臺灣博碩士論文加值系統

　　本論文提出利用光纖鍍膜蝕刻技術，在不同種類光纖上製作空氣間隙型長週期光纖光柵（Air-Gap Long Period Fiber Grating，AG-LPG），並結合智能材料－磁性流體，來實現完成一磁感測器（Magnetic Sensors）。空氣間隙型長週期光纖光柵製作過程－首先將光纖經過側向拋光（Side-Polishing）、微影製程（Micro-Lithography）、蝕刻技術（Etching）等步驟，完成長週期空氣間隙型光纖光柵，最後在光柵區封裝上磁性流體(Magnetic Fluid)製作出磁場感測器。除了可量測磁場大小外，亦可推算出相應電流大小值，應用於高壓電流之感測。
　　電磁量測實驗架構係利用電流變化，而產生不同磁場強度。將電流以0.05A為單位由0.8A上升至1A，量測磁場對應強度為226.79(Oe)上升至392.91(Oe)。實驗結果得知，單模空氣間隙型長週期光纖光柵磁感測器之感測靈敏度為0.03147 nm/Oe；以多模空氣間隙型長週期光纖光柵磁感測器之感測靈敏度為-0.3362 nm/Oe。
　　期許未來可以更細緻實驗架構，以增進實驗精確度及靈敏度，發展更完善的磁場強度感測機制。

The magnetic sensors based on the air-gap long period fiber gratings (AG-LPG) on different types of fibers are presented in this thesis. The AG-LPG is fabricated by using the fiber side-polishing, fiber lithography and fiber etching techniques to produce the periodic air-gap grating in the core along the fiber axis both of single mode fibers and multi-mode fibers. Then, the grating region is immersed in the magnetic fluid and then packaged for achieving the magnetic sensor. This sensing mechanism is based on the resonance loss-dip wavelength shift of AG-LPG by the index change of magnetic fluid due to the variation of magnetic field strength. Further, the magnetic fiber sensor can provide another technique for measuring the high voltage electric current.
The experimental results show that when the current is increased from 0.8A to 1A with the increment of 0.05A, the magnetic field intensity is increased from 226.79(Oe) to 392.91(Oe). The sensitivities of magnetic sensors both of AG-LPG on SMF and AG-LPG on MMF are 0.03147 nm/Oe and -0.3362 nm/Oe respectively. The sensitivity of the magnetic sensor can be improved for developing a wide range of magnetic sensing applications.

目 錄
摘 要 i
Abstract ii
誌謝 iii
目 錄 iv
圖目錄 viii
表目錄 x
第一章 緒論 1
1.1 研究動機 1
1.2 研究目的 2
1.3 研究方法 2
1.4本文架構 3
第二章 光纖光柵簡介與原理 4
2.1 單模光纖(single mode fiber; SMF) 4
2.2多模光纖(multimode fiber; MMF) 5
2.3 光纖光柵簡介 6
2.4.1 光纖光柵的分類 8
2.4.2 光纖光柵的物理特性 10
2.5 長週期光纖光柵（Long Period Grating，LPG） 11
2.5.1 結構 11
2.5.2 理論分析 12
2.5.3 光學性質 14
2.5.4長週期光纖光纖寫製 17
第三章 空氣間隙型長週期光纖光柵製作 18
與磁性流體 18
3.1 前言 18
3.2 單側面拋光（Side Polishing） 18
3.3 微影製程(Micro-Lithography) 21
3.3.1 光阻劑塗佈（Spin Coating） 23
3.3.2 軟烤（Soft bake） 24
3.3.3 曝光（Exposure） 25
3.3.4 顯影(Development) 27
3.3.5 硬烤（Hard Bake） 27
3.4 蝕刻（Etching） 28
3.5空氣間隙型長週期光纖光柵感測特性 28
3.6磁性流體 30
3.7磁性流體簡介 30
3.8 磁性流體特性 32
3.8.1超順磁性 32
3.8.2磁光效應 32
3.8.3 磁熱效應 32
3.8.4 黏磁特性 33
3.8.5流變性 33
3.9 磁性流體在磁場下的特性 33
3.9.1 外加垂直磁場 33
3.9.2 外加平行磁場 34
3.10 磁性流體應用 34
3.10.1 密封 34
3.10.2 磁性流體感測器 35
第四章 磁感測器製作實驗與分析 36
4.1空氣間隙型長週期光纖光柵(AG-LPG)之製作 36
4.2 單模AG-LPG液體折射率實驗 37
4.2.1實驗架設 37
4.2.2實驗結果 38
4.2.3結果討論 39
4.3 磁性流體觀測架構 40
4.4電磁鐵裝置 41
4.5 AG – LP G磁感測器 42
4.6單模AG-LPG磁感測器實驗結果 43
4.7 單模AG-LPG磁感測器實驗結果討論 45
4.8多模AG-LPG磁感器實驗結果 46
4.9多模AG-LPG磁感測器實驗結果討論 48
4.10單模與多模AG-LPG磁感測器之比較 48
第五章 結論與未來展望 51
參考文獻 53

圖目錄
圖2.1 單模光纖示意圖 4
圖2.2 多模光纖示意圖 5
圖2.3 單模光纖傳輸模式 6
圖2.4 多模光纖傳輸模式 6
圖2.5 光纖光柵工作示意圖 11
圖2.6 均勻式長週期光纖光柵的結構 12
圖2.7 光波行經長週期光纖光柵後所產生的繞射 15
圖2.8 長週期光纖光柵雷射寫製 17
圖3.1 光纖拋光基板架構示意圖 20
圖3.2 使用拋光皮縱向拋光示意圖 21
圖3.4 為光阻曝光後圖示 26
圖3.5 微觀磁性流體 31
圖3.6 磁流體受垂直磁場力 34
圖4.1 單模光纖AG-LPG光學顯微鏡拍攝圖 36
圖4.2 空氣間隙型長週期光纖光柵之折射率實驗架構圖 37
圖4.3 鹽水溶液對應AG-LPG損失峰波長飄移圖 38
圖4.4 糖水溶液對應AG-LPG損失峰波長飄移圖 39
圖4.5 實驗架構 40
圖4.6 高斯計(Gauss Meter)量測電磁鐵磁場強度 41
圖4.7 AG-LPG磁感測器實驗架構 42
圖4.8 單模空氣間隙型長週期光纖光柵的原始頻譜圖 43
圖4.9 單模空氣間隙型長週期光纖光柵磁感測器波長飄移圖 44
圖4.10 磁場強度與單模磁感測器共振損失峰波長關係圖 44
圖4.11 單模空氣間隙型長週期光纖光柵實驗前後頻譜圖 45
圖4.12 多模空氣間隙型長週期光纖光柵的原始頻譜圖 46
圖4.13 多模空氣間隙型長週期光纖光柵磁感測器波長飄移圖 47
圖4.14 磁場強度與多模磁感測器共振損失峰波長關係圖 47


表目錄
表2.1 反射型光纖光柵之折射率型態與反射光頻譜表 9
表3.1 矽晶圓清洗流程 24
表4.1 電磁鐵電流大小與磁場強度轉換對應表 42
表4.2 單模AG-LPG與多模AG-LPG比較表 52

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