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研究生:汪澤仁
研究生(外文):Tse-JenWang
論文名稱:利用奈米壓印微影法製作週期性奈米楔型結構對液晶配向影響之研究
論文名稱(外文):Study of liquid crystal alignment based on periodic nano-wedgy structures via nano-imprint lithography
指導教授:林俊宏林俊宏引用關係
指導教授(外文):Chun-Hung Lin
學位類別:碩士
校院名稱:國立成功大學
系所名稱:光電科學與工程學系
學門:工程學門
學類:電資工程學類
論文種類:學術論文
論文出版年:2012
畢業學年度:100
語文別:中文
論文頁數:75
中文關鍵詞:奈米壓印液晶配向聚二甲基矽氧烷
外文關鍵詞:Nanoimprint lithographyLiquid crystalsPoly(dimethylsiloxane)
相關次數:
  • 被引用被引用:1
  • 點閱點閱:154
  • 評分評分:
  • 下載下載:11
  • 收藏至我的研究室書目清單書目收藏:0
奈米壓印微影技術具有低成本高產量的優點,被認為具有潛力的下一代配向技術。過去利用奈米壓印配向技術製作週期性溝槽的方式並沒有辦法給予一定方向的預傾角而容易產生配向缺陷,本研究利用奈米壓印技術製作出週期性奈米楔形結構,企圖使用楔形結構的斜坡給予液晶分子在驅動電壓後能往同一個方向轉動。我們利用電子束微影製作週期為1 μm的週期性楔形結構,使用奈米壓印技術將圖案翻印到塗佈SU8光阻的ITO玻璃基板上。本論文中使用不同的PDMS(Poly(dimethylsiloxane))製程方法測試配向效果,最後採用monoglycidyl ether-terminated PDMS當做垂直配向層。本實驗探討週期性楔形結構在工作電壓下液晶分子重新排列的現象,藉由週期性矩形溝槽的液晶盒當做對照,論證週期性楔形結構能比週期性矩形溝槽能有更好的配向效果,避免配向缺陷產生。
In this study, we used the nanoimprint lithography (NIL) to fabricate the periodic nano-wedges groove for vertical alignment. The incline slope from nano-wedges can control LC raising-up direction on applied voltage. The periodic triangle structure was made on silicon wafer by Electron beam lithography, then we chose perfluoropolyether(PFPE) as a mold to replicate the periodic triangle structure on silicon master. A photoresist material of SU-8 used as an imprint material was coated on the ITO glass, and Poly(dimethylsiloxane) (PDMS) used as an vertical alignment layer by an external hydrophobic property. For the contrast, we also fabricated the periodic nano-rectangular groove with 1μm pitch to assemble VA LC cell by some processes. It demonstrated that the LC cell of periodic nano-wedges structure has better optical symmetry than the periodic nano-rectangular groove and prevent reverse-twist domains.
中文摘要 I
Abstract II
致謝 III
目錄 IV
圖目錄 VII
Chapter 1 緒論 1
1.1 前言 1
1.2 論文架構 2
Chapter 2 液晶的物理特性與相關知識 3
2.1 液晶簡介 3
2.1.1 液晶的歷史[1] 3
2.1.2 液晶的分類[1, 2] 3
2.2 液晶的物理特性 7
2.2.1 液晶分子排列的秩序參數(S) [3] 7
2.2.2 液晶的彈性連續體理論[1] 7
2.2.3 液晶的雙折射性質[1] 9
2.2.4 電場效應[1] 12
Chapter 3 液晶的配向理論 13
3.1 配向簡介 13
3.2 配向機制 13
3.2.1 液晶分子的定向處理[1] 13
3.2.2 配向的錯向線[5] 14
3.2.3 摩擦配向[5] 16
3.2.4 溝槽理論 18
3.3 非接觸式配向技術 19
3.3.1 斜向蒸鍍法[1] 19
3.3.2 光配向法[5] 19
3.3.3 表面圖案化 22
3.4 多域分割垂直配向液晶顯示器 25
Chapter 4 PDMS配向膜特性 29
4.1 PDMS 特性 29
4.2 PDMS製備與接觸角量測 30
4.2.1 PDMS製備 30
4.2.2 接觸角與表面能[24] 32
4.3 PDMS oligomers 34
4.3.1 利用微接觸印刷轉移PDMS oligomers[26-28] 34
4.3.2 PDMS oligomers的製程方法 35
4.4 液晶樣品盒的製程方法 35
4.4.1 基板清洗 35
4.4.2 液晶盒製備 36
4.5 結果與討論 37
Chapter 5 週期性奈米結構的垂直配向液晶顯示器 46
5.1 研究動機 46
5.2 奈米壓印技術 47
5.2.1 文獻回顧 47
5.2.2 機台介紹 48
5.2.3 實驗母膜與軟膜製備 48
5.2.4 熱壓式奈米壓印 50
5.3 光電量測方法與架構 56
5.3.1 光電量測系統 56
5.4 週期性矩形溝槽結構 57
5.4.1 製程方式 57
5.4.2 結果與討論 58
5.5 週期性楔形溝槽結構 64
5.5.1 製程方式 64
5.5.2 結果與討論 65
Chapter 6 實驗總結與未來展望 71
6.1 實驗總結 71
6.2 未來展望 72
參考文獻 73

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