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研究生:林仁義
研究生(外文):Ren-YiLin
論文名稱:兼具電壓式與電流式之微機電電阻式呼吸感測系統單晶片
論文名稱(外文):Design of a Respiration Detection Single Chip by Using Both Voltage- and Current-Mode MEMS Sensors
指導教授:魏嘉玲
指導教授(外文):Chia-Ling Wei
學位類別:碩士
校院名稱:國立成功大學
系所名稱:電機工程學系碩博士班
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2012
畢業學年度:100
語文別:中文
論文頁數:82
中文關鍵詞:微機電系統呼吸感測懸臂樑
外文關鍵詞:respiration detection systemcantileverMEMS
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  • 下載下載:14
  • 收藏至我的研究室書目清單書目收藏:0
呼吸訊號是人體重要的生理訊號之一,尤其對於嬰幼兒與老年人。因此本論文實現一個整合感測器與電路的呼吸感測微機電系統,在晶片中實現微尺寸的懸臂樑結構與前端放大和濾波之電路。感測器會因所受的外力及溫度的變化,而產生電阻值的改變,而本系統以兩種方式來將電阻值轉換成電訊號,分別為電流式與電壓式,並設計對應之放大電路,此外,系統中亦包含低頻的低通濾波器,其截止頻率為2.6Hz。
本論文呈現詳細感測器、電路與系統的模擬與量測結果,包含感測器對壓力與溫度變化而產生形變與電阻值變化的模擬,及實際感測器的結構和及溫度的影響、系統對呼吸、流速與溫度的量測結果。比較模擬與量測的結果,則可推導與修正感測器的模型。晶片大小為1.32x2.28mm2,電壓式系統消耗2.87mW,電流式系統消耗10.23mW,另外,此晶片是採用0.35μm2P4M製程以及加上MEMS後製程製作。
Respiration is one of the most important physiological signals of human, especially when taking care of babies and elders. A respiration detection system integrating both sensors and circuits into a single chip has been implemented. This system includes the micro-sized cantilever structure and the sensing circuits that can amplify and filter the sensed signal. When the pressure applied on the cantilever or the temperature changes, the resistance of the sensor changes. Two types of circuits are designed in this work to convert the variation of resistance to either voltage or current signal, which then is amplified. Moreover, a low-pass filter with its cutoff frequency locating at 2.6Hz was designed and implemented into the chip.
Both simulation and measurement results of sensors, sensing circuits, and the overall system are presented in the thesis, including the simulation and measurement of the sensors’ characteristics with respect to the applied pressure and temperature, and the data by measuring respiration, flow speed and different temperatures. By analyzing these data, the accuracy of sensor modeling can be greatly improved, which plays an important role for future design. The voltage-mode system dissipates 2.87 mW and the current-mode system dissipates 10.23 mW. Besides the chip size is 1.32x2.28 mm2 and is fabricated by using 0.35um 2P4M CMOS process and MEMS post-process.
第一章 簡介 1
1.1 研究動機 1
1.2 論文架構 3
第二章 微機電系統與呼吸感測技術介紹 4
2.1 製程簡介 4
2.1.1 微影 4
2.1.2 沉積 5
2.1.3 蝕刻 6
2.1.4 掺雜 7
2.1.5 接合 7
2.2 呼吸感測技術 8
2.2.1 氣流感測 8
2.2.2 運動感測 12
2.2.3 血液化學物質濃度感測 13
2.3 本論文所使用的壓阻式氣流感測器 13
第三章 壓阻式氣流感測器設計 15
3.1 壓阻式氣流感測器原理 15
3.2 壓阻式氣流感測器模擬分析 17
3.2.1 壓阻式氣流感測器壓力分析 18
3.2.2 壓阻式氣流感測器溫度分析 22
第四章 呼吸感測系統電路設計 26
4.1 系統介紹 26
4.2 電壓式 27
4.2.1 電壓式電橋 27
4.2.2 放大電路 28
4.3 電流式 29
4.3.1 電流式電橋 29
4.3.2放大電路 30
4.4 低通濾波器 31
4.4.1 反贗波濾波器 32
4.4.2 切換式電容低通濾波器 33
第五章 呼吸感測系統電路模擬 36
5.1 電壓式 36
5.1.1 放大電路 36
5.1.2電壓式前端電路 39
5.2 電流式 41
5.2.1 電流式電橋 41
5.2.2 放大電路 41
5.2.3 電流式前端電路 43
5.3 低通濾波器 44
5.3.1 主動電路 44
5.3.2 反贗波濾波器 46
5.3.3 切換式電容低通濾波器 48
5.4 系統規格 50
第六章 量測結果 53
6.1 電路功能 53
6.1.1 電壓式放大電路 53
6.1.2 低通濾波器 54
6.2 壓阻式氣流感測器 57
6.2.1 感測器結構 57
6.2.2 感測器電阻的溫度效應 62
6.2.3 感測器電阻的偏壓影響 64
6.3 呼吸感測系統 66
6.3.1電壓式系統氣流感測 66
6.3.2電流式系統氣流感測 71
6.3.3 溫度量測 73
6.3.4 流速量測 74
6.3.5 量測結果 74
第七章 結論與未來展望 77
7.1 總結 77
7.2 未來規劃 78
參考文獻 79

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