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研究生:白尚永
研究生(外文):Pai, Shang-Young
論文名稱:沉積金在Si(111)表面上的兩種圖樣轉變之探討
論文名稱(外文):Transition between two patterns on an Au-deposited Si(111)surface
指導教授:門福國
指導教授(外文):Men, Fu-Kwo
口試委員:門福國李進榮甘宏志楊子萱
口試委員(外文):Men, Fu-KwoLee, Chin-RongKan, Hung-ChihYang, Tzyy-Schiuan
口試日期:2012-07-31
學位類別:碩士
校院名稱:國立中正大學
系所名稱:物理學系暨研究所
學門:自然科學學門
學類:物理學類
論文種類:學術論文
論文出版年:2012
畢業學年度:100
語文別:中文
論文頁數:53
中文關鍵詞:5x27x7
外文關鍵詞:goldsiliconAuSiripeninglong range interaction
相關次數:
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在實驗中將金磊晶至有微小切角之Si(111)-(7×7)表面會出現兩種不同的圖形
樣式。若在600℃磊晶時,我們發現幾乎在每個平台之上台階處會有條狀之(5×2)重
構。若在700℃磊晶時,則只會在多個平台其中之一的平台表面形成完整的(5×2)重
構,而其他平台則無變化。(5×2)及(7×7)平台之比例關係是由金之磊晶量所決定。
在700℃以上熱退火後,條狀(5×2)圖樣轉變為完整之(5×2)平台圖樣。在特定條件
下(5×2)重構會呈現類似週期性結構的圖樣,表示其中可能有ㄧ long-range elastic
interaction 的機制在其中。我們可以利用(5×2)的成長圖樣應用在設計奈米結構之
模板。
Two distinct patterns have been observed by depositing sub-monolayer Au onto a
Si(111)-(7×7) surface with a small miscut angle. Upon depositing Au at 600℃, we find
that a stripe of (5×2) reconstruction forms at the upper step edge in mostly every terrace.
For 700℃ deposition, one entire terrace out of several terraces transforms into the (5×2)
reconstruction while the other terraces are totally unaffected by the Au deposition. The
relative population between the (5×2) and the (7×7) terrace is governed by the amount of
deposited Au. After annealing at a temperature above 700℃ the striped (5×2) pattern
transforms, or grows, into the (5×2)-terrace pattern. In a given condition, (5 × 2)
reconstruction show a periodic-like pattern, there may have a mechanism of long-range
elastic interaction incuded. One application using the (5×2) pattern as a template to grow
nanostructure in designated regions will be demonstrated.
Ch1 Introduction 1
Ch2 Experimental Setup 3
2.1 Ultra-high vacuum system 3
2.1.1 Introduction 3
2.1.2 Vacuum pump 4
2.1.3 Vacuum gauge 8
2.2 Scanning tunneling microscopy 9
2.2.1 Principle of scanning tunneling microscopy 9
2.2.2 Low-temperature scanning tunneling microscope 12
2.2.3 Tunneling effect 15
Ch3 Theoretical background 19
3.1 Silicon 19
3.1.1 Si(111)surface structure 20
3.1.2 Si(111)-(7×7)reconstruction 20
3.2 Au on Si(111) 22
3.2.1 Evolution of Au-induced reconstruction 22
3.2.2 Si(111)-(5×2)/Au reconstruction 23
3.3 Growth of thin films 25
3.3.1Growth modes 25
3.3.2 Nucleation 27
3.3.3 Coarsening 28
Ch4 Experiment and Analysis 30
4.1 Experiment 30
4.1.1 Introduction 30
4.1.2 Experimental procedure 31
4.1.3 Results of annealing at 700℃ 32
4.2 Analysis 40
4.2.1 The transition between two patterns 40
4.2.2 System conservation 41
4.2.3 The driving force 41
4.2.4 The AFM image of long time annealing 43
4.2.5 Long range interaction? 46
Ch5 Conclusion 47
Reference 48

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[8] R. Feenstra, J. A. Stroscio, and A. Fein, “Tunneling spectroscopy of the Si(111)21 surface,”Surface Science, vol. 181, no. 1–2, pp. 295–306, 1987.
[9]K. Takayanagi, Y. Tanishiro, S. Takahashi, and M. Takahashi, “Structure analysis of Si(111)-7_7 reconstructed surface by transmission electron diffraction,” Surface Science, vol. 164, no. 2–3, pp. 367–392, 1985.
[10] T. Hasegawa, K. Takata, S. Hosaka, and S. Hosoki, “Initial stage of Au adsorption onto a Si(111) surface studied by scanning tunneling microscopy,” Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures, vol. 9, pp. 758–760, mar 1991.
[11] S. Takahashi, Y. Tanishiro, and K. Takayanagi, “Short range orders of an adsorbed layer: gold on the Si(111)7 _ 7 surface,” Surface Science, vol. 242, no. 1-3, pp. 73–80, 1991.
[12] A.-L. Chin, Structural transformation and island formation introduced by metal deposition on Si(111) surface. PhD thesis, Department of Physics, National Chung Cheng University, 2010.


[12]許穩壹, “Ostwald ripening of cobalt silicide islands on Si(111)-5×2/Au” Master’s thesis, 國立中正大學物理研究所, 2009.
[13]Jian Hua Yao, K. R. Elder, Hong Guo, and Martin Grant, “Theory and simulation of Ostwald ripening” Journal of Physical Review B, vol.47 pp. 110-125,June 1993.
[14]P.W Voorhees, “The Theory of Ostwald Ripening” Journal of Statistical Physics, vol. 38,pp. 231-252, 1985.

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