一般的超音波清洗機通常以固定頻率之驅動器來驅動振動子（或換能器），不僅洗淨能力有限且花費較多的清洗時間。為解決前述問題，本論文設計出一種頻率可調式超音波訊號產生器，可將一交流電訊號經由控制單元調整其頻率，以產生一個間歇式高頻震盪驅動訊號，使受驅動的振動子具有更高的洗淨效果。系統所使用的超音波振動子係利用壓電材料之特性，並利用超音波於水中產生空穴效應，達到清洗的功能。此外為增加洗淨能力，通常超音波振動子須透過並聯方式以增加輸出功率，然而各個振動子的阻抗並非完全相同，因而使得個別的諧振頻率呈現差異。由實例測試結果顯示，利用本論文所研製之可調式超音波振動子驅動電路，不但可以以變頻驅動方式來驅動超音波振動子，且能解決振動子並聯諧振頻率之差異問題，達到省能、省時效果及增進超音波清洗機之洗淨能力。

The transducer (or oscillator) of a general ultrasonic cleaner is often driven by a driver with fixed frequency that its ability of clearance is limited and the required clean time is much long. To solve previous problems, the thesis designs a frequency-adjustable ultrasonic signal generator. Thus, an intermittent high-frequency driving signal can be produced once the frequency is adjusted by a control unit with an alternative-current input signal, and the driven oscillator can reach a better clean effect. The transducer of this system utilizes the property of piezoelectric material and the cavitations phenomenon produced by ultrasonic waves in water to achieve the clean function. Nevertheless, in order to increase the clean-up ability, parallel operation of transducers is usually employed to increase the output power. However, the impedance of individual transducer is not always the same, which makes a little difference between resonant frequencies. A practical test result shows that not only the transducer can be driven by a frequency-alternative approach but the problem of difference between resonant frequencies for parallel operation of transducers can also be solved with the developed transducer driving circuit in this thesis. Therefore, the effect of energy saving, time saving, and clean-ability for an ultrasonic clean machine is achieved and increased.

目錄
中文摘要 i
英文摘要 ii
謝誌 iii
目錄 iv
圖目錄 vi
表目錄 viii

第一章 前言 1
1.1研究背景與動機 1
1.2論文架構 3
第二章 文獻探討 4
2.1超音波洗淨機之原理 4
2.2物件表面清洗之應用（內容） 6
第三章 系統設計 9
3.1超音波振動子特性 9
3.2可調式超音波訊號產生器之系統架構 11
第四章 實驗結果與討論 17
4.1驅動器系統測試 17
4.2訊號產生系統之測試 28
第五章 結論與未來研究方向 36
5.1結論 36
5.2未來研究方向 36
參考文獻 37


圖目錄
圖2.1 超音波振動子1200W 7
圖2.2 有機溶劑之超音波洗淨機 8
圖3.1 (a)超音波振動子之等效電路圖 10
圖3.1 (b)超音波振動子之阻抗特性 10
圖3.2 兩組超音波振動子之阻抗特性示意圖 11
圖3.3 超音波振動子驅動系統方塊圖 12
圖3.4 超音波振動子之阻抗特性示意圖 13
圖3.5 IC板線路圖 15
圖3.6 系統製作成品圖 16
圖3.7 振動子排列圖 16
圖4.1 超音波振動子之並聯實體圖 18
圖4.2 超音波振動子阻抗分析圖 19
圖4.3 電路板實體圖 19
圖4.4 諧振電感Ls與變壓器電路實體圖 20
圖4.5 (a) 操作頻率為27.5kHz 21
圖4.5 (b) 操作頻率為28.0kHz 21
圖4.5 (c) 操作頻率為28.5kHz 21
圖4.6 電路波形圖-市電電壓vgrid與直流電壓vdc 22
圖4.7 (a) vQ、ip、vXT1與vC2 (5ms/div)之電路波形圖 23
圖4.7(b) vQ、ip、vXT1與vC2 (0.01ms/div)之電路波形圖 23
圖4.8 (a) vdc、idc、ip與vXT1 (5ms/div)之電路波形圖 24
圖4.8(b) vdc、idc、ip與vXT1 (0.01ms/div)之電路波形圖 24
圖4.9 (a) vXT1、ip、vXT2與iPCT (5ms/div)之電路波形圖 25
圖4.9 (b) vXT1、ip、vXT2與iPCT (0.01ms/div)之電路波形圖 25
圖4.10 電路電容vC2電壓波形之快速傅立葉轉換量測結果 27
圖4.11 電路成品測試 31
圖4.12 交流電輸入訊號電壓波形(試棒10:1) 31
圖4.13 整流電壓波形(試棒10:1) 32
圖4.14 (a) 電晶體BE腳於時間點t1訊號電壓波形1(25.8kHz) 32
圖4.14 (b) 電晶體BE腳於時間點t2訊號電壓波形(26.0kHz) 33
圖4.14 (c) 電晶體BE腳於時間點t3訊號電壓波形(26.9kHz) 33
圖4.14 (d) 電晶體BE腳於時間點t4訊號電壓波形(27.2kHz) 34
圖4.14 (e) 電晶體BE腳於時間點t5訊號電壓波形(27.8kHz) 34
圖4.14 (f) 電晶體BE腳於時間點t6訊號電壓波形(28.7kHz) 35
圖4.15 頻率可調式超音波清洗器 35

表目錄
表4.1 電路參數表 17

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