全球當前量測技術於介尺度三維量測上遭遇到瓶頸，而該技術瓶頸乃在於探針式探頭感測器的設計與製造上。隨著科技進步，特徵尺寸範圍在μm到mm的介尺度元件需求急速增加，量測準確度需求更已達到奈米等級。過去十年，全球各主要國家的研究組織結合全球知名公司進行多項與探頭感測器相關的研究工作，但並沒有太大的突破。主要的原因在於他們所提出的方法多半有靈敏度不高、探針施力過大以及探針直徑太粗等問題。本研究提出一種高靈敏度的光纖探針式探頭光學感測技術，它沒有前述的缺點，它採用布拉格光纖光柵原理，搭配光學干涉術，可確保光纖探頭感測器在奈米等級位移時即能夠產生碰觸觸發訊號，很有機會可以突破全球當前量測技術的瓶頸。

Currently the global measurement technology in meso-scale three-dimensional topographyencountered a bottleneck, which lies in the design and manufacture of the probe type of the probing sensor. With the progress of science and technology, the need of meso-scale components with their feature size ranging from micrometers to millimeters rapidly increase. The demand for measurement accuracy has reached the nanometer level even more. Over the past decade, the world’s major countries, cooperated with world-renowned research organizations and companies to carry out a number of research work related to the probing sensors, but there is not any great breakthrough. The main reason is that most of the proposed methods have low sensitivities, large contact forces and large probe diameters. In this study, a optical sensing technique of fiber probing head with high sensitivity is proposed. It does not have the foregoing shortcomings. Besides, it adopts fiber Bragg grating principle and optical interferometry. It can ensure the fiber probing head outputs the touch-trigger signal within nanometer scale displacement. It is likely to be able to break through the current global bottlenecks in measurement technology.

目錄
中文摘要 I
英文摘要 II
目錄 III
表目錄 VI
圖目錄 VII
符號說明 XI
第一章 緒 論 1
1.1 研究背景 1
1.2 研究動機 5
1.3 文獻回顧 7
1.3.1光纖光柵感測技術概述 7
1.3.2探頭感測器的國內外研究現狀 10
1.4研究目的 15
1.5論文架構和創新點 15
1.5.1論文架構 15
1.5.2論文的創新點 16
第二章 光纖感測原理 18
2.1光纖的基本介紹 18
2.1.1光纖構造 18
2.1.2光纖主要分類 18
2.1.3光纖訊號傳輸原理 21
2.1.4光纖的損耗 28
2.2光纖之應用及感測器分類 32
2.2.1以感測元件分類 33
2.2.2以解調方式分類 33
2.2.3干涉現象 35
2.3光纖光柵基本介紹 38
2.3.1光纖光柵原理 38
2.3.2光纖光柵分類 40
2.3.3光纖光柵多工感測器 44
2.3.4光纖光柵感測器的訊號解調技術 47
2.3.4.1濾波法 47
2.3.4.2干涉法 52
2.4光纖光柵感測器之製作技術 55
2.5光彈理論與熱光效應 60
2.5.1光彈理論 60
2.5.2熱光效應 64
2.6布拉格光纖光柵中心反射波長飄移理論 64
2.6.1波長飄移與應變關係 64
2.6.2波長飄移與溫度關係 67
2.7模態耦合理論 68
第三章 光纖探針式探頭光學感測系統 74
3.1光學相位式感測技術 74
3.2相位展開 75
3.3解相位技術 77
3.4實驗量測 78
3.4.1實驗儀器與元件規格 79
3.4.2訊號處理系統 84
3.4.3實驗驗證 85
第四章 實驗結果與討論 87
4.1光纖探針研製 87
4.2光學相位式位移量測 89
4.2.1光源與光纖的耦合 89
4.2.2繞射極限 91
4.2.3實驗內容和步驟 95
第五章 結論與展望 102
參考文獻 104

表目錄
表 1解調方法優缺點對照表 54
表 2石英光纖材料性質 67
表 3象限的判別 76
表 4實驗儀器與元件規格 82
表 5光纖耦合系統儀器與裝置規格 95

圖目錄
圖 1全球三維量測技術瓶頸範圍：圖中“??”區塊乃當前全球量測技術瓶頸範圍 1
圖 2探針式探頭感測器的量測概念架構示意圖 2
圖 3三次元量測儀量測誤差的來源 3
圖 4幾個典型的微小元件：(a)光纖接頭；(b)生醫用微模具；(c)精密量測用光纖球頭；(d)生醫用微流道；(e)精細機械元件 4
圖 5軟性顯示器roll-to-roll製程的介尺度量測問題示意圖：AFM是量測微奈米結構三維形貌的代表工具，三次元量測儀（CMM）則是工業尺寸量測代表工具，屬於大尺度的量測技術，這兩種現代重要的量測工具均無法應用於介尺度的微結構量測 5
圖 6被測對象市場所占百分比 10
圖 7光纖感測器技術所占百分比 10
圖 8Richard等人提出的電容式探頭感測器結構示意圖 11
圖 9Meli等人所提出撓性機構式的探頭感測器結構：(a)(b)(c)示意圖(d)實體圖 12
圖 10雷射捕捉探頭感測技術 12
圖 11Bos等人所提出的應變規式探頭感測器 13
圖 12Chu等人提出之光學式探頭感測器結構：(a)示意圖(b)實體圖 14
圖 13Ji提出的光纖探頭感測技術 14
圖 14非接觸光學式探頭結構示意圖 15
圖 15光纖基本結構示意圖 18
圖 16不同種類光纖示意圖 20
圖 17光纖依傳播模態數分類 21
圖 18Snell’s law示意圖 22
圖 19光在光纖中傳輸原理 23
圖 20低階模態光場分布影像 27
圖 21光纖各種損耗原因 28
圖 22光纖損耗示意圖 29
圖 23石英系列光纖之損失曲線 31
圖 24(A)完全建設性干涉(B)完全破壞性干涉(C)破壞性干涉 36
圖 25顯微鏡底下觀察之干涉條紋 36
圖 26光纖光柵原理示意圖 38
圖 27光纖光柵之反射與穿透光 40
圖 28短週期式光纖光柵工作原理示意圖 41
圖 29短週期式光纖光柵模態耦合示意圖 42
圖 30長週期式光纖光柵工作原理示意圖 43
圖 31長週期式光纖光柵模態耦合示意圖 43
圖 32單點量測之光纖光柵感測器 44
圖 33分波多工光纖光柵感測器 45
圖 34並聯式分時多工光纖光柵感測器 45
圖 35分枝式分時多工光纖光柵感測器 46
圖 36WDM加上並聯式TDM多工光纖光柵感測器 46
圖 37WDM加上分枝式TDM多工光纖光柵感測器 46
圖 38匹配光柵濾波法 48
圖 39邊緣濾波器原理 49
圖 40邊緣濾波法 50
圖 41F-P腔結構 51
圖 42可調諧F-P濾波法 51
圖 43可調諧窄帶光源法 52
圖 44非平衡M-Z干涉法 53
圖 45非平衡掃描麥克森干涉法 54
圖 46含鍺玻璃內的GeO缺陷示意圖 56
圖 47在光纖上寫入光柵的幾種方式的示意圖 57
圖 48相位光罩法原理示意圖 59
圖 49均勻光纖光柵傳輸矩陣模型示意圖 71
圖 50非均勻光纖光柵傳輸矩陣模型示意圖 73
圖 51探針式探頭之光學相位式感測技術光路示意圖 75
圖 52原始 函數 76
圖 53經過相位重建的 函數 77
圖 54呂薩加圓解相位示意圖 78
圖 55系統實驗流程圖 79
圖 56雷射頭 79
圖 57光纖耦合器 80
圖 58光偵測器 81
圖 59示波器 81
圖 60探頭感測器架構實體圖 83
圖 61雷射控制器 83
圖 62NI BNC-2110接線盒 84
圖 63NI PCI-6143資料擷取卡 84
圖 64實驗時所採用的加載方式示意圖 85
圖 65加載機構實體圖 85
圖 66探頭感測器校正系統的架構示意圖 86
圖 67HP5529A雷射干涉儀 86
圖 68COMPexPro 201 F型KrF準分子雷射加工系統實體圖 87
圖 69準分子雷射加工系統功能方塊圖 88
圖 70PS750光敏光纖 88
圖 71布拉格光纖光柵探針製程架構 89
圖 72兩片楔形板所構成之夾角 89
圖 73光纖耦合損耗 90
圖 74高斯光束傳輸示意圖 93
圖 75高斯光束直徑的界定示意圖 94
圖 76物鏡聚焦於光纖條件示意圖 95
圖 77正面觀察光纖(光學顯微鏡以20倍率拍攝) 98
圖 78側面觀察光纖(光學顯微鏡以20倍率拍攝) 98
圖 79物鏡與光纖配置實體圖 99
圖 80光纖耦光實體圖 100
圖 81雷射光強訊號 101

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