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研究生:趙文祺
研究生(外文):Wen-QiZhao
論文名稱:二極體雷射投影式鑽孔法之光罩方向性及鑽孔形狀研究
論文名稱(外文):Study of the mask orientation and drilling-hole shaping in diode laser drilling with the projection method
指導教授:林震銘
指導教授(外文):Jehn-Ming Lin
學位類別:碩士
校院名稱:國立成功大學
系所名稱:機械工程學系碩博士班
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2012
畢業學年度:100
語文別:中文
論文頁數:102
中文關鍵詞:二極體雷射光罩方向性鑽孔形貌
外文關鍵詞:diode lasermask orientationdrilling-hole shaping
相關次數:
  • 被引用被引用:0
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  • 下載下載:0
  • 收藏至我的研究室書目清單書目收藏:1
本研究探討700×700μm方形光罩與700×500μm矩形光罩及光圈大小在二極體藍光雷射(波長447nm)下,對基材進行光罩方向性投影微鑽孔加工之孔形形貌變化。
模擬部分,利用傅立葉繞射理論經MATLAB數值分析,模擬雷射加工之光束輪廓形貌;另使用FLUENT軟體之VOF方法計算雷射加工基材時,熔池之流體變化情形。
實驗部分,由偏光鏡測得雷射為線偏極性,利用雷射偏極性進行光罩方向性之光束輪廓探討,當方形光罩角度從0°轉為45°時,感測器接受到橢圓光束長軸透過光罩範圍變廣,在長軸x方向之光束輪廓從上下跳動轉為不規則起伏現象且隨功率有增加趨勢、在矩形光罩角度從0°轉為90°時,感測器接受到光束長軸透過光罩範圍變窄,在x方向光束輪廓孔徑則由M字形轉變為高斯現象且功率有減少趨勢。在透鏡組鑽孔實驗,使用方形光罩、矩形光罩下所得孔形為橢圓形;矩形光罩轉90°下所得孔形為圓形;在固定光罩下隨著光圈大小增加,孔形形貌之孔寬、孔深有增加的趨勢。

The aim of this study is to analyze the hole-shaping in diode laser (447nm) drilling with the projection method, and the effects of the mask with 700×700μm and 700×500μm at various orientations and square aperture sizes.

In the numerical analysis, the MATLAB computation program based on the Fourier diffraction theory was developed to analyze the intensity profile on the image plane at various optical parameters. Another approach of the flow field of melting pool on the substrate was simulated by the VOF method of FLUENT with laser heating.

In the experiment, the line polarization of the diode laser was verified by the polarizer, and then the beam profiles were measured with mask orientation from 0° to 90°. The results show that the beam profiles and the power were affected by the mask orientation. In the drilling experiment with the lens system, it can be found that the diffraction distortion at the beam profiles on the image plane and hole-shaping was significantly affected by the aperture size and mask orientation.

摘要 I
Abstract II
誌謝 III
目錄 IV
表目錄 VIII
圖目錄 X
符號說明 XV
第一章 緒論 1
1-1研究背景與動機 1
1-2研究目的 2
1-3文獻回顧 2
1-3.1光罩直接投影加工法 2
1-3.2 雷射偏極性對於加工上之影響 7
1-3.3 孔徑邊緣隆起效應 11
1-4 本文架構 13
第二章 製程原理 14
2-1 二極體光束理論 14
2-2 光波繞射理論 16
2-2.1 矩形光孔之Fraunhofer 繞射理論 16
2-2.2 廣義系統繞射成像理論 18
2-3 光的偏極性 20
2-4 雷射偏極性種類 22
2-5 雷射表面熱效應相關理論 23
2-5.1 表面張力 23
2-5.2 相變化理論 27
2-6 FLUENT軟體 28
第三章 數值分析及計算結果 30
3-1本文數值分析與文獻數值模擬之對照 31
3-2本文數值模擬參數說明 35
3-3數值模擬計算流程 36
3-4入射高斯橢圓雷射光束量形態模擬結果 38
3-4.1橢圓高斯光束透過方形光罩700×700μm 模擬結果 39
3-4.2橢圓高斯光束透過矩形光罩模擬結果 42
3-4.2.1矩形光罩700×500μm 42
3-4.2.2矩形光罩700×500μm 轉90° 44
3-5雷射加工聚苯乙烯時之流場分析 47
3-5.1物理模型與假設 47
3-5.2聚苯乙烯之物理性質 48
3-5.3自由表面模型之計算 49
3-5.3.1雷射加工基材之幾何範圍 49
3-5.3.2雷射加工固定基材的網格建立及邊界條件 50
3-5.3.3自由表面模擬結果 51
3-6 結果與討論 58
第四章 實驗 60
4-1光束輪廓特徵實驗 61
4.1.1主要設備 61
4-1.2加工參數 63
4-1.3結果與討論 63
4-1.3.1二極體雷射線偏極性實驗結果 63
4-1.3.2方形光罩700×700μm 轉0°實驗結果 65
4-1.3.3方形光罩700×700μm 轉45°實驗結果 66
4-1.3.4矩形光罩700×500μm 轉0°實驗結果 69
4-1.3.5矩形光罩700×500μm 轉45°實驗結果 69
4-1.3.6矩形光罩700×500μm 轉90°實驗結果 70
4-1.3.7二極體雷射功率量測結果 74
4-2透鏡組鑽孔實驗 75
4-2.1實驗配置 75
4-2.2實驗結果與討論 76
4-2.2.1微鑽孔加工參數與孔形貌定義 76
4-2.2.2方形光罩700×700μm 實驗結果 78
4-2.2.3矩形光罩700×500μm 轉0°實驗結果 81
4-2.2.4矩形光罩700×500μm 轉90°實驗結果 85
4-2.2.5不同光罩方向性在加工焦點處之光束輪廓量測 88
4-3結果與討論 91
第五章 綜合討論與建議 93
5-1綜合討論 93
5-2未來發展與建議 97
參考文獻 98
附錄A 二極體雷射原始光斑大小 102

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