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Chapter 1 [1.1]Oshima, H., and Morozumi, S., “Future Trends For TFT Integrated Circuits On Glass Substrates” International Electron Devices Meeting Digest, pp. 157-160 (1989) [1.2]Stewart, M., Howell, R. S., Pires, L., and Hatalis, M. K., “Polysilicon TFT Technology for Active Matrix OLED Displays” , IEEE Transactions on Electron Devices, Vol. 48, No. 5, pp. 845-851 (2001) [1.3]Kuriyama, H., Okada, T., Ashida, M., Sakamoto, O., Yuzuriha, K., Tsutsunii, K., Nishimura, T., Ananii, K., Kohno, Y., and Miyoshi, H., “An Asymmetric Memory Cell Using A C-TFT for ULSI SRAM”, Symposium on VLSI Technology, pp. 38-39 (1992) [1.4]Yamanaka, T., Hashimoto, T., Hasegawa, N., Tanala, T., Hashimoto, N., Shimizu, A., Ohki, N., Ishibashi, K., Sasaki, K., Nishida, T., Mine, T., Takeda, E., and Nagano, T., “Advanced TFT SRAM Cell Technology using a Phase-Shift Lithography” , IEEE Transaction on Electron Device, Vol. 42, pp. 1305-1313 (1995) [1.5]Yoshizaki, K., Takaashi, H., Kamigaki, Y., Asui, T., Komori, K., and Katto, H., “A 0.9V 150MHz 10mW 4mm2 2-D Discrete Cosine Transform Core Processor with Variable-Threshold-Voltage Scheme” , ISSCC Digest of Technical Papers, pp.166 (1985) [1.6]Young, N.D., Harkin, G., Bunn, R.M., McCulloch, D.J., and French, I.D., “The Fabrication and Characterization of EEPROM Arrays on Glass Using A Low-Temperature Poly-Si TFT Process” , IEEE Transaction on Electron Device, Vol. 43, No. 11, pp. 1930-1936 (1996) [1.7]Kaneko, T., Hosokawa, U., Tadauchi, N., Kita, Y. , and Andoh H., “400 dpi Integrated Contact Type Linear Image Sensors with Poly-Si TFT's Analog Readout Circuits and Dynamic Shift Registers” IEEE Transaction on Electron Device, Vol. 38, No. 5, pp.1086-1093 (1991) [1.8]Hayashi, U., Hayashi, H., Negishi, M., Matsushita, T., “A Thermal Printer Head with CMOS Thin-Film Transistors and Heating Elements Integrated on a Chip” , ISSCC Digest of Technical Papers, pp. 266 (1998) [1.9]Yamauchi, N., Inava, U., and Okamura M., “An Integrated Photodetector-Amplifier Using a-Si p-i-n Photodiodes and Poly-Si Thin-Film Transistors” , Photonics Technology Letters, Vol. 5, No, 3, pp. 319-321 (1993) [1.10]Clark M. G., “Current Status and Future Prospects of Poly-Si Devices” IEE Proceedings of Circuits, Devices and Systems, Vol. 141, No. 1, pp. 3-8 (1994) [1.11]Jagar, S., Chan, M., Poon, M.C., Wang, H., Qin, M., Ko, P.K., Wang Y., “Single Grain Thin-Film-Transistor (TFT) with SOI CMOS Performance Formed by Metal-Induced-Lateral-Crystallization” , International Electron Devices Meeting Digest, pp. 293-296 (1999) [1.12]Nakazawa, K., “Recrystallization of Amorphous Silicon Films Deposited by Low‐Pressure Chemical Vapor Deposition from Si2H6 Gas” , Journal of Applied Physics, Vol. 69, pp. 1703-1706 (1991) [1.13]H., Kuriyama, S., Kiyama, S., Noguchi, T., Kuahara, S., Ishida, T., Nohda, K., Sano, H. Iwata, S. Tsuda, and S. Nakano “High Mobility Poly-Si TFT by a New Excimer Laser Annealing Method for Large Area Electronics” , International Electron Devices Meeting Digest, pp. 563 (1991) [1.14]Lim, K. M., and Sung, M. Y., “Low Noise Digital Data Driver Circuit Integrated Poly-Si TFT–LCD” , Microelectronics Journal, Vol. 30 pp. 905–910 (1999) [1.15]Lim, K. M., Lee, K. E., Y. Juhn S., Yoon, J. M., Baek M. K., Yoo, J.-S., Jung, Y. S., Park, J. K., Lee, S. W., Kang, H. C., Kim, C. D., Chung, I. J., “A 3.5 in. QVGA Poly-Si TFT–LCD With Integrated Driver Including New 6-bit” , Solid-State Electronics, Vol. 49, pp. 1107–1111 (2005) [1.16]Leea, W. K., Hana, S. M., Choib, J., Hana, M. K., “The Characteristics of Solid Phase Crystallized (SPC) Polycrystalline Silicon Thin Film Transistors Employing Amorphous Silicon Process” , Journal of Non-Crystalline Solids, Vol. 354, pp. 2509-2512 (2008) [1.17]Tai, M., Hatano, M., Yamaguchi, S., Noda, T., Park, S. K., Shiba, and Ohkura, M., “Performance of Poly-Si TFTs Fabricated by SELAX” , IEEE Transactions on Electron Devices, Vol. 51, No. 6, pp. 934-938 (2004) [1.18]Lee, S. W., and Joo, S. K., “Low Temperature Poly-Si Thin-Film Transistor Fabrication by Metal-Induced Lateral Crystallization” , IEEE Electron Device Letters, Vol. 17, No. 4, pp. 160-162 (1996) [1.19]Levinson, J., Shepherd, F. R., Scanlon, P. J., Westwood, W. D., Este, G., and Rider, M., “Conductivity Behavior in Polycrystalline Semiconductor Thin Film Transistors” , Journal of Applied Physics, Vol. 53, No. 2, pp. 1193-1202 (1982) [1.20]Migliorato, P., Reita, C., Tallatida, G., Quinn, M., and Fortunato, G., “Anomalous Off-Current Mechanisms in n-Channel Poly-Si Thin Film Transistors” , Solid-State-Electronics, Vol. 38, pp. 2075-2079 (1995) [1.21]Hack, M., Wu, I-W., King, T. H., and Lewis, A. G., “Analysis of Leakage Currents in Poly-silicon Thin Film Transistors” , International Electron Devices Meeting Digest, Vol. 93, pp. 385-387 (1993) [1.22]King, T. J., and Saraswat K.C., “Low-Temperature (≦550℃) Fabrication of Poly-Si Thin-Film Transistors” , IEEE Electron Device Letters, Vol. 13, No. 6, pp. 309-311 (1992) [1.23]Seto, John Y. W., “The Electrical Properties of Polycrystalline Silicon Films” , Journal of Applied Physics, Vol. 46, No. 12, pp. 5247-5254 (1975) [1.24]Proano, R. E., Misage, R. S., and Ast, D. G., “Development and Electrical Properties of Undoped Polycrystalline Silicon Thin-Film Transistors” , IEEE Transactions on Electron Devices, Vol. 36, No. 9, pp. 1915-1922 (1989)
Chapter 2 [2.1]Mimura, A., Konishi, N., Ono, K., Ohwada, J., Hosokawa, Y., Ono, Y. A., Suzuki, T., Miyata, K., and Kawakami, H., “High Performance Low-Temperature Poly-Si n-Channel TFT’s for LCD” , IEEE Transactions on Electron Devices, Vol. 36, No. 2, pp. 351-359 (1989) [2.2]King, T. J., and Saraswat, K. C., “Low-Temperature (≦550℃) Fabrication of Poly-Si Thin-Film Transistors” , IEEE Electron Device Letters, Vol. 13, No. 6, pp. 309-311 (1992) [2.3]Fan, C. L., and Chen, M. C., “Performance Improvement of Excimer Laser Annealed Poly-Si TFTs Using Fluorine Ion Implantation” , Electrochemical and Solid-State Letters, Vol. 5, No. 8, pp. G75-G77 (2002) [2.4]Fan, C. L., Lai, H. L., and Yang, T. H., “Enhanced Crystallization and Improved Reliability for Low-Temperature-Processed Poly-Si TFTs With NH3 Plasma Pretreatment Before Crystallization” , IEEE Electron Device Letters, Vol. 27, No. 7 pp. 576-578 (2006) [2.5]Yeh, C. F., Lin, S. S., and Fan, C. L., “Thinner Liquid Phase Deposited Oxide for Polvsilicon Thin-Film Transistors” , IEEE Electron Device Letters, Vol. 16, No. 11, pp. 473-475 (1995) [2.6]Lin, P. S., and Li, T. S., “The Impact of Scaling-Down Oxide Thickness on Poly-Si Thin-Film Transistors’ I-V Characteristics” , IEEE Electron Device Letters, Vol. 15, No. 4, pp. 138-139 (1994) [2.7]Lee, T. S., and Lin, P. S., “On the Pseudo-Subthreshold Characteristics of Polycrystalline-Silicon Thin-Film Transistors with Large Grain Size” , IEEE Electron Device Letters, Vol. 14, No. 5, pp. 240-242 (1993) [2.8]Bhat, N., Wang, A. W., and Saraswat, K. C., “Rapid Thermal Anneal of Gate Oxides for Low Thermal Budget TFT’s” , IEEE Transactions on Electron Devices, Vol. 46, No. 1, pp. 63-69 (1999) [2.9]Kao, C. H., and Lai, C. S., “Performance and Reliability Improvements in Thin Film Transistors with Rapid Thermal N2O Annealing” , Semiconductor Science and Technology, Vol. 23, No. 2, p. 025020 (2008) [2.10]Kao, C. H., Lai, C. S., and Lee, C. L., “Oxide Grown on Polycrystal Silicon by Rapid Thermal Oxidation in N2O” , Journal of The Electrochemical Society, Vol. 153, No. 2, pp. G128-133 (2006) [2.11]Fan, C. L., Lin, Y. Y., Yang, Y. H., and Chen, H. C., “Effects of Rapid Thermal Annealing on Poly-Si TFT with Different Gate Oxide Thickness” , IEICE Transactions on Electronics, Vol. E93-C, No. 1, pp. 151-153 (2010) [2.12]Bonnel, M., Duhamel, N., Haji, L., Loisel, B., and Stoemenos, J., “Polycrystalline Silicon Thin-Film Transistors with Two-step Annealing Process” , IEEE Electron Device Letters, Vol. 14, No. 12, pp. 551-553 (1991) [2.13]Unagami, T., and Kogure, O., “Large On/Off Current Ratio and Low Leakage Current Poly-Si TFT’s with Multichannel Structure” , IEEE Transactions on Electron Devices, Vol. 35, No. 11, pp. 1986-1989 (1988) [2.14]Song, I. H., Kim, C. H., Kang, S. H., Nam, W. J., and Han, M. K., “A New Multi-Channel Dual-Gate Poly-Si TFT Employing Excimer Laser Annealing Recrystallization on Pre-patterned a-Si Thin Film” , International Electron Devices Meeting Digest, pp. 561-564 (2002) [2.15]Shieh, M. S., Sang, J. Y., Chen, C. Y., Wang, S. D., and Lei, T. F. “Electrical Characteristics and Reliability of Multi-channel Polycrystalline Silicon Thin-Film Transistors” , Japanese Journal of Applied Physics, Vol. 45, No. 4B, pp. 3159-3164 (2006) [2.16]Levinson, J., Shepherd, F. R., Scanlon, P. J., Westwood, W. D., Este, G., and Rider, M., “Conductivity Behavior in Polycrystalline Semiconductor Thin Film Transistors” , Journal of Applied Physics, Vol. 53, No. 2, pp. 1193-1202 (1982) [2.17]Proano, R. E., Misage, R. S., and Ast, D. G., “Development and Electrical Properties of Undoped Polycrystalline Silicon Thin-Film Transistors” , IEEE Transactions on Electron Devices, Vol. 36, No. 9, pp. 1915-1922 (1989) [2.18]Chen, J. H., Lei, T. F., Chen, J. H., and Chao, T. S., “Characteristics of TEOS Polysilicon Oxides: Improvement by CMP and High Temperature RTA N2/N2O Annealing” , Journal of The Electrochemical Society, Vol. 147, No. 11, pp. 4282-4288 (2000) [2.19]Kao, C. H., and Lai, C. S., “Performance and Reliability Improvements in Thin Film Transistors with Rapid Thermal N2O Annealing” , Semiconductor Science and Technology, Vol. 23, No. 2, p. 025020 (2008) [2.20]Wu, Y. L., Wu, Z. Y., and Hwu, J. G., “Improvement in Reliability of n-MOSFETs by Using Rapid Thermal N2O-Reoxidized Nitrided Gate Oxides” , Solid-State Electronics, Vol. 38, No.4, pp. 839 -843 (1995) [2.21]Yamauchi, N., Hajjar, J.J. J., and Reif, R., “Poly silicon Thin-Film Transistors with Channel Length and Width Comparable to or Smaller than the Grain Size of the Thin Film” , IEEE Transactions on Electron Devices, Vol. 38, No. 1, pp. 55-60 (1991) [2.22]Chao, C. W., Wu, Sermon Y. C., Hu, G. R., and Feng, M. S., “Device Characteristics of Polysilicon Thin-Film Transistors Fabricated by Electroless Plating Ni-Induced Crystallization of Amorphous Si” , Japanese Journal of Applied Physics, Vol. 42, No. 4A, pp. 1556-1559 (2003) [2.23]Hatalis, M. K., and Greve, D. W., “Large Grain Polycrystalline Silicon by Low Temperature Annealing of Low Pressure Chemical Vapor Deposited Amorphous Silicon Films” , Journal of Applied Physics, Vol. 63, No. 7, pp. 2260-2266 (1988) [2.24]Noma, T., Yonehara, T., and Kumomi, H., “Crystal Forms by Solid-State Recrystallization of Amorphous Si Films On SiO2” , Applied Physics Letters, Vol. 59, No. 6, pp. 653-655 (1991) [2.25]Yamauchi, N., Hajjar, J.-J.J., Reif, R., Nakazawa, K., and Tanaka, K., “Characteristics of Narrow-Channel Polysilicon Thin-Film Transistors” , IEEE Transactions on Electron Devices Vol. 38, No. 8, pp. 1967-1968 (1991) [2.26]Zen, H. W., Chang, T. C., Shih, P. S., Peng, D. Z., Hwang, T. Y., and Chang, C. Y., “Analysis of Narrow Width Effect in Polycrystalline Silicon Thin Film Transistors” , Japanese Journal of Applied Physics, Vol. 42, No. 1, pp. 28-32 (2003) [2.27]Yang, D. N., Fang, Y. K., Hwang, K. C., Lee, K. Y., Wu, K. H., Ho, J. J., Chen, C. Y., Wang, Y. J., Liang, M. S., Lee, J. Y., and Wuu, S. G., “Narrow Width Effects of Bottom-Gate Polysilicon Thin Film Transistors” , IEEE Electron Device Letters, Vol. 19, No. 11, pp. 429-431 (1998)
Chapter 3 [3.1]Tam, W. B., and Shimoda, T., “Modelling and Design of Polysilicon Drive Circuits for OLED Displays” , SID Symposium Digest of Technical Papers, Vol. 35, No. 1, pp. 1406-1409 (2004) [3.2]Pribat, D., and Plais, F., “Low Temperature Polysilicon Technology for Active Matrix Addressing of LCDs and OLEDs” , Proceedings of SPIE, Vol. 4295, pp. 60-67 (2001) [3.3]Olasupo, K. R., and Hatalis, M. K., “Leakage Current Mechanism in Sub-Micron Poly silicon Thin-Film Transistors” , IEEE Transactions on Electron Devices, Vol. 43, No. 8, pp. 1218-1223 (1996) [3.4]Wright, P. J., and Saraswat, K. C., “The Effect of Fluorine in Silicon Dioxide Gate Dielectrics” , IEEE Transactions on Electron Devices, Vol. 36, No. 5, pp. 879-889 (1989) [3.5]Fan, C. L., and Chen, M. C., “Performance Improvement of Excimer Laser Annealed Poly-Si TFTs Using Fluorine Ion Implantation” Electrochemical and Solid-State Letters, Vol. 5, No. 8, pp. G75-G77 (2002) [3.6]Tsunoda, Y., Sameshima, T., and Higasha, S., “Improvement of Electrical Properties of Pulsed Laser Crystallized Silicon Films by Oxygen Plasma Treatment” , Japanese Journal of Applied Physics, Vol. 39, No. 4A, pp. 1656-1659 (2000) [3.7]Hack, M., Lewis, A. G., and Wu, I.-W., “Physical Models for Degradation Effects in Polysilicon Thin-Film Transistors” , IEEE Transactions on Electron Devices, Vol. 40, No. 5, pp. 890-897 (1993) [3.8]Lee, Y. S., Lin, H. Y., Lei, T. F., Huang, T. Y., Chang, T. C., and Chang, C. Y., “Comparison of N2 and NH3 Plasma Passivation Effects on Polycrystalline Silicon Thin-Film Transistors” , Japanese Journal of Applied Physics, Vol. 37, No. 7, pp. 3900-3903 (1998) [3.9]Wang, F. S., Huang, C. Y., and Cheng, H. C., “Plasma Passivation Effects on Polycrystalline Silicon Thin-Film Transistors Utilizing Nitrous Oxide Plasma” , Japanese Journal of Applied Physics, Vol. 36, No. 4A, pp. 2028-2031 (1997) [3.10]Yang, C. K., Lei, T. F., and Lee, C. L., “Characteristics of Top-Gate Thin-Film Transistors Fabricated on Nitrogen-Implanted Polysilicon Films” , IEEE Transactions on Electron Devices, Vol. 42, No. 12, pp. 2163-2169 (1995) [3.11]Chang, C. W., Huang, P. W., Deng, C. K., Huang, J. J., Chang, H. R., and Lei, T. F., “CF4-Plasma-Induced Fluorine Passivation Effects on Poly-Si TFTs with High- Pr2O3 Gate Dielectric” , Journal of The Electrochemical Society, Vol. 155, No. 2, pp. J50-54 (2008) [3.12]Fan, C. L., and Chen, M. C., “Effects of N2O Plasma Treatment on the Performance of Excimer-Laser-Annealed Polycrystalline Silicon Thin Film Transistors” , Japanese Journal of Applied Physics, Vol. 41, No. 9, pp. 5542-5545 (2002) [3.13]Liang, G. T., and Hong, Franklin,C. N., “Diamond Growth by Hollow Cathode Arc Plasma Chemical Vapor Deposition” , Journal of Materials Research, Vol. 13, No. 11, pp. 3114-3121 (1998) [3.14]Mildner, M., Korzec, D., and Engemann, J., “13.56 MHz Hollow Cathode Jet Matrix Plasma Source for Large Area Surface Coating” , Surface and Coatings Technology, Vol. 112, No. 1, pp. 366-372 (1999) [3.15]Morimoto, Y., Jinno, Y., Hirai, K., Ogata, H., Yamada, T., and Yoneda, K., “Influence of the Grain Boundaries and Intragrain Defects on the Performance of Poly-Si Thin Film Transistors” , Journal of The Electrochemical Society, Vol. 144, No. 7, pp. 2495-2501 (1997) [3.16]Dimitriadis, C. A., Coxon, P. A., Dozsa, L., Papadimitriou, L., and Economou, N., “Performance of Thin-Film Transistors on Polysilicon Films Grown by Low-Pressure Chemical Vapor Deposition at Various Pressures” , IEEE Transactions on Electron Devices, Vol. 39, NO. 3, pp. 598-606 (1992) [3.17]Hack, M., Lewis, A. G., and Wu, I. W., “Physical Models for Degradation Effects in Polysilicon Thin-Film Transistors” , IEEE Transactions on Electron Devices, Vol. 40, No. 5, pp. 890-897 (1993)
Chapter 4 [4.1]Hseih, B. C., Hatalis, M. K., and Greve, D. W., “Low-Temperature Polycrystalline Silicon Thin-Film Transistors for Displays” , IEEE Transactions on Electron Devices, Vol. 35, No. 11, 1840-1845 (1988) [4.2]Stewart, M., Howell, R. S., Pires, L., and Hatalis, M. K., “Polysilicon TFT Technology for Active Matrix OLED Displays” , IEEE Transactions on Electron Devices, Vol. 48, No. 5, pp. 845-851 (2001) [4.3]Chang, K. M., Yang, W. C., and Tsai, C. P., “Electrical Characteristics of Low Temperature Polysilicon TFT with a Novel TEOS/Oxynitride Stack Gate Dielectric” , IEEE Electron Device Letters, Vol. 24, No. 8, pp. 512-514 (2003) [4.4]Wu, I. W., Lewis, A. G., Huang, T. Y., and Chiang, A., “Passivation Kinetics of Two Types of Defects in Polysilicon TFT by Plasma Hydrogenation” , IEEE Electron Device Letters, Vol. 12, No. 4, pp. 181-183 (1991) [4.5]Wang, F. S., Tsai, M. J., and Cheng, H. C., “The Effects of NH3 Plasma Passivation on Polysilicon Thin-Film Transistors” , IEEE Electron Device Letters, Vol. 16, No. 11, pp. 503-505 (1995) [4.6]Fan, C. L., Lai, H. L., and Yang, T. H., “Enhanced Crystallization and Improved Reliability for Low-Temperature-Processed Poly-Si TFTs With NH3-Plasma Pretreatment Before Crystallization” , IEEE Electron Device Letters, Vol. 27, No. 7 pp. 756-578 (2006) [4.7]Fan, C. L., Lai, H. L., and Chang, J. Y., “Improvement in Brightness Uniformity by Compensating for the Threshold Voltages of Both the Driving Thin-Film Transistor and the Organic Light-Emitting Diode for Active-Matrix Organic Light-Emitting Diode Displays” , Japanese Journal of Applied Physics Vol. 49, p. 05EB04 (2010) [4.8]Kouvatsos, D. N., and Hatalis, M. K., “Polycrystalline Silicon Thin Film Transistors Fabricated at Reduced Thermal Budgets by Utilizing Fluorinated Gate Oxidation” , IEEE Transactions on Electron Devices, Vol. 43, No. 9, pp. 1448-1453 (1996) [4.9]Tu, C. H., Chang, T. C., Liu, P. T., Chen, C. H., Yang, C. Y., Wu, Y. C., Liu, H. C., Chang, L. T., Tsai, C. C., Sze, Simon M., and Chang, C. Y., “Electrical Enhancement of Solid Phase Crystallized Poly-Si Thin-Film Transistors with Fluorine Ion Implantation” , Journal of The Electrochemical Society, Vol. 153, No. 9, pp. G815-G818 (2006) [4.10]Ma, M. W., Chen, C. Y., Su, C. J., Wu, W. C., Wu, Y. H., Yang, T. Y., Kao, K. H., Chao, T. S., and Lei, T. F., “Impacts of Fluorine Ion Implantation With Low-Temperature Solid-Phase Crystallized Activation on High-κ LTPS-TFT” , IEEE Electron Device Letters, Vol. 29, No. 2, pp. 168-170 (2008) [4.11]Fan, C. L., and Chen, M. C., “Performance Improvement of Excimer Laser Annealed Poly-Si TFTs Using Fluorine Ion Implantation” , Electrochemical and Solid-State Letters, Vol. 5, No. 8, pp. G75-G77 (2002) [4.12]Wang, S. D., Lo, W. H., and Lei, T. F., “CF4 Plasma Treatment for Fabricating High-Performance and Reliable Solid-Phase-Crystallized Poly-Si TFTs” , Journal of The Electrochemical Society, Vol. 152, No.9, pp. G703-G706 (2005) [4.13]Chang, C. W., Huang, P. W., Deng, C. K., Huang, J. J., Chang, H. R., and Lei, T. F., “CF4-Plasma-Induced Fluorine Passivation Effects on Poly-Si TFTs with High-Pr2O3 Gate Dielectric” , Journal of The Electrochemical Society, Vol. 155, No. 2, pp. J50-J54 (2008) [4.14]Levinson, J., Shepherd, F. R., Scanlon, P. J., Westwood, W. D., Este, G., and Rider, M., “Conductivity Behavior in Polycrystalline Semiconductor Thin Film Transistors” , Journal of Applied Physics, Vol. 53, No. 2, pp. 1193-1202 (1982) [4.15]Proano, R. E., Misage, R. S., and Ast, D. G., “Development and Electrical Properties of Undoped Polycrystalline Silicon Thin-Film Transistors” , IEEE Transactions on Electron Devices, Vol. 36, No. 9, pp. 1915-1922 (1989) [4.16]Olasupo, K. R., and Hatalis, M. K., “Leakage Current Mechanism in Sub-Micron Polysilicon Thin-Film Transistors” , IEEE Transactions on Electron Devices, Vol. 43, No. 8, pp. 1218-1223 (1996) [4.17]Chang, C. P., and Wu, Sermon Y. C., “Effect of CF4 Plasma on Properties and Reliability of Metal-Induced Lateral Crystallization Silicon Transistors” , Journal of The Electrochemical Society, Vol. 157, No. 2 pp. H192-H195 (2010) [4.18]Tu, C. H., Chang, T. C., Liu, P. T., Yang, C. Y., Liu, H. C., Chen, W. R., Wu, Y. C., and Chang, C. Y., “Improvement of Electrical Characteristics for Fluorine-Ion-Implanted Poly-Si TFTs Using ELC” , IEEE Electron Device Letters, Vol. 27, No. 4, pp. 262 (2006) [4.19]Tu, C. H., Chang, T. C., Liu, P. T., Zan, H. W., Tai, Y. H., Yang, C. Y., Wu, Y. C., Liu, H. C., Chen, W. R., and Chang, C. Y., “Enhanced Performance of Poly-Si Thin Film Transistors Using Fluorine Ions Implantation” , Electrochemical and Solid-State Letters, Vol. 8, No. 9, pp. G246-G248 (2005)
Chapter 5 [5.1]Mimura, A., Konishi, N., Ono, K., Ohwada, J., Hosokawa, Y., Ono, Y. A., Suzuki, T., Miyata K., and Kawakami, H., “High Performance Low-Temperature Poly-Si n-Channel TFT’s for LCD” , IEEE Transactions on Electron Devices, Vol. 36, No. 2, pp. 351-359 (1989) [5.2]Serikawa, T., Shirai, S., Okamoto, A., and Suyama, S., “Low-Temperature Fabrication of High-Mobility Poly-Si TFT’s for Large-Area LCD’s” , IEEE Transactions on Electron Devices, Vol. 36, No. 9 pp. 1929-1933 (1989) [5.3]Olasupo, K. R., and Hatalis, M. K., “Leakage Current Mechanism in Sub-Micron Poly silicon Thin-Film Transistors” , IEEE Transactions on Electron Devices, Vol. 43, No. 8, pp. 1218-1223 (1996) [5.4]Wu, I. W., Lewis, A. G., Huang, T. Y., and Chiang, A., “Passivation Kinetics of Two Types of Defects in Polysilicon TFT by Plasma Hydrogenation” , IEEE Electron Device Letters, Vol. 12, No. 4, pp. 181-183 (1991) [5.5]Fan, C. L., and Chen, M. C., “Performance Improvement of Excimer Laser Annealed Poly-Si TFTs Using Fluorine Ion Implantation” , Electrochemical and Solid-State Letters, Vol. 5, No. 8, pp. G75-G77 (2002) [5.6]Tsunoda, Y., Sameshima, T., and Higasha, S., “Improvement of Electrical Properties of Pulsed Laser Crystallized Silicon Films by Oxygen Plasma Treatment” , Japanese Journal of Applied Physics, Vol. 39, No. 4A, pp. 1656-1659 (2000) [5.7]Chen, W. R., Chang, T. C., Liu, P. T., Wu, C. J., Tu, C. H., Sze, S. M., and Chang, C. Y., “Passivation Effect of Poly-Si Thin-Film Transistors With Fluorine-Ion-Implanted Spacers” , IEEE Electron Device Letters, Vol. 29, No. 6, pp. 603-605 (2008) [5.8]Chang, C. W., Deng, C. K., Wu, S. C., Huang, J. J., Chang, H. R., and Lei, T. F., “Characterizing Fluorine-Ion Implant Effects on Poly-Si Thin-Film Transistors With Pr2O3 Gate Dielectric” , Journal of Display Technology, Vol. 4, No. 2, pp. 173-179 (2008) [5.9]Matsumura, H., Nakagome, Y., and Furukawa, S., “A heatresisting new amorphous silicon” , Applied Physics Letters, Vol. 36, No. 6, pp. 439-440 (1980) [5.10]Kim, C. H., Jeon, J. H., Yoo, J. S., Park, K. C., and Han, M. K., “Excimer-Laser-Induced In-Situ Fluorine Passivation Effects on Polycrystalline Silicon Thin Film Transistors” , Japanese Journal of Applied Physics, Vol. 38, No. 4B, pp. 2247-2250 (1999) [5.11]Chang, C. W., Deng, C. K., Huang, J. J., Wang, T. Y., and Lei, T. F., “Electrical Enhancement of Polycrystalline Silicon Thin-Film Transistors Using Fluorinated Silicate Glass Passivation Layer” , Japanese Journal of Applied Physics, Vol. 47, No. 2, pp. 847-852 (2008) [5.12]Miyajima, H., Katsumata, R., Nakasaki, Y., Nishiyama, Y., and Hayasaka, N., “Water Absorption Properties of Fluorine-Doped SiO2 Films Using Plasma-Enhance Chemical Vapor Deposition” , Japanese Journal of Applied Physics, Vol. 35, No. 12A pp. 6217-6225 (1996) [5.13]Chang, W. J., Houng, M. P., and Wang, Y. H., “Fourier Transform Infrared Characterization of Moisture Absorption in SiOF Films” , Japanese Journal of Applied Physics, Vol. 38, No. 8, pp. 4642-4647 (1999) [5.14]Tsai, M. Y., Streetman, B. G., Williams, P., and Evans, Jr. C. A., “Anomalous Migration of Fluorine and Electrical Activation of Boron in BF+2 Implanted Silicon” , Applied Physics Letters, Vol. 32, No. 3, pp. 144-147 (1978) [5.15]Levinson, J., Shepherd, F. R., Scanlon, P. J., Westwood, W. D., Este, G., and Rider, M., “Conductivity Behavior in Polycrystalline Semiconductor Thin Film Transistors” , Journal of Applied Physics, Vol. 53, No. 2, pp. 1193-1202 (1982) [5.16]Proano, R. E., Misage, R. S., and Ast, D. G., “Development and Electrical Properties of Undoped Polycrystalline Silicon Thin-Film Transistors” , IEEE Transactions on Electron Devices, Vol. 36, No. 9, pp. 1915-1922 (1989)
Chapter 6 [6.1]Hosokawa, C., Matsuura, M., Eida, M., Fukuoka, K., Tokailin, H., and Kusumoto, T., “Full-Color Organic EL Display” , SID Symposium Digest of Technical Papers, Vol. 29, No. 1, pp. 7-10 (1998) [6.2]Lin, C. W., Pang, D. Z., Lee, R., Shih, Y. F., Jan, C. K., Hsieh, M. H., Chang, S. C., and Tsai, Y. M., Proc. Int. Symp. International Display Manufacturing Conference and Exhibition, 2005, p. 315. [6.3]Dawson, R. M. A., Shen, Z., Furst, D. A., Connor, S., Hsu, J., Kane, M. G., Stewart, R. G., and Ping, K., “The Impact of the Transient Response of Organic Light Emitting Diodes on the Design of Active Matrix OLED Displays” , Proceedings of International Symposium Technical Digest International Electron Devices Meeting, pp. 875-878 (1998) [6.4]Kimura, M., Yudasaka, I., Kanbe, S., Kobayashi, H., Kiguchi, H., Seki, S. I., Miyashita, S., and Ohshima, H., “Low-Temperature Polysilicon Thin-Film Transistor Driving with Integrated Driver for High-Resolution Light Emitting Polymer Display” , IEEE Transactions on Electron Devices, Vol. 46, No. 12, pp. 2282-2288 (1999) [6.5]Lee, J. H., You, B. H., Nam, W. J., Lee, H. J., and Han., M. K., “A New a-Si:H TFT Pixel Design Compensating Threshold Voltage Degradation of TFT and OLED” , SID Symposium Digest of Technical Papers, Vol. 35, No. 1 pp. 264-267 (2004) [6.6]Choi, S. M., Kwon, O. K., and Chung, H. K., “An Improved Voltage Programmed Pixel Structure for Large Size and High Resolution AM-OLED Displays” , SID Symposium Digest of Technical Papers, Vol. 35, No. 1 pp. 260-263 (2004) [6.7]Lu, H. Y., Liu, P. T., Chang, T. C., and Chi, S., “Enhancement of Brightness Uniformity by a New Voltage-Modulated Pixel Design for AMOLED Displays” , IEEE Electron Device Letters Vol. 27, No. 9 pp. 743-745 (2006) [6.8]Lee, J. H., Park, S. G., Jeno, J. H., Goh, J. C., Huh, J. M., Choi, J., Chung, K., and Han, M. K., “New Fraction Time Annealing Method For Improving Organic Light Emitting Diode Current Stability of Hydorgenated Amorphous Silicon Thin-Film Transistor Based Active Matrix Organic Light Emitting Didode Backplane” , Japanese Journal of Applied Physics, Vol. 46, No. 3B, pp. 1350-1353 (2007) [6.9]Shin, H. S., Lee, W. K., Park, S. G., Kuk, S. H., and Han, M. K., “Active-Matrix Organic Light Emission Diode Pixel Circuit for Suppressing and Compensating for the Threshold Voltage Degradation of Hydrogenated Amorphous Silicon Thin Film Transistors” , Japanese Journal of Applied Physics, Vol. 48 p. 03B023 (2009) [6.10]Lee, J. H., Nam, W. J., Jung, S. H., and Han. M. K., “A new current scaling pixel circuit for AMOLED” , IEEE Electron Device Letter, Vol. 25, No. 5, pp. 280-282 (2004) [6.11]He, Y., Hattori, R., and Kanicki, J., “Four-Thin Film Transistor Pixel Electrode Circuits for Active-Matrix Organic Light-Emitting Displays” , Japanese Journal of Applied Physics, Vol. 40, No. 3A, pp. 1199-1208 (2001) [6.12]Lee, J. H., Nam, W. J., Kim, C. Y., Shin, H. S., Kim, C. D., and Han, M. K., “New Current-Scaling Pixel Circuit Compensating Non uniform Electrical Characteristics for Active Matrix Organic Light Emitting Diode” , Japanese Journal of Applied Physics, Vol. 45, No. 5B, pp. 4402-4406 (2006) [6.13]Lee, H., Yoo, J. S., Kim, C. D., Chung, I. J., and Kanicki, J., “Novel Current-Scaling Current-Mirror Hydrogenated Amorphous Silicon Thin-Film Transistor Pixel Electrode Circuit with Cascade Capacitor for Active-Matrix Organic Light-Emitting Devices” , Japanese Journal of Applied Physics, Vol. 46, No. 3B, pp. 1343-1349 (2007) [6.14]Mizukami, M., 6-Bit Digital VGA OLED” , SID Symposium Digest of Technical Papers, Vol. 31, No.1, pp. 912-915 (2000) [6.15]Kang, M. H., Hur, J. H., Nam, Y. D., Lee, E. H., Kim, S. H., and Jang, J., “An Optical Feedback Compensation Circuit With a-Si:H Thin-Film Transistors for Active Matrix Organic Light Emitting Diodes” , Journal of Non-Crystalline Solids, Vol. 354, pp. 2523-2528 (2008) [6.16]Lin, Y. C., and Shsieh. H. P. D., “Improvement of Brightness Uniformity by AC Driving Scheme for AMOLED Display” , IEEE Electron Device Letter, Vol. 25, No. 11, pp. 728-730 (2004) [6.17]Lee, J. H., Park, S. G., Han, S. M., and Park, K. C., “New PMOS LTPS–TFT Pixel for AMOLED to Suppress the Hysteresis Effect on OLED Current by Employing a Reset Voltage Driving” , Solid-State Electronics, Vol. 52, No. 3, pp. 462-466 (2008) [6.18]Chen, B. T., Tai, Y. H., Kuo, Y. J., Tsai, C. C., and Cheng, H. C., “New Pixel Circuits for Driving Active Matrix Organic Light Emitting Diodes” , Solid-State Electronics, Vol. 50, No. 50, pp. 272-275 (2006) [6.19]Fish, D., Young, N., Deane, S., Steer, A., George, D., Giraldo, A., Lifka, H., Gielkens, O., and Oepts, W., “Optical Feedback for AMOLED Display Compensation using LTPS and a-Si:H Technologies” , SID Symposium Digest of Technical Papers, Vol. 36, No. 38, pp. 1340-1343 (2005) [6.20]Torres, D. A., Lister, P. F., and Newbury, P., “LUT-based Compensation Model for OLED Degradation” , Journal of the Society for Information Display, Vol. 13, No. 5, pp. 435-441 (2005) [6.21]Lee, J. H., Kim, J. H., and Han, M. K., “A new a-Si:H TFT Pixel Circuit Compensating the Threshold Voltage Shift of a-Si:H TFT and OLED for Active Matrix OLED” , IEEE Electron Device Letters, Vol. 26, No. 12, pp. 897-899 (2005) [6.22]Ashtiani, S. J., Chaji, G. R., and Nathan, A., “AMOLED Pixel Circuit With Electronic Compensation of Luminance Degradation” , Journal of Display Technology, Vol. 3, No. 1, pp. 36-39 (2007)
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