證實，使用此改良後的外差式干涉儀可以提高到4倍的靈敏度。並進行為移量測、訊號雜訊比(SNR)及穩定性實驗。本方法具有共光程與共路徑的結構，故有高穩定性，並且組裝架構容易，並且有及時量測的優點，線性度可以達到平均誤差0.016，SNR值可達到43.2db。

ABSTRACT
Traditional heterodyne interferometer is a very important measurement tools, from point of view, displacement, refractive index, surface profile, temperature optical speed to biochemical activity, have extensive use of heterodyne interferometer.　It has a fast response, easy integration with other technologies, and measurement accuracy advantages. In this article, we will be the traditional heterodyne interferometer with one-half wave plate structure to improve its sensitivity. The experiment confirmed that using this improved the heterodyne interferometer can be increased by 4 times the sensitivity. And the displacement measurement, signal to noise ratio (SNR) and stability experiments。
This method has a total optical path structure, it has a high stability, and easy to set up assembly, and a timely measure of merit. Stability can be achieved an average error of 0.061, SNR values of up to 43.2db.

目錄
中文摘要 I
英文摘要 II
致謝 III
目錄 IV
表目錄 VI
圖目錄 VII
第一章、緒論 1
1-1研究背景與文獻回顧 1
1-2 本文研究之目的 4
1-3論文架構 4
第二章、理論 5
2-1 干涉 5
2-2 偏極 7
2-2-1 線偏極光 8
2-2-2 圓偏極光 9
2-2-3橢圓偏極光 11
2-3分光鏡 12
2-4偏極分光鏡 12
2-5 反射鏡 13
2-6相位延遲波板 14
2-7外差式干涉儀 16
2-8外差是干涉儀實驗架構 18
2-9設計原理加上1/2波板 20
第三章、實驗 25
3-1 實驗架構 25
3-2原件介紹 26
3-2-01 HP5529A雙頻雷射干涉儀 27
3-2-02偏極分光鏡 27
3-2-03相位延遲板 28
3-2-04角柱稜鏡 29
3-2-05反射鏡 30
3-2-06伺服平台 31
3-2-07信號之量測數據 32
3-2-08示波器 33
3-2-09光偵測器 33
3-2-10軟體校正 34
A.選擇量測 34
B.設定雷射 34
C.設定量測 35
D.蒐集資料 35
3-3實驗步驟 35
第四章、結果與討論 38
4-1訊號雜訊比 38
4-2線性度量測值 40
4-3輸入值與量測值 41
4-4實驗數據分析 42
第五章、結論與未來展望 43
5-1結論 44
5-2未來展望 44
參考文獻 45

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