臺灣博碩士論文加值系統

可形變鏡面在光學系統中是一重要的反射元件，可在鏡子表面形變時改變聚焦長度，現今有幾種可用來做可形變鏡面的材料，例如液態透鏡或是微機電技術等，而微機電可形變鏡面已在我們實驗室研發多時，但其高致動電壓一直都是難以解決的問題。
在此篇論文中，我們提出一個叫離子性聚合物金屬複合材料(IPMC)來製作可形變鏡面，其優勢在於低電壓高形變量。藉由遮蔽罩子可成功的定義任意形狀的電極在IPMC上，對於圓形電極的IPMC其效果於2伏特下，可達到中心最大位移350μm，我們相信這種新的材料未來在光學系統中可當作可形變鏡面的材料。

Deformable mirror is a very important reflective component in optical system, which can vary the focal length while the surface deform. Nowadays several type of material were used as deformable mirror, such as liquid lens and MEMS deformable mirror. MEMS deformable mirror have been developed in our group and shows the potential.
However, the problem of high actuation voltage is not easy to solve.
In this thesis, we proposed using low voltage applied material, which is called Ionic-Polymer Metal Composite (IPMC) with the advantage of low applied voltage but high actuation performance. Arbitrary-shaped electrode IPMC was successfully fabricated by simply covering a shadow mask during electroless plating. Maximum central displacement of ellipsoid-shaped electrode IPMC can be achieved up to 350 μm under 2.5 volts applied. We believe this technique can be used in optical system as a deformable mirror in the future.

CONTENTS
口試委員會審定書 #
誌謝 i
中文摘要 ii
CONTENTS iv
LIST OF FIGURES vi
Chapter 1 Introduction 1
1.1 Ionic-Polymer-Metallic Composite 1
1.2 Deformable Mirror 6
1.3 MEMS Deformable Mirror 8
1.4 Optical Power 10
1.5 Design Discussion 12
1.6 Freeform MEMS Deformable Mirror 13
1.7 Simulation Results 17
Chapter 2 Fabrication 19
2.1 Standard IPMC Fabrication Process 20
2.2 Photolithography-based patterned IPMC 27
2.3 Surface Roughness Improvement by Electrode Plating 37
Chapter 3 Simulation Results 44
3.1 Simulation Working Principal 44
3.2 Design Model 49
Chapter 4 Experiment Results 53
4.1 Measurement Set-Up 53
4.2 Measurement Results 55
Chapter 5 Conclusion 73
Chapter 6 References 74

Chapter 6References
[1] Hsiang-Chun Wei and Guo-Dung John Su, A Large-Stroke Deformable Mirror by Gear Shaped IPMC
Design, 978-1-61284-777-1/11/$26.00 c2011 IEEE
[2] Mohsen Shahinpoor and Kwang J Kim Ionic polymer–metal composites: I. Fundamentals, Smart Mater. Struct. 10 (2001) 819–833
[3] S. Guo, T. Fukuda, K. Asaka, A new type of fish-like underwater microrobot, IEEE/ASME Transactions on Mechatronics 8 (1) (2003) 136–141.
[4] Kim K J and ShahinpoorM2002 Handbook of Polyelectrolytes vol 3, ed S Tripathy, J Kumar and H S Nalwa (Stevenson Ranch, CA: American Scientific Press (ASP)) chapter 1 (Applications of Polyelectrolytes in Ionic Polymeric Sensors, Actuators, and Artificial Muscles, Review Chapter) pp 1–22
[5] Mohsen Shahinpoor and Kwang J Kim, Ionic polymer–metal composites: I. Fundamentals, Smart Mater. Struct. 10 (2001) 819–833.
[6] DuPont™, http://www2.dupont.com/Our_Company/en_US/
[7] http://en.wikipedia.org/wiki/Deformable_mirror
[8] Yu-Hung Lin and Guo-Dung Su, Design and Applications of Reflective Optics System: Zoom System and Head-up Display System for Automobile.
[9] Zheng Chen∗, Tae I. Um, Hilary Bart-Smith, A novel fabrication of ionic polymer–metal composite membrane actuator capable of 3-dimensional kinematic motions, Sensors and Actuators A 168 (2011) 131–139.
[10] Jin-Han Jeon, Sung-Won Yeom, Il-Kwon Oh *, “Fabrication and actuation of ionic polymer metal composites patterned by combining electroplating with electroless plating,” Composites: Part A 39 (2008) 588–596.
[11] Guo-Hua Feng, Ri-Hong Chen, “Fabrication and characterization of arbitrary shaped μIPMC transducers for accurately controlled biomedical applications,” Sensors and Actuators A 143 (2008) 34–40.
[12] H.-C. Wei and G.-D. J. Su, "A low voltage deformable mirror using ionic-polymer metal composite," San Diego, California, USA, 2010, pp. 77880C-11.
[13] Yu-Hung Lin, Yen-Liang Liu, and Guo-Dung J. Su*, Optical zoom module based on two deformable mirrors for mobile device applications, APPLIED OPTICS / Vol. 51, No. 11.