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研究生:李侑璁
研究生(外文):Yu-TsungLi
論文名稱:可調頻之微機電氮化鋁/鑽石射頻共振器之設計與模擬
論文名稱(外文):Design and Simulations of Frequency Tunable AlN-Diamond RF MEMS Resonators
指導教授:曾永華曾永華引用關係
指導教授(外文):Yung-Hua Tzeng
學位類別:碩士
校院名稱:國立成功大學
系所名稱:微電子工程研究所碩博士班
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2012
畢業學年度:100
語文別:中文
論文頁數:152
中文關鍵詞:共振器可調鑽石壓電材料
外文關鍵詞:resonatorstunablediamondpiezoelectric materials
相關次數:
  • 被引用被引用:0
  • 點閱點閱:166
  • 評分評分:
  • 下載下載:24
  • 收藏至我的研究室書目清單書目收藏:0
本研究是利用鑽石結構高聲波波速以及具有高品質因素的特性,並設
計鑽石和壓電材料(Piezoelectric Material)的複合結構,分別以不同的壓電材料氮化鋁(AlN)和氧化鋅(ZnO)做分析以及比較。首先先設計文獻上的結構確認此分析方式的可行性,之後分別設計由450MHz 以及1.5GHz 以上中心頻率的共振器並且使用兩種不同的壓電材料作比較分析,接著改變設計的尺寸大小結構,共振驅動方式來作好壞的
評估,最後利用壓電材料施加額外直流偏壓會造成介電常數改變的特性以及週期性的結構來設計出可調頻共振器,並且分析了可調頻共振器的可調頻率範圍。
In this research, I use the characteristics of diamond structure which is with high velocity to design the structure of hybrid diamond-piezoelectric material. In addition, I make the comparison of different piezoelectric materials, ZnO and AlN. First, I design a structure witch is the same as the reference structure in order to make sure of the feasibility of my simulation method. After this, design the resonance frequency over 450MHz and 1.5GHz and make the analysis and comparison of differenct piezoelectric materials. Then I try to change the dimension of the structrue and the driving method to estimate advantages and disadvantages. Finally, I use periodic structrue and the characteristics of piezoelectric material which changes the dielectric constant when sufferes DC bias through the material to d`esign tunable resonators. Furthermore, I analyze the tunable range of tunable resonators.
目錄
摘要 3
Abstract 4
致謝 5
圖目錄 8
目錄 6
第一章 前言 20
第二章 理論分析 22
2.1 鑽石的特性 22
2.2 氮化鋁的特性 25
2.3 COMSOL Multiphysics 介紹 26
2.4 壓電特性 27
2.5 機械式共振器驅動方式 28
2.6 表面聲波的介紹 30
2.7 交指叉式轉換(IDT)結構介紹 31
2.8 壓電共振器設計理論 32
2.9 聲子晶體介紹 34
第三章 設計與分析討論 35
3.1 以文獻作為設計基礎 35
3.2 壓電層氧化鋅(ZnO)以及氮化鋁(AlN)的比較 38
3.3 對結構大小進行改變並分析 39
3.4 單一驅動多共振器的設計 42
3.5 高共振模態分析 44
3.6 設計頻溝的方式 48
3.7 可調頻共振器的設計 50
第四章 結論 54
第五章 未來展望 55
第六章 參考文獻 58
第七章 參考附錄 61


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