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研究生:曾柏源
研究生(外文):Tseng, Po-Yuan
論文名稱:模仁材料與圖案對超音波奈米轉印技術之影響
論文名稱(外文):Impacts of Mold Material and Pattern Size for Ultrasonic Nanoimprint Lithography
指導教授:陳榮順陳榮順引用關係林建宏林建宏引用關係
指導教授(外文):Chen, RongshunLin, Chien-Hung
學位類別:碩士
校院名稱:國立清華大學
系所名稱:奈米工程與微系統研究所
學門:工程學門
學類:材料工程學類
論文種類:學術論文
論文出版年:2012
畢業學年度:100
語文別:中文
論文頁數:72
中文關鍵詞:奈米轉印超音波模仁電鑄
相關次數:
  • 被引用被引用:0
  • 點閱點閱:284
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  • 下載下載:12
  • 收藏至我的研究室書目清單書目收藏:0
本研究設計以及製造不同材料與圖案的模仁,包含微米矽模仁、次微米矽模仁以及微米鎳模仁,並成功的開發其超音波奈米轉印微影技術。研究結果顯示在室溫下能將不同材料、不同線寬等級的模仁圖案轉印至PET基板上。超音波奈米轉印微影技術主要是利用超音波產生振動使模仁與聚合物產生摩擦並提升溫度至聚合物的玻璃轉換溫度之上,再利用壓力使模仁壓入因高溫軟化的聚合物內。研究中以填滿率作為評量轉印效果品質的性能指標,並利用田口品質方法求得不同形式模仁之最佳化製程參數,最後探討模仁材料以及圖案對超音波奈米轉印微影技術的影響。
摘要 I
致謝 II
目錄 III
圖目錄 VI
表目錄 IX
第一章 緒論 1
1.1 前言 1
1.2 研究背景與動機 3
1.3 文獻回顧 7
1.3.1 奈米轉印微影技術 7
1.3.2 超音波奈米轉印微影技術 10
1.4 論文架構 14
第二章 超音波奈米轉印微影技術 15
2.1 超音波奈米轉印系統 15
2.2 超音波奈米轉印流程 17
2.3 矽模仁製作 18
2.3.1 微米矽模仁製程 19
2.3.2 次微米矽模仁製程 21
2.4 鎳模仁製作 23
2.4.1 電鑄原理 23
2.4.2 微米鎳模仁製程 28
2.5 田口品質工程方法 32
2.5.1 目標函數 32
2.5.2 因子水準的建立 35
2.5.3 直交表與S/N比 37
2.5.4 回應表 39
2.5.5 變異數分析 40
2.6 轉印材料 41
第三章 實驗結果與討論 42
3.1 模仁製作成果 42
3.1.1 微米矽模仁 42
3.1.2 次微米矽模仁 45
3.1.3 微米鎳模仁 48
3.2 表面抗沾黏處理 51
3.3 轉印實驗結果 52
3.3.1 微米矽模仁轉印實驗結果 52
3.3.2 次微米矽模仁轉印實驗結果 55
3.3.3 微米鎳模仁轉印實驗結果 57
3.3.4 最佳化水準 60
3.4 模仁材料與圖案對轉印之影響 64
第四章 結論及未來工作 67
4.1 結論 67
4.2 未來工作 68
參考文獻 69
[1] S. Y. Chou, P. R. Krauss, and P. J. Renstrom, "Imprint of sub-25 nm vias and trenches in polymers," Applied Physics Letters, vol. 67, pp. 3114-3116, 1995.
[2] J. Haisma, M. Verheijen, K. Heuvel, and J. Berg, "Mold-assisted nanolithography: A process for reliable pattern replication," Journal of Vacuum Science &; Technology B: Microelectronics and Nanometer Structures, vol. 14, pp. 4124-4128, 1996.
[3] Y. Xia and G. M. Whitesides, "Soft lithography," Annual Review of Materials Science, vol. 28, pp. 153-184, 1998.
[4] S. Y. Chou, P. R. Krauss, and P. J. Renstrom, "Nanoimprint lithography," Journal of Vacuum Science &; Technology B: Microelectronics and Nanometer Structures, vol. 14, pp. 4129-4133, 1996.
[5] H. Tan, A. Gilbertson, and S. Y. Chou, "Roller nanoimprint lithography," Journal of Vacuum Science &; Technology B: Microelectronics and Nanometer Structures, vol. 16, pp. 3926-3928, 1998.
[6] H. C. Scheer, H. Schulz, T. Hoffmann, and C. M. Sotomayor Torres, "Problems of the nanoimprinting technique for nanometer scale pattern definition," Journal of Vacuum Science &; Technology B: Microelectronics and Nanometer Structures, vol. 16, pp. 3917-3921, 1998.
[7] M. Colburn, S. Johnson, M. Stewart, S. Damle, T. Bailey, B. Choi, M. Wedlake, T. Michaelson, S. V. Sreenivasan, J. Ekerdt, and C.G. Willson, "Step and Flash Imprint Lithography: A New Approach to High-Resolution Patterning," The 24th International Symposium on Microlithography: Emerging Lithographic Technologies III, Mar. 14-19, 1999, California, USA.
[8] F. Gottschalch, T. Hoffmann, C. M. Sotomayor Torres, H. Schulz, and H. C. Scheer, "Polymer issues in nanoimprinting technique," Solid-State Electronics, vol. 43, pp. 1079-1083, 1999.
[9] B. Heidari, I. Maximov, and L. Montelius, "Nanoimprint lithography at the 6 in. wafer scale," Journal of Vacuum Science &; Technology B: Microelectronics and Nanometer Structures, vol. 18, pp. 3557-3560, 2000.
[10] H. Schulz, H. C. Scheer, T. Hoffmann, C. M. Sotomayor Torres, K. Pfeiffer, G. Bleidiessel, G. Grutzner, C. Cardinaud, F. Gaboriau, M. C. Peignon, J. Ahopelto, and B. Heidari, "New polymer materials for nanoimprinting," Journal of Vacuum Science &; Technology B: Microelectronics and Nanometer Structures, vol. 18, pp. 1861-1865, 2000.
[11] L. Montelius, B. Heidari, M. Graczyk, I. Maximov, E. L. Sarwe, and T. G. I. Ling, "Nanoimprint- and UV-lithography: Mix &; Match process for fabrication of interdigitated nanobiosensors," Microelectronic Engineering, vol. 53, pp. 521-524, 2000.
[12] H. Schulz, F. Osenberg, J. Engemann, and H. C. Scheer, "Mask fabrication by nanoimprint lithography using antisticking layers," The 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, Nov. 15-16, 2000, Munich, Germany.
[13] M. Otto, M. Bender, B. Hadam, B. Spangenberg, and H. Kurz, "Characterization and application of a UV-based imprint technique," Microelectronic Engineering, vol. 57-58, pp. 361-366, 2001.
[14] M. Beck, M. Graczyk, I. Maximov, E. L. Same, T. G. I. Ling, and L. Montelius, "Improving nanoimprint lithography stamps for the 10 nm features," The 1st IEEE Conference on Nanotechnology, Oct. 28-30, 2001, Hawaii, USA.
[15] M. M. Alkaisi, R. J. Blaikie, and S. J. McNab, "Low temperature nanoimprint lithography using silicon nitride molds," Microelectronic Engineering, vol. 57-58, pp. 367-373, 2001.
[16] H. C. Scheer and H. Schulz, "A contribution to the flow behaviour of thin polymer films during hot embossing lithography," Microelectronic Engineering, vol. 56, pp. 311-332, 2001.
[17] M. Li, L. Chen, and S. Y. Chou, "Direct three-dimensional patterning using nanoimprint lithography," Applied Physics Letters, vol. 78, pp. 3322-3324, 2001.
[18] C. Gourgon, C. Perret, J. Tallal, F. Lazzarino, S. Landis, O. Joubert, and R. Pelzer, "Uniformity across 200 mm silicon wafers printed by nanoimprint lithography," Journal of Physics D: Applied Physics, vol. 38, pp. 70-73, 2005.
[19] N. Bogdanski, M. Wissen, S. Mollenbeck, and H. C. Scheer, "Thermal imprint with negligibly low residual layer," Journal of Vacuum Science &; Technology B: Microelectronics and Nanometer Structures, vol. 24, pp. 2998-3001, 2006.
[20] C. H. Lin, R. T. Zheng, and R. Chen, "Ultrasonics for Nanoimprint Lithography," The 3rd International Conference on Nanoimprint Nanoprint Technology, Dec. 1-3, 2004, Vienna, Austria.
[21] C. H. Lin and R. Chen, "Ultrasonic nanoimprint lithography: a new approach to nanopatterning," Journal of Microlithography Microfabrication and Microsystems, vol. 5, pp. 11003-1-11003-6, 2006.
[22] S. J. Liu and Y. T. Dung, "Hot embossing precise structure onto plastic plate by ultrasonic vibration," Polymer Engineering and Science, vol. 45, pp. 915-925, 2005.
[23] H. Mekaru, O. Nakamura, O. Maruyama, R. Maeda, and T. Hattori, "Development of precision transfer technology of atmospheric hot embossing by ultrasonic vibration," Microsystem Technologies, vol. 13, pp. 385-391, 2007.
[24] H. Mekaru, T. Noguchi, H. Goto, and M.Takahashi, "Nanoimprint Lithography Combined with Ultrasonic Vibration on Polycarbonate," Japanese Journal of Applied Physics, vol. 46, pp. 6355-6362, 2007.
[25] H. Mekaru and M. Takahashi, "Ultrasonic Nanoimprint on Poly(ethylene terephthalate) at Room Temperature," Japanese Journal of Applied Physics, vol. 47, No.6, pp. 5178-5184, 2008.
[26] H. Mekaru and M. Takahashi, "Ultrasonic nanoimprint on engineering plastics," Journal of Vacuum Science &; Technology A: Vacuum Surfaces and Films, vol. 27, pp. 785-792, 2009.
[27] H. Mekaru and M. Takahashi, "Frequency and amplitude dependences of molding accuracy in ultrasonic nanoimprint technology," Journal of Micromechanics and Microengineering, vol. 19, pp. 125026-1-125026-11, 2009.
[28] H. Mekaru and M. Takahashi, "Rapid patterning of spin-on-glass using ultrasonic nanoimprint," Journal of Vacuum Science &; Technology B: Microelectronics and Nanometer Structures, vol. 28, pp. C6M114-C6M121, 2010.
[29] H. W. Yu, C. H. Lee, P. G. Jung, B. S. Shin, J. H. Kim, K. Y. Hwang, and J. S. Ko, "Polymer microreplication using ultrasonic vibration energy," Journal of Micro/Nanolithography, MEMS and MOEMS, vol. 8, pp. 021113-1-021113-7, 2009.
[30] 林建宏,"超音波奈米轉印技術,"國立清華大學博士論文,民國九十六年。
[31] 王志祐,"加熱輔助超音波奈米轉印技術,"國立清華大學碩士論文,民國九十九年。
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