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研究生:陳星逸
研究生(外文):Sin-Yi Chen
論文名稱:酸溶半導體產業廢抗靜電袋回收技術之研究
論文名稱(外文):RESOURCE REUSE OF THE WASTE STATIC-SHIELDING BAG USING HYDROCLORIC ACID DISSOLUTION TECHNOLOGY
指導教授:吳南明吳南明引用關係
指導教授(外文):Nan-Min Wu
學位類別:碩士
校院名稱:元培科技大學
系所名稱:環境工程衛生研究所
學門:工程學門
學類:環境工程學類
論文種類:學術論文
畢業學年度:99
語文別:中文
論文頁數:55
中文關鍵詞:抗靜電袋酸溶穿孔模式模擬
外文關鍵詞:static-shielding bagsacid dissolutionpunch-pinsmodeling
相關次數:
  • 被引用被引用:2
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  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:1
半導體產業所使用的抗靜電袋,其功能為保護電子(晶圓)產品存取或轉動造成磨擦的靜電產生,為確保晶圓品質,抗靜電袋屬於單一次性使用(One-time-use),造成此類型複合材質日以據增。本研究目的為設計一個廢抗靜電袋酸溶解技術,將廢抗靜電袋用鹽酸分離成塑料與三氯化鋁,實驗參數包括調整鹽酸濃度及廢抗靜電袋上穿孔處理,以便了解酸溶廢抗靜電袋整體之影響。研究結果顯示,以鹽酸濃度14%增加至28%,反應完成時間從60小時縮短至7小時,若在廢抗靜電袋上穿孔,金屬溶出完成所需時間更縮短約90%。此外本研究建立一個酸溶數學模式並採用正交法,預測在酸溶反應器內鋁金屬濃度之變化且比較不同的鹽酸濃度影響鋁金屬的溶出,包括在廢抗靜電袋表面上穿孔並與實驗數據作比較,本研究模式模擬數據與實驗數據顯示鋁金屬的溶出與模式數據存在非線性的關係,此外將鹽酸溶解廢抗靜電袋不僅是可行的,能減少半導體產業的廢棄物外,對於環境上減廢是具有正面的效益。
The static-shielding bags used by the semiconductor industry mainly consist of plastic and a thin aluminum foil embedded in the inner layers. Its function is to serve as protection of electronic (wafer) products by inhibiting the static generation. To ensure the quality of the wafer products, as well as reducing static damages caused from deposition, the static-shielding bags are intended for a single-use, resulting in an accumulation of environmental loading in waste treatment. The objective of this study was to develop an aluminum foil dissolution technology to recycle the static-shielding bags using hydrochloric acid (HCl). Process variables including HCl concentration as well as the punch-pins numbers are applied so as to examine their impacts on the overall reaction. Study results showed that, as HCl concentration was increased from 14 % to 28 %, the reaction completion time was decreased and could be reduced from 60 hours to 7 hours. In addition, the completion time of reaction was found to decrease with the increase in punch-pins numbers. The more the pins punched, the more the completion time saved, up to 90 %. A mathematical model was also developed to predict the aluminum concentration in a finite batch reactor, and to test this model with experimental data. Model equations, which considered that film transfer and surface diffusion controlled the dissolution rate, were solved using the orthogonal collocation method. The model was employed to compare the performance of different HCl concentration and to analyze factors that affect the aluminum dissolution, such as punch-pins numbers on the surface of static-shielding bags. All of the simulation results together with the experimental data indicate that there exists a nonlinear relation between each of the model parameters and the aluminum dissolution rate. The study results suggested that the approach to dissolving aluminum -contained static-shielding bags by HCl is not only viable, but also is contribution to the waste reduction of semiconductor industry.
誌謝.......................................................I
摘要......................................................II
英文摘要..................................................III
目錄.......................................................V
表目錄..................................................VIII
圖目錄....................................................IX
第一章 前言.................................................1
1.1 研究緣起................................................1
1.2 研究目的................................................3
1.3 研究方法與架構..........................................3
第二章 文獻回顧.............................................5
2.1 酸溶金屬機制(Mechanism of Metal-Acid Dissolution).......5
2.2 酸溶金屬應用............................................6
2.3 溶出程序................................................7
2.3.1 液-氣溶出程序.........................................8
2.3.2 液-液溶出程序.........................................8
2.3.3 液-固溶出程序.........................................9
2.4 質量傳遞方程式.........................................11
2.4.1 邊界條件.............................................13
2.5 溶出模式(Dissolusion modeling).........................14
2.5.1 穩定狀態溶出模式(Steady-state)........................14
2.5.2 非穩定狀態溶出模式(Unsteady-state)....................18
2.6 數值模式解法(Solution Numerical model).................19
第三章 實驗設備與方法.......................................20
3.1.1 實驗設備.............................................20
3.1.2 實驗材料與藥品.......................................20
3.2 本實驗之實驗流程........................................21
3.2.1 廢抗靜電袋與酸液來源..................................23
3.2.2 酸溶廢抗靜電袋試驗....................................23
3.2.3 酸液中金屬的測定......................................24
3.2.4 模擬軟體及使用方法....................................24
第四章 結果與討論...........................................25
4.1 酸溶程序之質量平衡......................................25
4.2 濃度高低影響溶出效率....................................37
4.3 增加孔洞數及濃度高低影響溶出效率..........................44
4.4 模式敏感度範圍.........................................48
第五章 結論與建議...........................................50
第六章 參考文獻............................................51
附錄......................................................53

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