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研究生:葉守圃
研究生(外文):Shou-PuYeh
論文名稱:氮摻雜奈米鑽石及其應用於生醫相容的電阻式加熱器
論文名稱(外文):Conductive nitrogen doped nanodiamond and its applications to biocompatible resistive heaters
指導教授:曾永華曾永華引用關係
指導教授(外文):Yon-Hua Tzeng
學位類別:碩士
校院名稱:國立成功大學
系所名稱:奈米科技暨微系統工程研究所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2012
畢業學年度:100
語文別:中文
論文頁數:81
中文關鍵詞:氮摻雜鑽石奈米鑽石超級奈米鑽石電阻加熱器
外文關鍵詞:NDDNCDUNCDResistive heater.
相關次數:
  • 被引用被引用:1
  • 點閱點閱:234
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  • 下載下載:23
  • 收藏至我的研究室書目清單書目收藏:0
黃光微影後的導電氮摻雜奈米鑽石(Nitrogen doped diamond, NDD)包夾在兩層絕緣的奈米鑽石(Nanocrystalline diamond, NCD)可作為一個全碳的電阻式加熱器。鑽石有生物相容性,化學惰性,低磨損率和硬度高等特性,這有助於這一類全碳的電阻式加熱器在高度嚴苛的環境下操作,比如在腐蝕性化學品中,和電外科手術的應用上。
微波電漿增強化學氣相沉積法(Microwave plasma enhanced chemical vapor deposition, MPECVD)在Ar/CH4/N2和Ar/CH4氣體混合下,分別合成的氮摻雜奈米鑽石和奈米鑽石。氮摻雜奈米鑽石和奈米鑽石皆有高密度的鑽石成核點以成長為一片連續的薄膜。經由黃光微影之後的氮摻雜奈米鑽石薄膜可讓電流流經微影後的路徑,隨後氮摻雜奈米鑽石被奈米鑽石包覆著,形成全碳的電阻式加熱器。
應用拉曼散射、掃描電子顯微鏡、電子能譜儀、四點探針、原子力顯微鏡及高解析透射電子顯微鏡用來分析氮摻雜奈米鑽石和奈米鑽石的特性。另外紅外線溫度計應用於測繪整個鑽石加熱器的溫度分佈。

Patterned electrically conductive nitrogen doped nanocrystalline diamond (NDD) sandwiched between two insulating intrinsic nanocrystalline diamond (NCD) films severs as an all-carbon resistive heater. Biocompatibility, chemical inertness, low wear rate and high hardness of diamond help make this class of heaters useful for highly demanding applications such as heaters in corrosive chemicals and electrosurgical tools for medical practice.
NDD and NCD are synthesized by microwave plasma enhanced chemical vapor deposition (MPECVD) in Ar/CH4/N2 and Ar/CH4 gas mixtures, respectively. NDD and NCD serve as high-density diamond nuclei for the growth of NCD and NDD over layers. By patterning the shape of the NDD film for allowing an electrical current to flow through, NDD resistive heater is fabricated and subsequently encapsulated by a NCD over layer.
Raman scattering, scanning electron microscope, and high-resolution transmission electron microscope are applied to characterize NDD and NCD grown on each other. Infra-red thermometer is applied to map the temperature profile across the diamond heater and confirm satisfactory operation.

中文摘要 I
ABSTRACT II
誌謝 III
目錄 IV
表目錄 VII
圖目錄 VIII
第一章 緒論 1
1.1前言 1
1-2 鑽石介紹 2
1-2-1鑽石簡介 2
1-2-2鑽石特性 4
第二章 文獻回顧與理論基礎 7
2-1 CVD原理 7
2-1-1 CVD機台介紹 8
2-2 CVD鑽石介紹 10
2-2-1 鑽石薄膜介紹 10
2-2-2前處理介紹 13
2-2-3 製程氣體與成長機制 17
2-2-4 鑽石摻雜介紹 20
2-3 氮摻雜鑽石 21
2-3-1 表面形貌 21
2-3-2 導電性 22
2-4 摻雜鑽石的應用 26
2-4-1 醫療器材 26
第三章 實驗流程與實驗儀器介紹 29
3-1實驗流程 29
3-2 鑽石薄膜製程 31
3-2-1基板選擇與清洗(CLEAN) 31
3-2-2 種晶(SEEDING) 31
3-2-3 微波電漿化學氣相沉積 32
3-2-4 氮摻雜鑽石薄膜沉積 38
3-3鑽石薄膜分析 39
3-3-1 掃描式電子顯微鏡(SCANNING ELECTRON MICROSCOPE, SEM) 39
3-3-2 拉曼光譜分析(RAMAN SPECTROSCOPY) 40
3-3-3原子力顯微鏡(ATOMIC FORCE MICROSCOPE, AFM) 45
3-3-4四點探針(FOUR PROBE MEASUREMENT) 46
3-3-5 電子能譜儀 (X-RAY PHOTOELECTRON SPECTROMETER, XPS 或名ELECTRON SPECTROMETER FOR CHEMICAL ANALYSIS, ESCA) 48
3-3-6 穿透式電子顯微鏡(TRANSMISSION ELECTRON MICROSCOPY TEM ) 49
第四章 結果與討論 50
4-1 氮摻雜雜鑽石薄膜 50
4-1-1 甲烷比例 50
4-1-2 沉積時間與成核關係 55
4-1-3 改變氮氣比例 58
4-1-4 20 %氮摻雜鑽石薄膜經過氫電漿和425 ℃空氣中氧化處理 61
4-1-5 電阻式加熱器 65
4-1-6 XPS 與AES分析 73
第五章 結論與未來展望 76
5-1結論 76
5-2 未來展望 76
參考文獻 77

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