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論文名稱(外文):A study on the fabrication of porous aluminum oxide template at room temperature using hybrid pulse anodization
指導教授(外文):Chen-Kuei Chung
外文關鍵詞:nanostructureanodic aluminum oxidehybrid pulse anodization
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本研究所推廣之複合式脈衝陽極氧化(hybrid pulse anodization, HPA)技術的目的為抑制過多焦耳熱(Joule’s heat)的產生,並在相對較高的製程溫度中製備奈米多孔性陽極氧化鋁(anodic aluminum oxide, AAO)模板。本文以鋁薄片(aluminum foil)為主進行HPA技術,氧化鋁在經過電場輔助的陽極氧化製程後,可以形成更厚的氧化鋁層,並且產生規則排列的孔洞結構,其孔洞通道有極佳的垂直性。因此本實驗即選擇在草酸電解液中,針對各種陽極氧化條件,如電解液濃度、電解液溫度、施加正電位和脈衝週期,製備孔洞間距100 nm為主的AAO模板後,以場發射掃描式電子顯微鏡(FE-SEM)觀察AAO孔洞形貌,並使用ImageJ和WSxM等軟體去分析AAO孔洞表面形貌的SEM影像,加以探討當改變製程參數會有何影響並且量化之。
本研究成功將HPA技術結合傳統定電位(potentiostatic)陽極氧化技術在室溫(25 °C)下以較短的時間內製備出高規則排列之AAO模板,最後,嘗試以AAO模板為模具,以電化學中陰極還原的方法,並藉此沉積出不同深寬比之銅奈米結構陣列。

The purpose of this thesis is to fabricate highly ordered anodic aluminum oxide (AAO) template in oxalic acid at room temperature (25 °C) by hybrid pulse anodization (HPA) technique. In this work, we expect HPA technique could suppress Joule’s heat generation effectively for replacing cooling equipment during electrochemical reaction. After anodization with uniform electric-field strength, surface of aluminum foil was transforming into thick oxide layer and producing ordered pore array, and hence, each pore has good vertical channel. The effects of various anodizing factors on structural characteristics of AAO template were discussed in details, including applied positive potential, electrolyte concentration, electrolyte temperature and pulse periods. In order to quantify these influences mentioned before, the morphology of AAO template was measured by filed-emission scanning electron microscope. Thus, the structure were analyzed by image process software (ImageJ and WSxM 5.0).
Hence, we demonstrate that HPA combined with conventional potentiostatic process could fabricate high quality of AAO template at room temperature than HPA technique only. Finally, we try to form different aspect ratio of copper nanostructure by electrochemical deposition.

摘要 I
Abstract II
誌謝 III
目錄 IV
表目錄 VII
圖目錄 VIII
第一章 緒論 1
1-1 前言 1
1-2 研究動機 4
1-3 本文架構 6
第二章 文獻回顧 7
2-1 鋁之陽極氧化 7
2-1-1 多孔型陽極氧化鋁結構 7
2-1-2 孔洞自組裝機制 9
2-1-3 陽極氧化之化學反應 11
2-2 陽極氧化參數 14
2-2-1 陽極電位 14
2-2-2 電解液溫度 15
2-2-3 電解液種類和濃度 16
2-3 陽極處理製程 19
2-3-1 兩階段陽極氧化 19
2-3-2 預圖案化陽極氧化 20
2-3-3 高電位陽極氧化 21
2-3-4 脈衝陽極氧化 23
2-3-5 複合式脈衝陽極氧化 23
2-4 氧化鋁模板輔助成長 25
第三章 實驗方法 27
3-1 實驗流程 28
3-2 實驗設備 30
3-3 實驗原料 33
3-4 實驗步驟 35
3-4-1 陽極氧化步驟 35
3-4-2 電化學沉積步驟 36
3-5 觀測與分析方法 39
第四章 結果與討論 41
4-1 電化學拋光結果 41
4-2 複合式脈衝製程參數對結構的影響 43
4-2-1 電解液濃度 43
4-2-2 電解液溫度 49
4-2-3 陽極施加電位 57
4-2-4 脈衝週期 66
4-3 複合式兩階段陽極氧化製程 73
4-4 電化學沉積銅奈米結構 78
第五章 結論與未來工作 81
5-1 結論 81
5-2 未來工作 83
參考文獻 84
自述 91

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