臺灣博碩士論文加值系統

在有機發光元件中，大部分的光被波導在玻璃基板及高折射率的有機層或透明電極中，而無法透出元件而為人眼所見。在本論文中，我們利用自組裝奈米小球陣列技術製作奈米孔洞透明金屬電極，取代傳統ITO電極元件，藉由週期性奈米孔洞導引出限制在有機材料的元件放光，以增加元件光萃取效益，相較於一般ITO元件，我們的能量效率增益約70%。另一方面，我們也運用自組裝奈米小球陣列在元件基板上，進一步的導引出限制在元件基板的光，在週期500 nm的陣列中，得到約60%的光增益。

For conventional organic optoelectronic devices, most of the generated photons are trappedin the glass guided mode and the high-index guided mode due to the problem of the index mismatch. In this work, we used the self-assemble nanosphere lithography to fabricate the transparent anode with nano-hole array. By using this patterned anode, the periodical nanostructures not only improved the device electricity, but also coupled out the confined light in the organic layers. Furthermore, we attached the self-assemblenanosphere array on the device substrate to extract the light of glass substrate mode. For the optimized period of 500 nm, we had 60% improvementcompared to the flat substrate.

第一章：緒論.......................................1
1.1.有機發光二極體簡介..............................1
1.1.1.有機發光二極體操作原理........................1
1.1.2.有機發光二極體OLED結構與材料..................4
1.2.有機發光二極體外部量子效率及光萃取簡介............10
1.3.微奈米球自組裝技術簡介..........................17
1.3.1.液滴塗覆法(Drop-coating).....................17
1.3.2.旋轉塗佈法(Spin-coating).....................17
1.3.3.LB-like自組裝技術............................19
1.3.4 電場促進自組裝技術............................21
第二章：實驗架設及量測系統...........................22
2.1.有機發光元件製程................................22
2.1.1.微影蝕刻製作ITO電極...........................22
2.1.2.氧電漿表面清潔步驟............................26
2.1.3.有機材料蒸鍍製程..............................28
2.2.奈米球自組裝及奈米孔洞透明電極製程................31
2.2.1.奈米球自組裝.................................32
2.2.2.金屬蒸鍍及奈米球舉離..........................34
2.3.有機發光元件量測系統及表面形貌檢測................37
2.3.1.電流與電壓特性...............................36
2.3.2.表面形貌檢測.................................39
第三章：以奈米孔洞電極製備有機發光元件................41
3.1.奈米孔洞金屬透明電極特性........................42
3.1.1.奈米小球自組裝製程............................42
3.1.2.奈米孔洞金屬透明電極..........................48
3.2.以奈米金屬孔洞電極製作有機發光二極體..............54
3.3.自組裝奈米球陣列增益元件出光.....................59
第四章：結果與討論.................................62
附錄：參考文獻.....................................63

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