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研究生:謝鎮宇
研究生(外文):Jen-Yu Shieh
論文名稱:利用原子力顯微術實現快速原型
論文名稱(外文):Rapid Prototype Utilizing Rapid Prototype Utilizing
指導教授:洪紹剛
指導教授(外文):Shao- Kang Hung
學位類別:碩士
校院名稱:國立交通大學
系所名稱:機械工程學系
學門:工程學門
學類:機械工程學類
論文種類:學術論文
論文出版年:2012
畢業學年度:100
語文別:中文
論文頁數:51
中文關鍵詞:快速原型原子力顯微術沾筆式奈米微影印刷術
外文關鍵詞:Rapid PrototypingAtomic Force MicroscopyDip-Pen Nanolithography
相關次數:
  • 被引用被引用:1
  • 點閱點閱:285
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  • 下載下載:12
  • 收藏至我的研究室書目清單書目收藏:0
本論文研究目標是利用原子力顯微鏡(Atomic Force Microscopy, AFM)之探針原理,以及紫外線光硬化膠與三軸壓電平台設計一小型的點針式快速原型系統;由於AFM之尺度小,解析度高,利用其針尖控制點膠,預計可以製作出微奈米尺度的元件。此外,由於光硬化膠的特性,可以快速的做出理想的元件。
為了控制並完成微快速原型系統,本研究使用Labview虛擬儀控軟體進行自動操作,成功完成單層的點陣圖像,並以幾種不同之控制變因瞭解膠點的大小高度之控制法則,經實驗後可知本系統可點出約半徑1μm至2μm的圓形至橢圓形膠點,並可利用參數控制沾點膠量多寡達成控制高度改變的目標。 

This research’s object is used the principle of Atomic Force Microscope (AFM) probe, UV resins and a 3-axis piezoelectric stage to design the micro-size Rapid Prototyping (RP) system. Because of the AFM's high resolution and minimum size, we can use its tip to get the UV resins. By the UV properties of resins, we can make the nano-size particles possible.
To control and achieve the micro-RP system, this research using the Labview control software to auto-control, and building the particle successfully. By changing different control variables, this research tries to find the resins points’ size and height controlled rules. After experiments, the micro-RP system can build the UV resins point with radius 1~2μm, what can change the points height and achieve this object.

摘要 I
Abstract II
誌謝 III
目錄 IV
圖目錄 VI
一、 緒論 1
1.1研究背景 1
1.2研究動機 1
1.4研究目標 2
二、 預備知識 3
2.1快速原型原理 3
2.2 原子力顯微鏡原理 8
2.2.1各式AFM分類 8
2.2.2 輕拍式之Akiyama探針原理: 10
2.3 沾筆式奈米微影印刷術 12
三、 系統設計 14
3.1系統架構 14
3.1.1沾膠與點膠控制 16
3.1.2 Z軸漸進式感測系統(Z-axis Safety Approach) 17
3.1.3 方形路徑移動沾膠程式 19
3.1.4 自動掃頻系統 19
3.1.5 系統整合人機介面 20
3.2機構設計 21
3.2.1 架構整合 21
3.2.2 各部硬體架構 24
四、 實驗 31
4.1實驗方法 31
4.1.1機電整合架構 31
4.1.2膠液選擇 32
4.2 各項實驗 33
4.2.1探針最大共振振幅與頻率 33
4.2.2 Akiyama探針力圖實驗 34
4.2.2 Z-axis safety approach測試 34
4.2.3膠點5×5點圖實驗 36
4.2.4 AFM截面掃圖研究 38
4.2.5下降穩定度實驗 40
4.2.6單排點圖高度研究 44
五、 結論與展望 48
參考文獻 50
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